Problem fiji1 SNF 2012-06-25 17:00:25: Ti precursor out

J Provine jprovine at stanford.edu
Mon Jun 25 17:57:54 PDT 2012


more details from emily:
"15-16 angstroms measured across two wafers for 100 cycles of plasma
titania instead of ~50 angstroms. Saw the plasma turn on, so the precursor
is likely to be the problem."

agreed, precursor is the likely culprit.  once the gas bunker is available
again tomorrow morning a new precursor will be installed.
j

On Mon, Jun 25, 2012 at 5:00 PM, <ross at snf.stanford.edu> wrote:

> Very little deposition on last run
>
>
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