Problem fiji_r SNF 2011-09-09 18:06:04: chips loose in reaction chamber

paik at snf.stanford.edu paik at snf.stanford.edu
Fri Sep 9 18:06:05 PDT 2011


Post deposition 4 tem grids (3mmx3mm Si Chips) did not come out of the chamber. Probably blown out of its place in carrier wafer/jig during deposition.




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