From jprovine at snf.stanford.edu Thu Mar 1 09:36:05 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 1 Mar 2012 09:36:05 -0800 Subject: Comment fiji1 SNF 2012-03-01 09:36:05: fiji1 return status update Message-ID: all parts are returned...currently troubleshooting system. pumps ok. power issues SOLVED heater check PASSED to be done: base pressure check ald line check baseline process qual check From jprovine at snf.stanford.edu Thu Mar 1 16:17:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 1 Mar 2012 16:17:57 -0800 Subject: Comment fiji1 SNF 2012-03-01 16:17:57: fiji1 return to status Message-ID: all parts are returned...currently troubleshooting system. pumps ok. power issues SOLVED heater check PASSED base pressure check PASSED to be done: ald line check baseline process qual check From jprovine at snf.stanford.edu Sat Mar 3 14:10:24 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 3 Mar 2012 14:10:24 -0800 Subject: Problem fiji1 SNF 2012-03-03 14:10:24: coral interlock not switching Message-ID: coral interlock is will not change from disabled to enabled. (or it is permanently disabled regardless of what you set in coral.) please fix or replace fiji1 coral interlock. fiji2 coral is fine. From jhaydon at snf.stanford.edu Tue Mar 6 12:02:00 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:02:00 -0800 Subject: Problem fiji1 SNF 2012-03-03 14:10:24: coral interlock not switching Message-ID: coral working From jhaydon at snf.stanford.edu Tue Mar 6 12:02:32 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:02:32 -0800 Subject: Shutdown fiji1 SNF 2011-12-12 17:35:20: shutdown for holiday rennovation Message-ID: renovation finnished From jhaydon at snf.stanford.edu Tue Mar 6 12:09:39 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:09:39 -0800 Subject: Problem fiji1 SNF 2011-12-12 15:31:16: no NH3 Message-ID: NH3 back on line From jprovine at snf.stanford.edu Tue Mar 6 12:13:48 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:13:48 -0800 Subject: Problem fiji1 SNF 2011-12-05 20:11:30: piece lost Message-ID: piece lost into pump From jprovine at snf.stanford.edu Tue Mar 6 12:14:28 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:14:28 -0800 Subject: Problem fiji1 SNF 2012-03-06 12:14:27: qual for return to service underway Message-ID: thermal hafnia plasma hafnia From jprovine at snf.stanford.edu Tue Mar 6 20:06:22 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:06:22 -0800 Subject: Comment fiji1 SNF 2011-12-09 11:51:40: precursor status Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:06:29 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:06:29 -0800 Subject: Comment fiji1 SNF 2012-02-29 17:02:08: coming back from shutdown Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:06:35 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:06:35 -0800 Subject: Comment fiji1 SNF 2012-03-01 09:36:05: fiji1 return status update Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:06:42 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:06:42 -0800 Subject: Comment fiji1 SNF 2012-03-01 16:17:57: fiji1 return to status Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:07:06 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:07:06 -0800 Subject: Comment fiji1 SNF 2012-03-06 20:07:06: precursor status Message-ID: water tma tdma-hf From jprovine at snf.stanford.edu Tue Mar 6 20:59:46 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:59:46 -0800 Subject: Problem fiji1 SNF 2012-03-06 12:14:27: qual for return to service underway Message-ID: finished. thermal and plasma hafnia show less than 5A variation over 2 100mm wafers, but the dep rate is suprisingly fast 1.3A/cycle. machine is free to use, but be aware hafnia deposition is faster than reported in 2011. From jprovine at snf.stanford.edu Tue Mar 6 21:00:24 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 21:00:24 -0800 Subject: Problem fiji1 SNF 2012-03-06 21:00:23: hafnia qualification Message-ID: thermal and plasma hafnia show less than 5A variation over 2 100mm wafers, but the dep rate is suprisingly fast 1.3A/cycle. machine is free to use, but be aware hafnia deposition is faster than reported in 2011. i'll continue to check qual over the next few days to see what is happening. From jprovine at snf.stanford.edu Wed Mar 7 17:26:16 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 7 Mar 2012 17:26:16 -0800 Subject: Problem fiji1 SNF 2012-03-06 21:00:23: hafnia qualification Message-ID: qual in spec after retest From jprovine at snf.stanford.edu Mon Mar 12 15:28:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 12 Mar 2012 15:28:57 -0700 Subject: Comment fiji1 SNF 2012-03-06 20:07:06: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Mon Mar 12 15:29:16 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 12 Mar 2012 15:29:16 -0700 Subject: Comment fiji1 SNF 2012-03-12 15:29:16: precursor status Message-ID: water tdma-Hf tdma-Ti From jprovine at snf.stanford.edu Wed Mar 14 10:31:28 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Mar 2012 10:31:28 -0700 Subject: Comment fiji1 SNF 2012-03-14 10:31:28: precursor status Message-ID: water tdma-Ti (tdma-Hf temporarily moved to savannah will return later today) From jprovine at snf.stanford.edu Wed Mar 14 10:31:38 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Mar 2012 10:31:38 -0700 Subject: Comment fiji1 SNF 2012-03-12 15:29:16: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Wed Mar 14 15:07:55 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Mar 2012 15:07:55 -0700 Subject: Comment fiji1 SNF 2012-03-14 10:31:28: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Wed Mar 14 15:08:10 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Mar 2012 15:08:10 -0700 Subject: Comment fiji1 SNF 2012-03-14 15:08:09: precursor status Message-ID: water tdma-Ti tdma-Hf From apal at snf.stanford.edu Wed Mar 14 22:05:21 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Wed, 14 Mar 2012 22:05:21 -0700 Subject: Problem fiji1 SNF 2012-03-14 22:05:20: Transfer Arm and gate valve Message-ID: I was not able to push the transfer arm into the chamber. The gate valve seems to remain always closed. From jprovine at snf.stanford.edu Thu Mar 15 11:42:59 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 15 Mar 2012 11:42:59 -0700 Subject: Problem fiji1 SNF 2012-03-14 22:05:20: Transfer Arm and gate valve Message-ID: no problem found. worked the first time i tried. From maxms at snf.stanford.edu Sun Mar 25 19:25:55 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 25 Mar 2012 19:25:55 -0700 Subject: Problem fiji1 SNF 2012-03-25 19:25:55: door pump Message-ID: i can't load the tray into the main chamber, it keeps hitting the gate valve. also, when try to run standby recipe, it gives me an error about some wierd door pump or something silly. i think it should go to the doctors, but i don't think it has health insurance. maybe we can take it to canada and get it seen to there, and smuggle it back in? From wslee at snf.stanford.edu Mon Mar 26 08:30:59 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 26 Mar 2012 08:30:59 -0700 Subject: Comment fiji1 SNF 2012-03-26 08:30:59: wafer carrier reloaded Message-ID: Wafer carrier was not fully on the pins. I repositioned the carrier onto the pins, and then it loaded normally. In this age of skyrocketing healthcare costs, the time has come to fix our own tools rather than smuggle them across international borders to social healthcare havens. From jprovine at snf.stanford.edu Mon Mar 26 11:34:21 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 26 Mar 2012 11:34:21 -0700 Subject: Shutdown fiji1 SNF 2012-03-26 11:34:19: ebox for fiji1 Message-ID: system is not powering up. will troubleshoot with cambridge nanotech. From jprovine at snf.stanford.edu Mon Mar 26 14:49:59 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 26 Mar 2012 14:49:59 -0700 Subject: Comment fiji1 SNF 2012-03-26 14:49:58: ebox shutdown update Message-ID: power is getting to the ebox, but the ebox is not powering up. cambridge nanotech service is in the area and will be by wednesday to fix the issue. From jprovine at snf.stanford.edu Mon Mar 26 14:50:15 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 26 Mar 2012 14:50:15 -0700 Subject: Problem fiji1 SNF 2012-03-25 19:25:55: door pump Message-ID: fixed by user wslee From jprovine at snf.stanford.edu Mon Mar 26 14:50:27 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 26 Mar 2012 14:50:27 -0700 Subject: Comment fiji1 SNF 2012-03-26 08:30:59: wafer carrier reloaded Message-ID: logged From jprovine at snf.stanford.edu Wed Mar 28 15:02:10 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 28 Mar 2012 15:02:10 -0700 Subject: Shutdown fiji1 SNF 2012-03-26 11:34:19: ebox for fiji1 Message-ID: new ebox installed. system running fine. good base pressure, heaters ok. plasma and gas flow ok. qual run ongoing for system return to green. From jprovine at snf.stanford.edu Wed Mar 28 15:02:18 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 28 Mar 2012 15:02:18 -0700 Subject: Comment fiji1 SNF 2012-03-26 14:49:58: ebox shutdown update Message-ID: logged From jprovine at snf.stanford.edu Wed Mar 28 15:02:37 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 28 Mar 2012 15:02:37 -0700 Subject: Problem fiji1 SNF 2012-03-28 15:02:36: needs qual post ebox replacement Message-ID: qual to be run wednesday afternoon From jprovine at snf.stanford.edu Wed Mar 28 21:47:05 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 28 Mar 2012 21:47:05 -0700 Subject: Problem fiji1 SNF 2012-03-28 15:02:36: needs qual post ebox replacement Message-ID: qual passed fine. 100cycles of plasma titania gave 53A of tio2. From wslee at snf.stanford.edu Thu Mar 29 00:23:51 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 29 Mar 2012 00:23:51 -0700 Subject: Problem fiji1 SNF 2012-03-29 00:23:51: wafers left inside Message-ID: I was in the middle of loading of transferring my wafers from the load lock to the chamber when the toxic gas alarm went off. I plan to go ahead and run the wafers tomorrow morning (3/29). From wslee at snf.stanford.edu Thu Mar 29 08:45:51 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 29 Mar 2012 08:45:51 -0700 Subject: Comment fiji1 SNF 2012-03-29 08:45:50: wafers loaded Message-ID: Wafers loaded and will finish around 3:30PM. The problem above can be cleared. From jprovine at snf.stanford.edu Thu Mar 29 09:03:37 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 29 Mar 2012 09:03:37 -0700 Subject: Problem fiji1 SNF 2012-03-29 00:23:51: wafers left inside Message-ID: problem fixed by user following toxic alarm From jprovine at snf.stanford.edu Thu Mar 29 09:03:50 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 29 Mar 2012 09:03:50 -0700 Subject: Comment fiji1 SNF 2012-03-29 08:45:50: wafers loaded Message-ID: problem fixed by user following toxic alarm