Problem fiji2 SNF 2011-10-24 20:53:32: Can't pull out the wafer chuck

clee58 at snf.stanford.edu clee58 at snf.stanford.edu
Mon Oct 24 20:53:33 PDT 2011


When I vented  chamber and open the door, I realized that the wafer chuck is loaded inside already. The previous user didn't pull out the chuck. I pumped down again and clicked 'transfer wafer' and tried to pull out the chuck, but I couldn't. I tried a couple of times, but it feel like different as I used before.  I just pumped it down again and disabled it.  




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