Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses

J Provine jprovine at stanford.edu
Sun Dec 9 08:04:01 PST 2012


this is not uncommon since TDMA-Hf is much less volatile than TMA or H2O.
 it may still be a sign of precursor running low, but even small pulses
saturate the chamber fully.  please monitor your film dep as this is the
clear way to indicate need for precursor refilling/replacement.
j


On Sat, Dec 8, 2012 at 10:09 PM, <svolkman at snf.stanford.edu> wrote:

> I'm not sure if this is normal, seems like it wouldn't be.  Whe n the Hf
> precursor is pulsed, the pressure of the chamber rises only slightly above
> the base pressure.  This is in contrast to what I see for the TMA and DI
> water pulses.  Presursor may be running low.
>
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