Problem fiji2 SNF 2012-04-24 22:54:43: hfo2 out

maxms at snf.stanford.edu maxms at snf.stanford.edu
Tue Apr 24 22:54:43 PDT 2012


I believe hafnium precursor is out.  pulses decrease pressure, and testing on new silicon wafer 100 cycles and only measured native oxide on woolum.  also, no sign on the chuck or backside of the wafer of deposition.




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