Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses
Steven K. Volkman
svolkman at eecs.berkeley.edu
Sun Dec 9 09:02:07 PST 2012
Peaks were barely noticeable. Eyeball spectroscopy reveals deficient and
On Dec 9, 2012 8:04 AM, "J Provine" <jprovine at stanford.edu> wrote:
> this is not uncommon since TDMA-Hf is much less volatile than TMA or H2O.
> it may still be a sign of precursor running low, but even small pulses
> saturate the chamber fully. please monitor your film dep as this is the
> clear way to indicate need for precursor refilling/replacement.
> On Sat, Dec 8, 2012 at 10:09 PM, <svolkman at snf.stanford.edu> wrote:
>> I'm not sure if this is normal, seems like it wouldn't be. Whe n the Hf
>> precursor is pulsed, the pressure of the chamber rises only slightly above
>> the base pressure. This is in contrast to what I see for the TMA and DI
>> water pulses. Presursor may be running low.
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