Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses

svolkman at svolkman at
Sun Dec 23 08:54:39 PST 2012

I'm not sure if this is normal, seems like it wouldn't be.  Whe n the Hf precursor is pulsed, the pressure of the chamber rises only slightly above the base pressure.  This is in contrast to what I see for the TMA and DI water pulses.  Presursor may be running low.

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