Shutdown fiji1 SNF 2012-05-27 16:59:08: Substrate holder stucked!

luckys at luckys at
Sun May 27 16:59:09 PDT 2012

The substrate holder dropped half way towards the load lock. It is right on load lock and there is no way to shift it up. DO NOT CLOSE THE GATE VALVE or press any buttons in the system.
I hope J can fix this soon. 

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