[fiji1-pcs] Problem fiji1 SNF 2013-01-25 19:26:53: Chuck is slanted

jasonlin at stanford.edu jasonlin at stanford.edu
Fri Jan 25 19:26:54 PST 2013


When I unloaded, chuck was slanted so I cannot put the chuck back into the chamber.  I tried wiggling the arm to get it to mate properly but it's still slanted downwards.  Hopefully someone can fix it.  The system is pumped down but the chuck is still in the load lock chamber.


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