Comment fiji1 SNF 2012-10-24 10:29:32: HfO2 and TiN deposition this weekend

zzp at snf.stanford.edu zzp at snf.stanford.edu
Sun Dec 23 08:54:39 PST 2012


Could you please install H2O, Hf and Ti precursors before my run Sunday? Also, last weekend I tried to deposit TiN but the RF plasma power reading was fluctuating, although I got some deposition according to sheet resistance measurement. Thank you very much!



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