Problem fiji1 SNF 2012-11-30 12:26:04: Screw holding Platen is loose

asamarao at snf.stanford.edu asamarao at snf.stanford.edu
Sun Dec 23 08:54:39 PST 2012


One of the two screws holding the platen is loose. So the platen bends down more than it should, and does not have the clearance to be placed on the chuck in the chamber. I could not get to load my wafers in. 
Ashwin.



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