Comment fiji1 SNF 2012-11-15 11:47:11: Ti and Ru precursor requests

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sun Dec 23 08:54:39 PST 2012


I would like to run some Ti and Ru this weekend (Friday night and Saturday morning). Please install these precursors.
Do I need special permission (i.e., Engineer status) on the tool to raise the temperatures high enough for the thermal Ru recipe?



More information about the fiji1-pcs mailing list