From jasonlin at snf.stanford.edu Fri Jun 1 00:52:21 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 1 Jun 2012 00:52:21 -0700 Subject: Problem fiji1 SNF 2012-06-01 00:52:20: Ti precursor Message-ID: Ti precursor needs to run for about 150 pulses before you see a pulse. If you leave the machine idle for about 15 minutes, then start a Ti recipe again, you won't see Ti pulses until >100 pulses later. Not sure if this is an indication of low precursor or something. From jprovine at snf.stanford.edu Fri Jun 1 10:59:12 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 1 Jun 2012 10:59:12 -0700 Subject: Problem fiji1 SNF 2012-05-29 14:52:57: loading/unloading Message-ID: this is not misalignment. it is high on purpose because i could not get the substrate holder in without setting it very high. note that you do need to enter the chamber with nearly maximal upward deflection on the transfer arm to retrieve the substrate holder. if you would like training/help, just ask me. From paik at snf.stanford.edu Mon Jun 4 13:51:24 2012 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Mon, 4 Jun 2012 13:51:24 -0700 Subject: Shutdown fiji1 SNF 2012-06-04 13:51:24: Transfer system malfunction Message-ID: During sample loading transfer system didn't disengate properly. Tried to get the tray out again and failed. The tray seems to be stuck between the dep. chamber and the load lock. From jprovine at snf.stanford.edu Mon Jun 4 18:33:10 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 4 Jun 2012 18:33:10 -0700 Subject: Shutdown fiji1 SNF 2012-06-04 13:51:24: Transfer system malfunction Message-ID: wafer cleared. everything ok with transfer arm. reminder you need to come in high to grab the transfer tray. From jprovine at snf.stanford.edu Mon Jun 4 18:33:41 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 4 Jun 2012 18:33:41 -0700 Subject: Problem fiji1 SNF 2012-06-01 00:52:20: Ti precursor Message-ID: ran TiO2 qual and everything was fine: 53.75A for 100cycles at 250C. From wslee at snf.stanford.edu Fri Jun 8 17:45:13 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 8 Jun 2012 17:45:13 -0700 Subject: Comment fiji1 SNF 2012-06-08 17:45:12: Ti precursor requested for Monday/Tuesday Night Message-ID: Please leave the Ti precursor on fiji1 for Monday and Tuesday night. Thanks. From jprovine at snf.stanford.edu Sat Jun 9 01:46:36 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 9 Jun 2012 01:46:36 -0700 Subject: Comment fiji1 SNF 2012-06-08 17:45:12: Ti precursor requested for Monday/Tuesday Night Message-ID: granted From jprovine at snf.stanford.edu Sat Jun 9 01:46:45 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 9 Jun 2012 01:46:45 -0700 Subject: Comment fiji1 SNF 2012-05-26 15:03:25: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Sat Jun 9 01:47:04 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 9 Jun 2012 01:47:04 -0700 Subject: Comment fiji1 SNF 2012-06-09 01:47:04: precursor status Message-ID: water Pt 3dmas (SiO2) From jprovine at snf.stanford.edu Sun Jun 10 07:37:05 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 10 Jun 2012 07:37:05 -0700 Subject: Comment fiji1 SNF 2012-06-09 01:47:04: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Sun Jun 10 07:37:25 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 10 Jun 2012 07:37:25 -0700 Subject: Comment fiji1 SNF 2012-06-10 07:37:24: precursor status Message-ID: water tdma-ti me(3mecp)Pt From jprovine at snf.stanford.edu Thu Jun 14 09:47:38 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 14 Jun 2012 09:47:38 -0700 Subject: Comment fiji1 SNF 2012-06-10 07:37:24: precursor status Message-ID: old From jprovine at snf.stanford.edu Thu Jun 14 09:47:53 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 14 Jun 2012 09:47:53 -0700 Subject: Comment fiji1 SNF 2012-06-14 09:47:52: precursor status Message-ID: water tdma-ti Ru From jprovine at snf.stanford.edu Fri Jun 15 17:45:21 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Jun 2012 17:45:21 -0700 Subject: Comment fiji1 SNF 2012-06-14 09:47:52: precursor status Message-ID: out From jprovine at snf.stanford.edu Fri Jun 15 17:48:28 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Jun 2012 17:48:28 -0700 Subject: Comment fiji1 SNF 2012-06-15 17:48:27: precursor status Message-ID: water tdma-ti Pt From jprovine at snf.stanford.edu Mon Jun 18 09:45:36 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 18 Jun 2012 09:45:36 -0700 Subject: Comment fiji1 SNF 2012-06-15 17:48:27: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Mon Jun 18 09:45:48 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 18 Jun 2012 09:45:48 -0700 Subject: Comment fiji1 SNF 2012-06-18 09:45:48: precursor status Message-ID: water tdma-ti Ru From jprovine at snf.stanford.edu Tue Jun 19 10:01:27 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 19 Jun 2012 10:01:27 -0700 Subject: Comment fiji1 SNF 2012-06-18 09:45:48: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Tue Jun 19 10:01:44 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 19 Jun 2012 10:01:44 -0700 Subject: Comment fiji1 SNF 2012-06-19 10:01:44: precursor status Message-ID: water Ru TDMA-Zr From jprovine at snf.stanford.edu Tue Jun 19 10:54:16 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 19 Jun 2012 10:54:16 -0700 Subject: Problem fiji1 SNF 2012-06-19 10:54:16: no plasma Message-ID: plasma source is not starting. no forward power recorded From jprovine at snf.stanford.edu Tue Jun 19 17:04:13 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 19 Jun 2012 17:04:13 -0700 Subject: Comment fiji1 SNF 2012-06-19 10:01:44: precursor status Message-ID: logged From jprovine at snf.stanford.edu Tue Jun 19 17:04:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 19 Jun 2012 17:04:39 -0700 Subject: Comment fiji1 SNF 2012-06-19 17:04:38: precursor status Message-ID: water TDMA-Ti Pt From maxms at snf.stanford.edu Wed Jun 20 12:22:20 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 20 Jun 2012 12:22:20 -0700 Subject: Problem fiji1 SNF 2012-06-20 12:22:19: precursor error Message-ID: I think there might be a precursor error on the machine... the status on coral only has 3 loaded, there are 4 on the machine. also, i think they might not be in the right slots to match the standard recipe... could be wrong, but rarely am. From jprovine at snf.stanford.edu Wed Jun 20 17:40:01 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 20 Jun 2012 17:40:01 -0700 Subject: Problem fiji1 SNF 2012-06-20 12:22:19: precursor error Message-ID: max was half right. close enough. precursor errors are fixed and precursor status is correct as listed in coral. From jprovine at snf.stanford.edu Thu Jun 21 00:25:47 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 00:25:47 -0700 Subject: Comment fiji1 SNF 2012-06-19 17:04:38: precursor status Message-ID: logged From jprovine at snf.stanford.edu Thu Jun 21 00:26:02 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 00:26:02 -0700 Subject: Comment fiji1 SNF 2012-06-21 00:26:02: precursor status Message-ID: water Ru From jprovine at snf.stanford.edu Thu Jun 21 11:30:05 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 11:30:05 -0700 Subject: Comment fiji1 SNF 2012-06-21 11:30:04: plasma issue update Message-ID: we have tracked the issue to the serial port connection to the RF power supply (it appears). however, the exact issue and solution is still not apparent. michelle and j are in contact with CNT to find the solution. From jprovine at snf.stanford.edu Thu Jun 21 17:00:10 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 17:00:10 -0700 Subject: Comment fiji1 SNF 2012-06-21 00:26:02: precursor status Message-ID: logged From jprovine at snf.stanford.edu Thu Jun 21 17:00:22 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 17:00:22 -0700 Subject: Comment fiji1 SNF 2012-06-21 17:00:22: precursor status Message-ID: water Pt Ru From jprovine at snf.stanford.edu Thu Jun 21 17:21:41 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 17:21:41 -0700 Subject: Problem fiji1 SNF 2012-06-19 10:54:16: no plasma Message-ID: plasma is fixed. issue was caused by software update that J installed to allow exposure mode deposition not being fully compatible between fiji1 and fiji2. the fix has been provided so no both exposure mode and plasma on both fiji1 and fiji2. From jprovine at snf.stanford.edu Thu Jun 21 17:21:53 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 17:21:53 -0700 Subject: Comment fiji1 SNF 2012-06-21 11:30:04: plasma issue update Message-ID: plasma restored From jprovine at snf.stanford.edu Thu Jun 21 19:29:10 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 19:29:10 -0700 Subject: Comment fiji1 SNF 2012-06-21 17:00:22: precursor status Message-ID: logged From jprovine at snf.stanford.edu Thu Jun 21 19:29:25 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 19:29:25 -0700 Subject: Comment fiji1 SNF 2012-06-21 19:29:25: precursor status Message-ID: water tdma-ti Pt From ross at snf.stanford.edu Mon Jun 25 17:00:25 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Mon, 25 Jun 2012 17:00:25 -0700 Subject: Problem fiji1 SNF 2012-06-25 17:00:25: Ti precursor out Message-ID: Very little deposition on last run From jprovine at stanford.edu Mon Jun 25 17:39:58 2012 From: jprovine at stanford.edu (J Provine) Date: Mon, 25 Jun 2012 17:39:58 -0700 Subject: Problem fiji1 SNF 2012-06-25 17:00:25: Ti precursor out In-Reply-To: <20120626000026.6D3512E983@smtp-unencrypted.stanford.edu> References: <20120626000026.6D3512E983@smtp-unencrypted.stanford.edu> Message-ID: could you be more precise? replacement precursor is in the gas bunker and can be installed tomorrow. j On Mon, Jun 25, 2012 at 5:00 PM, wrote: > Very little deposition on last run > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Mon Jun 25 17:57:54 2012 From: jprovine at stanford.edu (J Provine) Date: Mon, 25 Jun 2012 17:57:54 -0700 Subject: Problem fiji1 SNF 2012-06-25 17:00:25: Ti precursor out In-Reply-To: <20120626000026.6D3512E983@smtp-unencrypted.stanford.edu> References: <20120626000026.6D3512E983@smtp-unencrypted.stanford.edu> Message-ID: more details from emily: "15-16 angstroms measured across two wafers for 100 cycles of plasma titania instead of ~50 angstroms. Saw the plasma turn on, so the precursor is likely to be the problem." agreed, precursor is the likely culprit. once the gas bunker is available again tomorrow morning a new precursor will be installed. j On Mon, Jun 25, 2012 at 5:00 PM, wrote: > Very little deposition on last run > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From wslee at snf.stanford.edu Tue Jun 26 06:53:38 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 26 Jun 2012 06:53:38 -0700 Subject: Comment fiji1 SNF 2012-06-26 06:53:37: Ti precursor requested for Wed AM Message-ID: I have a reservation from midnight to 11am Wednesday. Thanks. From jprovine at snf.stanford.edu Tue Jun 26 12:09:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jun 2012 12:09:39 -0700 Subject: Problem fiji1 SNF 2012-06-25 17:00:25: Ti precursor out Message-ID: clear pulses seen. a deposition test needs to be done in case something else is the issue. scheduled for this aftternoon. From mmrincon at snf.stanford.edu Wed Jun 27 14:13:33 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 27 Jun 2012 14:13:33 -0700 Subject: Comment fiji1 SNF 2012-06-21 19:29:25: precursor status Message-ID: From mmrincon at snf.stanford.edu Wed Jun 27 14:13:59 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 27 Jun 2012 14:13:59 -0700 Subject: Comment fiji1 SNF 2012-06-26 06:53:37: Ti precursor requested for Wed AM Message-ID: its on there! From mmrincon at snf.stanford.edu Wed Jun 27 14:14:35 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 27 Jun 2012 14:14:35 -0700 Subject: Comment fiji1 SNF 2012-06-27 14:14:34: precursor status Message-ID: h2o tdma-ti tdma-zr From mmrincon at snf.stanford.edu Fri Jun 29 16:11:10 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 29 Jun 2012 16:11:10 -0700 Subject: Comment fiji1 SNF 2012-06-27 14:14:34: precursor status Message-ID: logged From mmrincon at snf.stanford.edu Fri Jun 29 16:11:40 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 29 Jun 2012 16:11:40 -0700 Subject: Comment fiji1 SNF 2012-06-29 16:11:40: precursor status Message-ID: h2o tdma-ti ru