Comment fiji2 SNF 2011-10-25 03:06:44: update on replacement parts

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Tue Oct 25 03:06:44 PDT 2011


joe kruger from cambridge nanotech replaced transfer arm components on fiji1 & fiji2 monday.  this should make it much more difficult for users to get the substrate holder stuck.
also the new RF power supply for fiji1 was installed.
new eboxes arriving later this week and joe will install those this week.  this should get fiji1 back on line this week.
line 3 remains down.  it is looking likely it will need to be replaced, which requires the entire tool to go down for a day.  no motion on this until the new ald valve and vcr coupling has been ordered and arrived.




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