Problem fiji1 SNF 2012-11-22 06:40:03: unable to reload platen

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sun Dec 23 08:54:39 PST 2012


Yesterday, when I went to load my samples, there were a lot of particles on the platen (previous user did a low temperature run at 120C followed by my run at 250C).
I wiped off the platen with clean wipes. It was difficult to get the platen over the gate but I did it. Today, I unloaded my wafers and was not able to get the platen over the gate.



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