Shutdown fiji_r SNF 2011-10-03 18:38:53: loadlock arm offline

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Mon Oct 3 18:38:54 PDT 2011


issue with loadlock transfer arm.  i was able to retrieve wafer and transfer carrier, but the loadlock arm is now misalligned and transfers are problematic at best and unable to be retrieved without venting the system at worst.  an emergency distress call to cambridge nanotech will be placed tonight.




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