From mmrincon at snf.stanford.edu Mon Jul 2 15:02:52 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 2 Jul 2012 15:02:52 -0700 Subject: Comment fiji1 SNF 2012-07-02 15:02:52: precursor status Message-ID: h2o tdma-ti pt From mmrincon at snf.stanford.edu Mon Jul 2 15:03:05 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 2 Jul 2012 15:03:05 -0700 Subject: Comment fiji1 SNF 2012-06-29 16:11:40: precursor status Message-ID: logged From trejo10 at snf.stanford.edu Tue Jul 3 00:56:03 2012 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Tue, 3 Jul 2012 00:56:03 -0700 Subject: Shutdown fiji1 SNF 2012-07-03 00:56:03: Dropped Plate Message-ID: In my attempt to get the sample, the plate slipped out of the pins and is in the middle of the gate valve. From jprovine at snf.stanford.edu Tue Jul 3 07:25:03 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 3 Jul 2012 07:25:03 -0700 Subject: Shutdown fiji1 SNF 2012-07-03 00:56:03: Dropped Plate Message-ID: plate retrieved. wafer placed in the wafer holder left by fiji1. From su1 at snf.stanford.edu Wed Jul 4 16:13:56 2012 From: su1 at snf.stanford.edu (su1 at snf.stanford.edu) Date: Wed, 4 Jul 2012 16:13:56 -0700 Subject: Shutdown fiji1 SNF 2012-07-04 16:13:56: issue with transfer arm Message-ID: The transfer arm has some issues. It is not grabbing the wafer holder and I'm not able to get my wafer out. Kaveh also took a look at it and I suppose it is safer to wait for help. From jprovine at snf.stanford.edu Thu Jul 5 10:00:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 5 Jul 2012 10:00:57 -0700 Subject: Shutdown fiji1 SNF 2012-07-04 16:13:56: issue with transfer arm Message-ID: transfer arm fine. wafer recovered. suggest user operate in business hours or get a refresher training round to remind him how to use the transfer arm. From eldwin at snf.stanford.edu Sat Jul 7 14:43:13 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sat, 7 Jul 2012 14:43:13 -0700 Subject: Comment fiji1 SNF 2012-07-07 14:43:12: al2o3 precursor request Message-ID: Could we have tma installed on fiji1? I have a reservation on tues 7/10. thanks! From jprovine at snf.stanford.edu Wed Jul 11 07:08:36 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:08:36 -0700 Subject: Comment fiji1 SNF 2012-07-11 07:08:35: precursor status Message-ID: water tma Pt From jprovine at snf.stanford.edu Wed Jul 11 07:08:46 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:08:46 -0700 Subject: Comment fiji1 SNF 2012-07-02 15:02:52: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Wed Jul 11 07:08:54 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:08:54 -0700 Subject: Comment fiji1 SNF 2012-07-07 14:43:12: al2o3 precursor request Message-ID: request met From eldwin at snf.stanford.edu Mon Jul 16 17:19:59 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Mon, 16 Jul 2012 17:19:59 -0700 Subject: Comment fiji1 SNF 2012-07-16 17:19:59: HfO2 precursor request Message-ID: Could we have the precursor for HfO2 on fiji1 tomorrow (7/17) evening? Thanks! From fpurkl at snf.stanford.edu Mon Jul 16 17:36:07 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Mon, 16 Jul 2012 17:36:07 -0700 Subject: Problem fiji1 SNF 2012-07-16 17:36:06: TMA precursor emty? Message-ID: For a PEALD Al2O3 run, there were no TMA pulses visible. Is the precursor empty? From mmrincon at snf.stanford.edu Tue Jul 17 10:04:33 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 17 Jul 2012 10:04:33 -0700 Subject: Problem fiji1 SNF 2012-07-16 17:36:06: TMA precursor emty? Message-ID: replaced TMA with new precursor. From mmrincon at snf.stanford.edu Tue Jul 17 10:05:23 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 17 Jul 2012 10:05:23 -0700 Subject: Comment fiji1 SNF 2012-07-16 17:19:59: HfO2 precursor request Message-ID: tdma-hf precursor installed From mmrincon at snf.stanford.edu Tue Jul 17 10:05:38 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 17 Jul 2012 10:05:38 -0700 Subject: Comment fiji1 SNF 2012-07-11 07:08:35: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Tue Jul 17 10:06:01 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 17 Jul 2012 10:06:01 -0700 Subject: Comment fiji1 SNF 2012-07-17 10:06:00: precursor status Message-ID: water tma tdma-hf From zzp at snf.stanford.edu Tue Jul 17 17:34:14 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 17 Jul 2012 17:34:14 -0700 Subject: Comment fiji1 SNF 2012-07-17 17:34:13: precursor request for TiN deposition Message-ID: i am planning for a run for TiN this weekend. From wslee at snf.stanford.edu Tue Jul 17 17:47:45 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 17 Jul 2012 17:47:45 -0700 Subject: Comment fiji1 SNF 2012-07-17 17:47:44: Ti precursor requested for Wednesday afternoon Message-ID: Planning on running TiN Wednesday afternoon till Wednesday night. Thanks. From mmrincon at stanford.edu Tue Jul 17 21:10:35 2012 From: mmrincon at stanford.edu (Michelle Rincon) Date: Tue, 17 Jul 2012 21:10:35 -0700 (PDT) Subject: Comment fiji1 SNF 2012-07-17 17:47:44: Ti precursor requested for Wednesday afternoon In-Reply-To: <20120718004745.37E2B2E64B@smtp-unencrypted.stanford.edu> Message-ID: <1081169559.19402497.1342584635341.JavaMail.root@zm04.stanford.edu> Thanks for the heads up! I will make sure you are ready to go. Michelle ----- Original Message ----- From: wslee at snf.stanford.edu To: fiji1-pcs at snf.stanford.edu Sent: Tuesday, July 17, 2012 5:47:45 PM Subject: Comment fiji1 SNF 2012-07-17 17:47:44: Ti precursor requested for Wednesday afternoon Planning on running TiN Wednesday afternoon till Wednesday night. Thanks. From mmrincon at snf.stanford.edu Wed Jul 18 10:17:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 18 Jul 2012 10:17:07 -0700 Subject: Comment fiji1 SNF 2012-07-17 17:47:44: Ti precursor requested for Wednesday afternoon Message-ID: ti loaded on fiji1 From mmrincon at snf.stanford.edu Wed Jul 18 10:17:25 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 18 Jul 2012 10:17:25 -0700 Subject: Comment fiji1 SNF 2012-07-17 10:06:00: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Wed Jul 18 10:17:48 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 18 Jul 2012 10:17:48 -0700 Subject: Comment fiji1 SNF 2012-07-18 10:17:48: precursor status Message-ID: water tma tdma-ti From wslee at snf.stanford.edu Fri Jul 20 08:49:23 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 20 Jul 2012 08:49:23 -0700 Subject: Comment fiji1 SNF 2012-07-20 08:49:22: Pt precursor request for Monday afternoon Message-ID: I would like to use the Pt precursor on Monday afternoon. Thanks. From mmrincon at snf.stanford.edu Fri Jul 20 09:17:59 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 20 Jul 2012 09:17:59 -0700 Subject: Comment fiji1 SNF 2012-07-17 17:34:13: precursor request for TiN deposition Message-ID: Ti is on fiji1, no precursor changes requested for over the weekend. From mmrincon at snf.stanford.edu Mon Jul 23 14:27:34 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 23 Jul 2012 14:27:34 -0700 Subject: Comment fiji1 SNF 2012-07-20 08:49:22: Pt precursor request for Monday afternoon Message-ID: Pt installed! From mmrincon at snf.stanford.edu Mon Jul 23 14:27:49 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 23 Jul 2012 14:27:49 -0700 Subject: Comment fiji1 SNF 2012-07-18 10:17:48: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Mon Jul 23 14:28:42 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 23 Jul 2012 14:28:42 -0700 Subject: Comment fiji1 SNF 2012-07-23 14:28:42: precursor status Message-ID: (1) h2o (2) tma2 (3) pt1 From kavehm at snf.stanford.edu Tue Jul 24 10:04:05 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Tue, 24 Jul 2012 10:04:05 -0700 Subject: Shutdown fiji1 SNF 2012-07-24 10:04:04: transfer arm Message-ID: plate stuck in chamber, could not retrieve with transfer arm. normal load/unload procedure was ran. From mmrincon at snf.stanford.edu Tue Jul 24 10:23:20 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 24 Jul 2012 10:23:20 -0700 Subject: Shutdown fiji1 SNF 2012-07-24 10:04:04: transfer arm Message-ID: no issues with arm or plate transfer. remember on fiji 1 you need to have pins high in order to engage with plate. From ross at snf.stanford.edu Wed Jul 25 11:07:44 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:07:44 -0700 Subject: Comment fiji1 SNF 2012-07-25 11:07:43: precursor request Message-ID: Zirconia ASAP please From zzp at snf.stanford.edu Thu Jul 26 10:39:33 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:39:33 -0700 Subject: Comment fiji1 SNF 2012-07-26 10:39:33: precursor request Message-ID: TMA-Ti for TiN deposition Sunday or early next week From mmrincon at snf.stanford.edu Thu Jul 26 13:00:26 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 26 Jul 2012 13:00:26 -0700 Subject: Comment fiji1 SNF 2012-07-25 11:07:43: precursor request Message-ID: zirconia installed From mmrincon at snf.stanford.edu Thu Jul 26 13:01:24 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 26 Jul 2012 13:01:24 -0700 Subject: Comment fiji1 SNF 2012-07-26 13:01:24: precursor status Message-ID: (1) h2o (2) tma2 (3) tdma-zr (bottle 1) From mmrincon at snf.stanford.edu Thu Jul 26 13:01:32 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 26 Jul 2012 13:01:32 -0700 Subject: Comment fiji1 SNF 2012-07-23 14:28:42: precursor status Message-ID: outdated From ross at snf.stanford.edu Thu Jul 26 22:59:19 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Thu, 26 Jul 2012 22:59:19 -0700 Subject: Comment fiji1 SNF 2012-07-26 22:59:18: precursor request Message-ID: Zr for 7/27 and 7/29 please! From jprovine at snf.stanford.edu Sat Jul 28 12:13:12 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 12:13:12 -0700 Subject: Comment fiji1 SNF 2012-07-26 22:59:18: precursor request Message-ID: request met From jprovine at snf.stanford.edu Tue Jul 31 15:35:26 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 31 Jul 2012 15:35:26 -0700 Subject: Comment fiji1 SNF 2012-07-26 10:39:33: precursor request Message-ID: met