From jprovine at snf.stanford.edu Tue Nov 1 05:59:48 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 1 Nov 2011 05:59:48 -0700 Subject: Problem fiji2 SNF 2011-10-21 14:31:08: uncertain precursor depletion issue Message-ID: cause is know to be a seal issue with the female VCR coupling on line 3. From jprovine at snf.stanford.edu Tue Nov 1 06:02:50 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 1 Nov 2011 06:02:50 -0700 Subject: Problem fiji2 SNF 2011-11-01 06:02:50: line 3 offline until VCR coupling can be replaced Message-ID: the issue with line 3 on fiji2 has been diagnosed as an issue with the VCR coupling for that line. in order to fix this issue, the part should be replaced. once the replacement part arrives, we will consider the best time to do the repair because it necessitates taking the system offline for roughly a day to disassemble the manifold (after it cools down), install the new part, reassemble the manifold, bake everything out, and install precursors. From jprovine at snf.stanford.edu Wed Nov 2 11:32:31 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 2 Nov 2011 11:32:31 -0700 Subject: Comment fiji2 SNF 2011-11-02 11:32:30: precursor status Message-ID: Water, TMA (Al), and TDMA-Hf friday morning: Water, TMA, and TDMA-Ti From khu834 at snf.stanford.edu Thu Nov 3 13:31:23 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Thu, 3 Nov 2011 13:31:23 -0700 Subject: Comment fiji2 SNF 2011-11-03 13:31:22: USB cable too short Message-ID: one of the USB cable is too short and can be accidently disconnected if the laptop is moved slightly From jprovine at snf.stanford.edu Fri Nov 4 08:52:40 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 4 Nov 2011 08:52:40 -0700 Subject: Problem fiji2 SNF 2011-11-04 08:52:40: No H2 flow to Fiji1 or Fiji2 Message-ID: From jprovine at snf.stanford.edu Fri Nov 4 08:53:37 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 4 Nov 2011 08:53:37 -0700 Subject: Comment fiji2 SNF 2011-11-03 13:31:22: USB cable too short Message-ID: not too short, just don't disconnect it. i taped it up which will hopefully prevent further issues. From jprovine at snf.stanford.edu Fri Nov 4 08:53:45 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 4 Nov 2011 08:53:45 -0700 Subject: Comment fiji2 SNF 2011-10-29 08:59:43: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Fri Nov 4 08:53:52 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 4 Nov 2011 08:53:52 -0700 Subject: Comment fiji2 SNF 2011-11-02 11:32:30: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Fri Nov 4 08:54:06 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 4 Nov 2011 08:54:06 -0700 Subject: Comment fiji2 SNF 2011-11-04 08:54:06: precursor status Message-ID: water tma tdma-Ti From tberg at snf.stanford.edu Fri Nov 4 09:18:51 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Nov 2011 09:18:51 -0700 Subject: Problem fiji2 SNF 2011-11-04 08:52:40: No H2 flow to Fiji1 or Fiji2 Message-ID: Found supply valve for H2 turned off. Turned it back on From jprovine at snf.stanford.edu Mon Nov 7 18:14:23 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 7 Nov 2011 18:14:23 -0800 Subject: Comment fiji2 SNF 2011-11-04 08:54:06: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Mon Nov 7 18:14:41 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 7 Nov 2011 18:14:41 -0800 Subject: Comment fiji2 SNF 2011-11-07 18:14:41: precursor status Message-ID: water TMA TDMA-Hf From jprovine at snf.stanford.edu Tue Nov 8 18:46:31 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 8 Nov 2011 18:46:31 -0800 Subject: Comment fiji2 SNF 2011-11-08 18:46:31: precursor status Message-ID: water tdma-hf (for HfO2 and HfN) 3dmas (for SiO2) From jprovine at snf.stanford.edu Tue Nov 8 18:47:32 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 8 Nov 2011 18:47:32 -0800 Subject: Comment fiji2 SNF 2011-11-07 18:14:41: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Sun Nov 13 13:32:54 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 13 Nov 2011 13:32:54 -0800 Subject: Comment fiji2 SNF 2011-11-13 13:32:53: precursor plans 11-13 through 11-17 Message-ID: now: 3dmas (SiO2) and Pt 11/14am: tma (al2o3) & tdma-hf (hfo2) 11/16am: tma (al2o3) & tdma-ti (tio2) From jprovine at snf.stanford.edu Mon Nov 14 10:03:12 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 14 Nov 2011 10:03:12 -0800 Subject: Comment fiji2 SNF 2011-11-14 10:03:12: tma and tdma-hf installed Message-ID: From jprovine at snf.stanford.edu Tue Nov 15 17:26:14 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 15 Nov 2011 17:26:14 -0800 Subject: Comment fiji2 SNF 2011-11-13 13:32:53: precursor plans 11-13 through 11-17 Message-ID: updated From jprovine at snf.stanford.edu Tue Nov 15 17:26:22 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 15 Nov 2011 17:26:22 -0800 Subject: Comment fiji2 SNF 2011-11-08 18:46:31: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Tue Nov 15 17:27:55 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 15 Nov 2011 17:27:55 -0800 Subject: Comment fiji2 SNF 2011-11-15 17:27:54: tdma-Ti needs to be refilled...change in precursor plans Message-ID: i need to refill the TDMA-Ti precursor. now until friday precursors are: water, TDMA-Hf, and TMA. friday switch to: 3dmas, tdma-Hf, and water From jprovine at snf.stanford.edu Fri Nov 18 23:55:35 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 18 Nov 2011 23:55:35 -0800 Subject: Comment fiji2 SNF 2011-11-18 23:55:34: precursor status Message-ID: 3dmas (SiO2) water TDMA-Ti (TiO2, TiN) From jprovine at snf.stanford.edu Fri Nov 18 23:57:10 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 18 Nov 2011 23:57:10 -0800 Subject: Comment fiji2 SNF 2011-11-15 17:27:54: tdma-Ti needs to be refilled...change in precursor plans Message-ID: refilled and installed friday 11-18-2011 From jprovine at snf.stanford.edu Fri Nov 18 23:57:17 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 18 Nov 2011 23:57:17 -0800 Subject: Comment fiji2 SNF 2011-11-14 10:03:12: tma and tdma-hf installed Message-ID: logged From cchen86 at snf.stanford.edu Sat Nov 19 22:40:52 2011 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Sat, 19 Nov 2011 22:40:52 -0800 Subject: Problem fiji2 SNF 2011-11-19 22:40:52: Sample fall into the chamber Message-ID: My chip piece flew off the plate inside the chamber. The piece is larger than 1cm-by-1cm. From jprovine at snf.stanford.edu Sun Nov 20 07:23:38 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 20 Nov 2011 07:23:38 -0800 Subject: Problem fiji2 SNF 2011-11-19 22:40:52: Sample fall into the chamber Message-ID: sample in trap. could not recover. From jprovine at snf.stanford.edu Sun Nov 20 07:23:45 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 20 Nov 2011 07:23:45 -0800 Subject: Comment fiji2 SNF 2011-11-18 23:55:34: precursor status Message-ID: updated. From jprovine at snf.stanford.edu Sun Nov 20 07:24:13 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 20 Nov 2011 07:24:13 -0800 Subject: Comment fiji2 SNF 2011-11-20 07:24:12: precursor status Message-ID: water tma (alumina, AlN) TDMA-Hf (Hafnia, HfN) From maxms at snf.stanford.edu Fri Nov 25 11:38:07 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:38:07 -0800 Subject: Problem fiji2 SNF 2011-11-25 11:38:07: transfer plate flaking Message-ID: Near the reflector, on the rim of the plate, it looks like the ALD films are starting to flake From jprovine at snf.stanford.edu Tue Nov 29 00:18:19 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 29 Nov 2011 00:18:19 -0800 Subject: Comment fiji2 SNF 2011-11-29 00:18:19: precursor changes planned Message-ID: 3dmas will be installed wednesday 11.30 8am and removed sunday 12.4 at 10pm for this install alumina will be removed. From jprovine at snf.stanford.edu Wed Nov 30 09:50:25 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 30 Nov 2011 09:50:25 -0800 Subject: Comment fiji2 SNF 2011-11-30 09:50:24: precursor status Message-ID: water sio2 pt From jprovine at snf.stanford.edu Wed Nov 30 09:50:39 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 30 Nov 2011 09:50:39 -0800 Subject: Comment fiji2 SNF 2011-11-20 07:24:12: precursor status Message-ID: logged