Comment fiji2 SNF 2011-12-06 08:58:56: tdma-Hf ran out

yiwu at snf.stanford.edu yiwu at snf.stanford.edu
Tue Dec 6 08:58:57 PST 2011


I ran low temperature deposition this morning and didn't see obvious tdma-Hf pulses. Temperature gradient is positive. Mostly likely the tdma-Hf precursor ran out. 




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