Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses

Steven K. Volkman svolkman at eecs.berkeley.edu
Sun Dec 9 09:02:07 PST 2012


Peaks were barely noticeable.  Eyeball spectroscopy reveals deficient and
non-uniform films.

Steve
 On Dec 9, 2012 8:04 AM, "J Provine" <jprovine at stanford.edu> wrote:

> this is not uncommon since TDMA-Hf is much less volatile than TMA or H2O.
>  it may still be a sign of precursor running low, but even small pulses
> saturate the chamber fully.  please monitor your film dep as this is the
> clear way to indicate need for precursor refilling/replacement.
> j
>
>
> On Sat, Dec 8, 2012 at 10:09 PM, <svolkman at snf.stanford.edu> wrote:
>
>> I'm not sure if this is normal, seems like it wouldn't be.  Whe n the Hf
>> precursor is pulsed, the pressure of the chamber rises only slightly above
>> the base pressure.  This is in contrast to what I see for the TMA and DI
>> water pulses.  Presursor may be running low.
>>
>
>
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