From jprovine at snf.stanford.edu Mon Oct 3 18:38:54 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 3 Oct 2011 18:38:54 -0700 Subject: Shutdown fiji_r SNF 2011-10-03 18:38:53: loadlock arm offline Message-ID: issue with loadlock transfer arm. i was able to retrieve wafer and transfer carrier, but the loadlock arm is now misalligned and transfers are problematic at best and unable to be retrieved without venting the system at worst. an emergency distress call to cambridge nanotech will be placed tonight. From jprovine at snf.stanford.edu Tue Oct 4 09:56:14 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 4 Oct 2011 09:56:14 -0700 Subject: Comment fiji_r SNF 2011-10-04 09:56:13: update on loadlock transfer arm Message-ID: diagnosis from cambridge nanotech is arm misalignment. the bearings check out as ok, so currently it looks like a realignment will be sufficient to get back online. the procedure for realignment has been sent and i'll attempt this fix later today. From jprovine at snf.stanford.edu Wed Oct 5 11:26:36 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 5 Oct 2011 11:26:36 -0700 Subject: Comment fiji2 SNF 2011-10-05 11:26:35: update on transfer arm issue Message-ID: Cambridge Nanotech came by this morning to try to help with the transfer arm issue. the substrate carrier was bent and could not be realigned. we are attempting to straighten it, but cambridge nanotech is also looking into a replacement part. the e-box for fiji2 will be updated (see shutdown notice on fiji1), as weill the mechanical interface between the transfer arm and the substrate carrier. the new parts are being shipped from cambridge nanotech. i am unclear on the arrival dates for all these parts, and i will update you as i know. it is unlikely fiji1/2 will be online wednesday or thursday this week. From jprovine at snf.stanford.edu Wed Oct 5 18:58:21 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 5 Oct 2011 18:58:21 -0700 Subject: Shutdown fiji2 SNF 2011-10-03 18:38:53: loadlock arm offline Message-ID: tim from cambridgenanotech was able to full realign the arm and unbend (or re-bend or de-bend) the substrate carrier. the system is up and gave good results for plasma alumina (monthly qual). 106A averaged over 18 spots over 2 100mm wafers with a STD of 2.1A. more variation than i would like, but the machine was vented for a large chunk of the day. the tool is released to users. From jprovine at snf.stanford.edu Wed Oct 5 18:58:29 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 5 Oct 2011 18:58:29 -0700 Subject: Comment fiji2 SNF 2011-10-04 09:56:13: update on loadlock transfer arm Message-ID: fixed From jprovine at snf.stanford.edu Wed Oct 5 18:58:36 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 5 Oct 2011 18:58:36 -0700 Subject: Comment fiji2 SNF 2011-10-05 11:26:35: update on transfer arm issue Message-ID: fixed From hazeghi at snf.stanford.edu Sat Oct 8 02:27:10 2011 From: hazeghi at snf.stanford.edu (hazeghi at snf.stanford.edu) Date: Sat, 8 Oct 2011 02:27:10 -0700 Subject: Comment fiji2 SNF 2011-10-08 02:27:10: LL Venting issue Message-ID: Had problem with venting the LL while for unloading samples. LL pressure would not raise above 3.4Torr. Tried pumping down and venting several times, not successful. Tried command sequence: pump down, transfer samples, transfer samples back, LL Vent, without actually transferring the samples using the arm, this time LL was vented successfully but the gate purge had moved the samples around quite a bit. No samples were lost. From hazeghi at snf.stanford.edu Sat Oct 8 02:30:57 2011 From: hazeghi at snf.stanford.edu (hazeghi at snf.stanford.edu) Date: Sat, 8 Oct 2011 02:30:57 -0700 Subject: Comment fiji2 SNF 2011-10-08 02:30:56: LL Venting issue Message-ID: LL pressure would not raise above 3.4Torr for unloading samples. Tried Pumping down and Venting again three times, not successful. Performed command sequence: Pump down, Transfer samples, Transfer samples back, LLVent, without actually using the transfer arm. LL vented successfully this time but the gate purge had moved the samples around quite a bit. No samples were lost. From jprovine at snf.stanford.edu Wed Oct 12 12:45:03 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 12 Oct 2011 12:45:03 -0700 Subject: Comment fiji2 SNF 2011-10-12 12:45:03: particles on substrate holder Message-ID: after running a very high temperature test (450C) i noticed a lot of particles on the substrate holder. i'll vacuum everything before my reservation tonight once the holder cools down. From jprovine at snf.stanford.edu Wed Oct 12 18:42:00 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 12 Oct 2011 18:42:00 -0700 Subject: Comment fiji2 SNF 2011-10-12 12:45:03: particles on substrate holder Message-ID: vacuumed chamber and removed all particles that i could find. From jprovine at snf.stanford.edu Wed Oct 12 18:42:46 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 12 Oct 2011 18:42:46 -0700 Subject: Comment fiji2 SNF 2011-10-08 02:27:10: LL Venting issue Message-ID: logged. has not shown up for any other user. From jprovine at snf.stanford.edu Wed Oct 12 18:42:58 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 12 Oct 2011 18:42:58 -0700 Subject: Comment fiji2 SNF 2011-10-08 02:30:56: LL Venting issue Message-ID: logged. has not shown up for any other user. From jprovine at snf.stanford.edu Sat Oct 15 16:17:02 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 15 Oct 2011 16:17:02 -0700 Subject: Comment fiji2 SNF 2011-10-15 16:17:01: precursor change Message-ID: TDMA-Hf removed. 3Me(CpMe)Pt installed. all recipes in main recipe menu are updated. From jprovine at snf.stanford.edu Sat Oct 15 16:17:10 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 15 Oct 2011 16:17:10 -0700 Subject: Comment fiji2 SNF 2011-09-29 06:59:26: precursor change Message-ID: logged From jprovine at snf.stanford.edu Tue Oct 18 09:21:45 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 18 Oct 2011 09:21:45 -0700 Subject: Comment fiji2 SNF 2011-10-18 09:21:45: precursor change Message-ID: Ni precursor out...3DMAS for SiO2 installed. From jprovine at snf.stanford.edu Fri Oct 21 08:09:10 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 21 Oct 2011 08:09:10 -0700 Subject: Comment fiji2 SNF 2011-10-21 08:09:09: precursor change Message-ID: Pt out...Zr in. From jprovine at snf.stanford.edu Fri Oct 21 14:29:32 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 21 Oct 2011 14:29:32 -0700 Subject: Comment fiji2 SNF 2011-10-21 14:29:31: precursor change Message-ID: 3DMA-Silanol and TDMA-Zr off and TDMA-Hf on. From jprovine at snf.stanford.edu Fri Oct 21 14:31:09 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 21 Oct 2011 14:31:09 -0700 Subject: Problem fiji2 SNF 2011-10-21 14:31:08: uncertain precursor depletion issue Message-ID: multiple source stationed at precursor 3 have shown up with no pressure pulses significantly short of when expected based on the material known to be present. the cause is currently unknown and under investigation. for now precursor line three is offline. From sgchong at snf.stanford.edu Sat Oct 22 18:17:30 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 22 Oct 2011 18:17:30 -0700 Subject: Problem fiji2 SNF 2011-10-22 18:17:30: TiN precursor not pulsing Message-ID: From jprovine at snf.stanford.edu Sun Oct 23 12:49:42 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Oct 2011 12:49:42 -0700 Subject: Comment fiji2 SNF 2011-10-23 12:49:41: precursor change Message-ID: actually this happened saturday morning... TDMA-Hf off...TDMA-Ti on. From jprovine at snf.stanford.edu Mon Oct 24 07:26:53 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:26:53 -0700 Subject: Problem fiji2 SNF 2011-10-22 18:17:30: TiN precursor not pulsing Message-ID: could not reproduce issue From jprovine at snf.stanford.edu Mon Oct 24 07:27:05 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:27:05 -0700 Subject: Comment fiji2 SNF 2011-10-15 16:17:01: precursor change Message-ID: logged From jprovine at snf.stanford.edu Mon Oct 24 07:27:12 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:27:12 -0700 Subject: Comment fiji2 SNF 2011-10-18 09:21:45: precursor change Message-ID: logged From jprovine at snf.stanford.edu Mon Oct 24 07:27:21 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:27:21 -0700 Subject: Comment fiji2 SNF 2011-10-21 08:09:09: precursor change Message-ID: logged From jprovine at snf.stanford.edu Mon Oct 24 07:27:29 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:27:29 -0700 Subject: Comment fiji2 SNF 2011-10-21 14:29:31: precursor change Message-ID: logged From jprovine at snf.stanford.edu Mon Oct 24 07:27:45 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:27:45 -0700 Subject: Comment fiji2 SNF 2011-10-23 12:49:41: precursor change Message-ID: logged From jprovine at snf.stanford.edu Mon Oct 24 07:28:45 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:28:45 -0700 Subject: Comment fiji2 SNF 2011-10-24 07:28:44: precursor status Message-ID: currently installed on the system: water tma (for alumina) tdma-Hf (for HfO2 and HfN) tuesday Ta precursor to be installed. From clee58 at snf.stanford.edu Mon Oct 24 20:53:33 2011 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Mon, 24 Oct 2011 20:53:33 -0700 Subject: Problem fiji2 SNF 2011-10-24 20:53:32: Can't pull out the wafer chuck Message-ID: When I vented chamber and open the door, I realized that the wafer chuck is loaded inside already. The previous user didn't pull out the chuck. I pumped down again and clicked 'transfer wafer' and tried to pull out the chuck, but I couldn't. I tried a couple of times, but it feel like different as I used before. I just pumped it down again and disabled it. From jprovine at snf.stanford.edu Tue Oct 25 03:02:38 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 25 Oct 2011 03:02:38 -0700 Subject: Problem fiji2 SNF 2011-10-24 20:53:32: Can't pull out the wafer chuck Message-ID: user error. worked the first time i tried. retraining necessary. From jprovine at snf.stanford.edu Tue Oct 25 03:06:44 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 25 Oct 2011 03:06:44 -0700 Subject: Comment fiji2 SNF 2011-10-25 03:06:44: update on replacement parts Message-ID: joe kruger from cambridge nanotech replaced transfer arm components on fiji1 & fiji2 monday. this should make it much more difficult for users to get the substrate holder stuck. also the new RF power supply for fiji1 was installed. new eboxes arriving later this week and joe will install those this week. this should get fiji1 back on line this week. line 3 remains down. it is looking likely it will need to be replaced, which requires the entire tool to go down for a day. no motion on this until the new ald valve and vcr coupling has been ordered and arrived. From jprovine at snf.stanford.edu Tue Oct 25 18:30:56 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 25 Oct 2011 18:30:56 -0700 Subject: Comment fiji2 SNF 2011-10-25 18:30:55: precursor status Message-ID: tma (for alumina) TBTDET (for TaN) changing to TDMA-Hf (hafnia) around noon wednesday From jprovine at snf.stanford.edu Wed Oct 26 11:45:47 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 26 Oct 2011 11:45:47 -0700 Subject: Comment fiji2 SNF 2011-10-26 11:45:47: precursor status Message-ID: water tma (alumina, etc) tdma-Hf (hafnia, etc) From jprovine at snf.stanford.edu Wed Oct 26 11:50:14 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 26 Oct 2011 11:50:14 -0700 Subject: Comment fiji2 SNF 2011-10-24 07:28:44: precursor status Message-ID: logged From jprovine at snf.stanford.edu Wed Oct 26 11:50:23 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 26 Oct 2011 11:50:23 -0700 Subject: Comment fiji2 SNF 2011-10-25 18:30:55: precursor status Message-ID: logged From khu834 at snf.stanford.edu Thu Oct 27 12:36:28 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Thu, 27 Oct 2011 12:36:28 -0700 Subject: Comment fiji2 SNF 2011-10-27 12:36:28: request SiO2 precursor Message-ID: I would like to request the SiO2 precursor to be installed preferrably before the weekend. Thank you. From jprovine at snf.stanford.edu Fri Oct 28 05:53:47 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:53:47 -0700 Subject: Comment fiji2 SNF 2011-10-25 03:06:44: update on replacement parts Message-ID: logged From jprovine at snf.stanford.edu Fri Oct 28 05:53:52 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:53:52 -0700 Subject: Comment fiji2 SNF 2011-10-26 11:45:47: precursor status Message-ID: logged From jprovine at snf.stanford.edu Fri Oct 28 05:55:02 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:55:02 -0700 Subject: Comment fiji2 SNF 2011-10-28 05:55:01: precursor status Message-ID: friday 10.28: water, TMA, TDMA-Ti saturday 10.29 am: TMA out, 3DMAS (SiO2) in & TDMA-Ti out, TDMA-Hf in. From jprovine at snf.stanford.edu Sat Oct 29 08:59:44 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 29 Oct 2011 08:59:44 -0700 Subject: Comment fiji2 SNF 2011-10-29 08:59:43: precursor status Message-ID: water 3dmas (for sio2) tdma-Hf (for HfO2 or Hf3N4) From jprovine at snf.stanford.edu Mon Oct 31 14:07:11 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 31 Oct 2011 14:07:11 -0700 Subject: Comment fiji2 SNF 2011-10-27 12:36:28: request SiO2 precursor Message-ID: request met From jprovine at snf.stanford.edu Mon Oct 31 14:07:26 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 31 Oct 2011 14:07:26 -0700 Subject: Comment fiji2 SNF 2011-10-28 05:55:01: precursor status Message-ID: logged