From jprovine at snf.stanford.edu Thu Dec 1 17:33:39 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 1 Dec 2011 17:33:39 -0800 Subject: Comment fiji2 SNF 2011-12-01 17:33:38: monday (12.5.2011) precursor change Message-ID: early am monday december 5th i will install: tma & tdma-Hf. From yiwu at snf.stanford.edu Thu Dec 1 21:09:12 2011 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Thu, 1 Dec 2011 21:09:12 -0800 Subject: Comment fiji2 SNF 2011-12-01 21:09:11: Si precursor running out Message-ID: Si precursor running out From jprovine at snf.stanford.edu Fri Dec 2 19:42:48 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 2 Dec 2011 19:42:48 -0800 Subject: Comment fiji2 SNF 2011-12-01 21:09:11: Si precursor running out Message-ID: refilled From jprovine at snf.stanford.edu Fri Dec 2 19:43:12 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 2 Dec 2011 19:43:12 -0800 Subject: Comment fiji2 SNF 2011-12-02 19:43:11: Pt and SiO2 precursors refilled. Message-ID: From jprovine at snf.stanford.edu Mon Dec 5 06:26:04 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 5 Dec 2011 06:26:04 -0800 Subject: Comment fiji2 SNF 2011-12-05 06:26:03: precursor status Message-ID: water tma tdma-hf changing to water, tma, and Pt tuesday am From jprovine at snf.stanford.edu Mon Dec 5 06:26:36 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 5 Dec 2011 06:26:36 -0800 Subject: Comment fiji2 SNF 2011-12-02 19:43:11: Pt and SiO2 precursors refilled. Message-ID: logged From jprovine at snf.stanford.edu Mon Dec 5 06:26:49 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 5 Dec 2011 06:26:49 -0800 Subject: Comment fiji2 SNF 2011-12-01 17:33:38: monday (12.5.2011) precursor change Message-ID: done From jprovine at snf.stanford.edu Mon Dec 5 06:26:55 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 5 Dec 2011 06:26:55 -0800 Subject: Comment fiji2 SNF 2011-11-30 09:50:24: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Mon Dec 5 06:27:11 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 5 Dec 2011 06:27:11 -0800 Subject: Comment fiji2 SNF 2011-11-29 00:18:19: precursor changes planned Message-ID: outdated From jprovine at snf.stanford.edu Mon Dec 5 06:27:25 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 5 Dec 2011 06:27:25 -0800 Subject: Problem fiji2 SNF 2011-11-25 11:38:07: transfer plate flaking Message-ID: vacuumed. From yiwu at snf.stanford.edu Tue Dec 6 08:58:57 2011 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Tue, 6 Dec 2011 08:58:57 -0800 Subject: Comment fiji2 SNF 2011-12-06 08:58:56: tdma-Hf ran out Message-ID: I ran low temperature deposition this morning and didn't see obvious tdma-Hf pulses. Temperature gradient is positive. Mostly likely the tdma-Hf precursor ran out. From jprovine at snf.stanford.edu Tue Dec 6 10:16:59 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Dec 2011 10:16:59 -0800 Subject: Comment fiji2 SNF 2011-12-06 10:16:59: precursor status Message-ID: water tma Pt next change is thurs afternoon to take off Pt and install Hafnia From jprovine at snf.stanford.edu Tue Dec 6 10:18:02 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Dec 2011 10:18:02 -0800 Subject: Comment fiji2 SNF 2011-12-05 06:26:03: precursor status Message-ID: From jprovine at snf.stanford.edu Fri Dec 9 11:49:55 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 9 Dec 2011 11:49:55 -0800 Subject: Comment fiji2 SNF 2011-12-06 08:58:56: tdma-Hf ran out Message-ID: refilled From jprovine at snf.stanford.edu Fri Dec 9 11:50:12 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 9 Dec 2011 11:50:12 -0800 Subject: Comment fiji2 SNF 2011-12-06 10:16:59: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Fri Dec 9 11:50:59 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 9 Dec 2011 11:50:59 -0800 Subject: Comment fiji2 SNF 2011-12-09 11:50:58: precursor status Message-ID: water tdma-Hf (hafnia, HfN) tma (alumina, AlN) currently no requests for change prior to shutdown From jhaydon at snf.stanford.edu Mon Dec 12 15:31:43 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 12 Dec 2011 15:31:43 -0800 Subject: Problem fiji2 SNF 2011-12-12 15:31:42: no NH3 Message-ID: From jprovine at snf.stanford.edu Mon Dec 12 17:35:09 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 12 Dec 2011 17:35:09 -0800 Subject: Shutdown fiji2 SNF 2011-12-12 17:35:08: shutdown for holiday rennovation Message-ID: