Shutdown fiji2 SNF 2011-10-03 18:38:53: loadlock arm offline

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Wed Oct 5 18:58:21 PDT 2011


tim from cambridgenanotech was able to full realign the arm and unbend (or re-bend or de-bend) the substrate carrier.  the system is up and gave good results for plasma alumina (monthly qual).  106A averaged over 18 spots over 2 100mm wafers with a STD of 2.1A.  more variation than i would like, but the machine was vented for a large chunk of the day.
the tool is released to users.




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