From derickson at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-06 10:10:16: 3dmas precursor request Message-ID: <20597980.15.1344273016567.JavaMail.coral@shine> Please install 3dmas precursor for our reservation today 8/8 at 15:00. Thank you very much! From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-06 10:10:16: 3dmas precursor request Message-ID: <19353867.22.1344293373467.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-04 01:52:53: precursor status Message-ID: <11996722.23.1344293379536.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-06 15:49:57: precursor status Message-ID: <30980209.24.1344293397724.JavaMail.coral@shine> water tmt tma 3dmas From kavehm at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-08-06 16:17:40: stage Message-ID: <30393024.31.1344295060526.JavaMail.coral@shine> stage fell off arm during loading. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-08-06 16:17:40: stage Message-ID: <27678259.33.1344297195661.JavaMail.coral@shine> plaste recovered From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-06 20:46:55: Can put the chuck inside the chamber Message-ID: <4404321.35.1344311217009.JavaMail.coral@shine> After loading the sample, the chuck is stuck midway and won't go into the chamber. Left the chuck in the load lock and reporting this probem. Sorry for this problem/ From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-06 20:46:55: Can put the chuck inside the chamber Message-ID: <21196646.40.1344328138549.JavaMail.coral@shine> chuck reinserted and transfer arm end effector height reset. From efriend at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: efriend at snf.stanford.edu (efriend at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-07 10:27:59: Zr precursor request 8/8/2012 Message-ID: <30069340.52.1344360480445.JavaMail.coral@shine> Hi - I'd like to use the Zr precursor during my tool time tomorrow (8/8). Thanks! From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-07-31 13:13:56: Pt precursor request Message-ID: <31972433.56.1344374344270.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-06 15:49:57: precursor status Message-ID: <27010536.57.1344374350329.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-07 14:19:24: precursor status Message-ID: <30130468.58.1344374365458.JavaMail.coral@shine> water tma1 tmt pt 1 From wmtang at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-07 18:22:32: Hf precursor Message-ID: <12471897.60.1344388953015.JavaMail.coral@shine> Dear J, Would you please help me put the Hf precursor in Fiji2 by Fri (Aug 10) 2:30 pm? Thank you very much. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-07 10:27:59: Zr precursor request 8/8/2012 Message-ID: <5856973.70.1344445934052.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-07 14:19:24: precursor status Message-ID: <14538942.71.1344445946170.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-08 10:12:44: precursor status Message-ID: <25010743.72.1344445965368.JavaMail.coral@shine> water tma 1 tmt tdma-zr 1 From efriend at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: efriend at snf.stanford.edu (efriend at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-08 11:24:02: fiji 2 stage dropped Message-ID: <1247677.74.1344450242271.JavaMail.coral@shine> Stage fell during transfer from chamber, is blocking gate valve - need help recovering From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-08 11:24:02: fiji 2 stage dropped Message-ID: <11989206.75.1344455599745.JavaMail.coral@shine> plate recovered and returned to process chamber From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-08 16:36:47: Request for a TiN precursor Message-ID: <20315634.79.1344469008106.JavaMail.coral@shine> Dear Staff, Would it possible to get a TiN precursor sometime tomorrow? I know the Fiji2 is heavily booked, but people are not really showing up and wondering if you can change the precursor so I can camp in front and get no-show slots Thanks, Wooshik Jung (alsune) From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-08 18:34:12: black ring for transfer arm misset Message-ID: <17258620.80.1344476052541.JavaMail.coral@shine> the black ring indicating where the transfer arm should stop needs to be reset (it was bumped and misplaced today). unfortunately i do not have the correct size allen wrench in the lab so i cannot move. just be aware and stop pushing when the plate stops moving. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-08 16:36:47: Request for a TiN precursor Message-ID: <15186667.85.1344527179486.JavaMail.coral@shine> no. make a reservation and request the precursor as normal. if people are missing their reservations...let me know when you collect their reservation and i'll try to change then. From efriend at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: efriend at snf.stanford.edu (efriend at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-09 10:36:48: Zr precursor request Message-ID: <32892599.87.1344533808762.JavaMail.coral@shine> Hi - I'd like to use Zr precursor tomorrow morning (8/10). Thanks - From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-09 10:36:48: Zr precursor request Message-ID: <7462306.108.1344553541750.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-03 14:35:07: peeling on plate Message-ID: <23078906.109.1344553558919.JavaMail.coral@shine> plate cleaned with cleanwipe From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-09 17:14:19: Request for TiN precursor Message-ID: <2386432.115.1344557660219.JavaMail.coral@shine> Dear J, I've got a reservation for Saturday midnight and was wondering if I can have TiN precursor installed for this run. Thanks, Wooshik (alsune) From efriend at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: efriend at snf.stanford.edu (efriend at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-10 13:23:37: fiji 2 stage doesn't load Message-ID: <12656330.129.1344630218464.JavaMail.coral@shine> 1st 2 runs loaded OK; now can't load stage into tool - it keeps hitting gate valve. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-10 13:23:37: fiji 2 stage doesn't load Message-ID: <8116070.134.1344632454897.JavaMail.coral@shine> stage height reset From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-07 18:22:32: Hf precursor Message-ID: <680515.135.1344632677996.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-08 10:12:44: precursor status Message-ID: <14779206.136.1344632689104.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-10 14:05:05: precursor status Message-ID: <29856834.137.1344632706281.JavaMail.coral@shine> water tma 1 tmt tdma-hf 2 From efriend at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: efriend at snf.stanford.edu (efriend at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-10 16:42:46: Zr precursor request 8/14 and 8/16 Message-ID: <16125384.140.1344642166854.JavaMail.coral@shine> Please install Zr precursor on Fiji2 for 8/14 and 8/16. Thanks! From wmtang at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-10 17:42:32: The plate is detached from the transfer arm Message-ID: <8511801.142.1344645753217.JavaMail.coral@shine> The plate is detached from the transfer arm and dropped between the load lock chamber and the main chamber. The gate valvecannot be closed. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-10 17:42:32: The plate is detached from the transfer arm Message-ID: <24922379.144.1344668369298.JavaMail.coral@shine> plate recovered and returned to chamber. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-09 17:14:19: Request for TiN precursor Message-ID: <9566493.145.1344668660110.JavaMail.coral@shine> user deleted reservation. no change made. From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-11 09:53:18: plate stuck Message-ID: <31241524.146.1344703998568.JavaMail.coral@shine> The plate is stuck over the gate valve. I tried to only move the plate in till when I made contact per the comment about the black stopper, but I guess it was not fully inside yet. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-11 09:53:18: plate stuck Message-ID: <16033737.147.1344713039117.JavaMail.coral@shine> plate recovered and returned to chamber. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-10 14:05:05: precursor status Message-ID: <12546334.1.1344811820478.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-12 15:50:36: precursor status Message-ID: <6900248.2.1344811836648.JavaMail.coral@shine> water tma 1 tdma ti 1 tmt From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-10 16:42:46: Zr precursor request 8/14 and 8/16 Message-ID: <20918578.26.1344959928935.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-12 15:50:36: precursor status Message-ID: <4603528.27.1344959945095.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-14 08:59:18: precursor status Message-ID: <16712251.28.1344959959243.JavaMail.coral@shine> water tma 1 tdma-zr 1 tmt From kokab at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-15 23:37:29: holder is at loadlock position Message-ID: <23481713.65.1345099050237.JavaMail.coral@shine> The substrate holder couldn't pass through the gate region after lifting it up a quarter. There were a huge resistance so I just close the gate valve and left the holder at the loadlock position. From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-15 23:40:04: HfO2 for friday Message-ID: <19938996.66.1345099205739.JavaMail.coral@shine> Could HfO2 be on the machine for friday evening? Thanks, Max From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-15 23:37:29: holder is at loadlock position Message-ID: <8065866.84.1345138555562.JavaMail.coral@shine> substrate holder fixed From derickson at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-16 14:39:07: SiO for Friday Message-ID: <511045.108.1345153148135.JavaMail.coral@shine> Is it possible for 3dmas for SiO to be installed today for Friday 9am reservation? Thanks, Dustin From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-15 23:40:04: HfO2 for friday Message-ID: <7928329.116.1345221177052.JavaMail.coral@shine> challenge met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-16 14:39:07: SiO for Friday Message-ID: <6739718.117.1345221183112.JavaMail.coral@shine> challenge met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-14 08:59:18: precursor status Message-ID: <4450299.118.1345221198250.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 09:33:38: precursor Message-ID: <33302124.119.1345221219448.JavaMail.coral@shine> water tma 3dmas tdma-hf From paik at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 10:43:31: Pt precursor request Message-ID: <6911436.127.1345225412165.JavaMail.coral@shine> Would like to have Pt for Thursday 23rd 2PM From ross at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 14:21:08: TMT for Monday Message-ID: <24350859.135.1345238469163.JavaMail.coral@shine> Thanks! Emily From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-08-17 16:01:37: no process cooling water Message-ID: <28329577.153.1345244497514.JavaMail.coral@shine> currently no process cooling water, which is needed by the pumps. as soon as the PCW returns i'll get the pumps and systems restarted. From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 20:49:58: TiN precursor request Message-ID: <2578361.201.1345261799239.JavaMail.coral@shine> Dear J, In case the Fiji2 comes back on at Saturday would it be possible to get Ti precursor for TiN deposition? Thanks, Wooshik From mdickey at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-20 08:30:51: ammonia Message-ID: <939522.21.1345476652022.JavaMail.coral@shine> No ammonia available at this time From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-20 08:30:51: ammonia Message-ID: <25849300.32.1345483104670.JavaMail.coral@shine> there is no ammonia processing at this tool currently From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 20:49:58: TiN precursor request Message-ID: <10227291.33.1345483124878.JavaMail.coral@shine> PCW was not re-established in time From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 14:21:08: TMT for Monday Message-ID: <31826988.34.1345483132957.JavaMail.coral@shine> challenge met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-08-17 16:01:37: no process cooling water Message-ID: <12872368.35.1345483215767.JavaMail.coral@shine> PCW returned. pumps back on and base pressure reached. system stayed hot so it should be ready to go by 10:30am From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 09:33:38: precursor Message-ID: <11767226.9.1345569095019.JavaMail.coral@shine> no change to precursor- just updating with bottle and valve number for record keeping From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 10:12:15: precursor status Message-ID: <10512420.10.1345569135290.JavaMail.coral@shine> 0- TMA (bottle 1) 1- TDMA-Hf (bottle 2) 2- TMT From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 12:44:48: precursor request Message-ID: <18260958.17.1345578289084.JavaMail.coral@shine> i'd like to request HfO2 and Al2O3 for thursday From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 10:12:15: precursor status Message-ID: <6152186.20.1345582186343.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 13:50:12: precursor status Message-ID: <2527489.21.1345582212443.JavaMail.coral@shine> 0- TMA (bottle 1) 1- TDMA-Hf (bottle 2) 2- Ta (bottle 1) 3 - water From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 14:39:59: Request for TiN precursor Message-ID: <27388486.27.1345585200639.JavaMail.coral@shine> Dear J, I'm planning to do a TiN run at Wednesday midnight. Would it be possible to get a TiN precursor in at that time? Thanks, Wooshik (alsune) From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-21 17:53:47: arm not moving as smoothly. lost piece inside Message-ID: <19909854.39.1345596827941.JavaMail.coral@shine> The arm was not moving as smootlhly as usual. I found lot of scratches on the sample holder too. In the process of unloading, I lost a piece inside the chanber From dre17 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: dre17 at snf.stanford.edu (dre17 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-22 08:58:39: Precursor Request Message-ID: <8033756.42.1345651120485.JavaMail.coral@shine> Would like to have TMT on for Friday tool reservation. From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-23 00:51:12: TiN Precursor request for Thursday midnight Message-ID: <26245460.73.1345708273024.JavaMail.coral@shine> Would it be possible to get TiN precursor for Thursday midnight? Thanks, Wooshik From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-17 10:43:31: Pt precursor request Message-ID: <29773657.85.1345755746761.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-23 14:03:04: precursor status Message-ID: <5754663.86.1345755784989.JavaMail.coral@shine> 0- TMA (bottle 1) 1- Pt (bottle 1) 2- Ta (bottle 1) 3 - water From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 13:50:12: precursor status Message-ID: <27191205.87.1345755805079.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 14:39:59: Request for TiN precursor Message-ID: <9922716.88.1345755870359.JavaMail.coral@shine> request not met. will try to make sure tonight works out. From paik at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-23 19:29:30: Pt request for Tu 27th at 2pm Message-ID: <16741295.96.1345775371310.JavaMail.coral@shine> Also today's Pt dep with 270deg Plasma Pt didnot work. Did not see much of a spike during pulse. Pt depleted? From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-05-23 00:19:11: pumping issue with transfer sample Message-ID: <19514738.97.1345792937074.JavaMail.coral@shine> problem no longer present From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-07-23 10:54:56: new transfer arm installed Message-ID: <25597882.98.1345792945153.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-23 00:51:12: TiN Precursor request for Thursday midnight Message-ID: <26612103.99.1345793019642.JavaMail.coral@shine> challenge met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-23 14:03:04: precursor status Message-ID: <455056.100.1345793059952.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 00:28:05: precursor status Message-ID: <413428.101.1345793285374.JavaMail.coral@shine> 0- TMA (bottle 1) 1- Ti (bottle 2) 2- Ta (bottle 1) 3 - water From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 00:29:15: precursor status Message-ID: <16739285.102.1345793355833.JavaMail.coral@shine> 0- TMA (bottle 1) 1- Ti (bottle 2) 2- Ta (bottle 1) 3 - water From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-24 09:20:36: Arm stuck in the loadlock Message-ID: <7576074.113.1345825236953.JavaMail.coral@shine> Arm is in the loadlock and it won't go into the chamber. I think the chuck is not being raised high enough.. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-21 12:44:48: precursor request Message-ID: <600433.114.1345826062871.JavaMail.coral@shine> request half met. ti on the tool. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-23 19:29:30: Pt request for Tu 27th at 2pm Message-ID: <17475422.115.1345826134241.JavaMail.coral@shine> precursor pulses verified by j prior to removing Pt precursor. Not depleted yet. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 00:28:05: precursor status Message-ID: <15670378.116.1345826156289.JavaMail.coral@shine> duplicate entry From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-22 08:58:39: Precursor Request Message-ID: <1686653.121.1345828209309.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 10:10:41: precursor status Message-ID: <8090595.122.1345828242508.JavaMail.coral@shine> 0- TMA (bottle 1) 1- Ti (bottle 2) 2- TMT 3 - water From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 00:29:15: precursor status Message-ID: <12942851.123.1345828252586.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-24 09:20:36: Arm stuck in the loadlock Message-ID: <7218742.124.1345828299737.JavaMail.coral@shine> plate was not placed securely against the pins. arm height was also adjusted. From ludwig at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 16:13:38: need precursor Al2O3 and ZrO2 on Monday Message-ID: <5324452.167.1345850018770.JavaMail.coral@shine> Can I please have these 2 precursors installed on Monday morning Al2O3 and ZrO2 Many thanks Ludwig From zeyuan at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-08-25 18:14:24: Dropped chuck during transfer Message-ID: <27715897.176.1345943665646.JavaMail.coral@shine> From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-08-25 18:14:24: Dropped chuck during transfer Message-ID: <8407671.0.1346019409646.JavaMail.coral@shine> wafer tray recovered and returned to chamber. system up and ready for use. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-21 17:53:47: arm not moving as smoothly. lost piece inside Message-ID: <3517894.1.1346019470868.JavaMail.coral@shine> piece was not found. it must be caught in the trap prior to pump line and can only be retrieved with the chamber is disassembled. transfer arm moving fine. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 16:13:38: need precursor Al2O3 and ZrO2 on Monday Message-ID: <11118523.13.1346086173806.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-27 09:50:22: precursor status Message-ID: <20478983.14.1346086223941.JavaMail.coral@shine> 0- TMA (bottle 1) 1- Zr (bottle 2) 2- TMT 3 - water From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-24 10:10:41: precursor status Message-ID: <8851856.15.1346086236990.JavaMail.coral@shine> outdated From paik at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-28 14:14:58: Pt precursor request for Tu Sept 4th 2pm(nt) Message-ID: <14091709.47.1346188499541.JavaMail.coral@shine> From wmtang at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-28 17:54:17: Hf precursor Message-ID: <11449753.60.1346201658821.JavaMail.coral@shine> Dear J, Would you please help me put the Hf pecursor into Fiji 2 by Aug 30 (Thur) 2 pm? Thank you very much. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-07-28 13:42:11: heater 19 no response Message-ID: <17566564.78.1346267411496.JavaMail.coral@shine> jim did some additional troubleshooting- 1) power was going to heater 19 today but jacket would not heat beyond 30C. follow up: will request schematics from cambridge to troubleshoot. workaround: heater jacket from fiji3 connected to heater 20 until heater 19 line issues resolved. 2) original heater jacket with loose heater connector will be fixed and returned to fiji2. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-29 12:12:02: heater 19 weak response Message-ID: <19956652.79.1346267522586.JavaMail.coral@shine> jim did some additional troubleshooting- 1) power was going to heater 19 today but jacket would not heat beyond 30C. follow up: will request schematics from cambridge to troubleshoot. workaround: heater jacket from fiji3 connected to heater 20 until heater 19 line issues resolved. 2) original heater jacket with loose heater connector will be fixed and returned to fiji2. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-29 12:27:31: heater 19 weak response Message-ID: <6189862.80.1346268452302.JavaMail.coral@shine> jim did some additional troubleshooting- 1) power was going to heater 19 today but jacket would not heat beyond 30C. follow up: will request schematics from cambridge to troubleshoot. workaround: heater jacket from fiji3 connected to heater 20 until heater 19 line issues resolved. 2) original heater jacket with loose heater connector will be fixed and returned to fiji2. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-29 12:12:02: heater 19 weak response Message-ID: <12685246.81.1346268468312.JavaMail.coral@shine> oops. should have been problem not comment From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-29 14:17:22: alumina for thursday and friday requested Message-ID: <12603145.84.1346275043129.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-29 15:44:08: precursor status Message-ID: <27564904.86.1346280249870.JavaMail.coral@shine> 0- available 1- Zr (bottle 2) 2- TMT 3 - water From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-27 09:50:22: precursor status Message-ID: <29091418.87.1346280260898.JavaMail.coral@shine> outdated From derickson at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-30 11:33:36: Request for 3dmas SiO for Friday 1pm Message-ID: <24712628.127.1346351617133.JavaMail.coral@shine> If possible would like to request 3dmas SiO for reservation at 1PM Friday 8/31. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-29 14:17:22: alumina for thursday and friday requested Message-ID: <8038906.129.1346359236028.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-28 17:54:17: Hf precursor Message-ID: <33289952.130.1346359244047.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-29 15:44:08: precursor status Message-ID: <6140122.131.1346359259074.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-30 13:41:31: precursor status Message-ID: <33169539.132.1346359292094.JavaMail.coral@shine> 0- TMA (bottle 2) 1- Hf (bottle 2) 2- TMT 3 - water From wmtang at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-30 18:52:17: The plate cannot be put into the chamber Message-ID: <21801863.141.1346377937878.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-30 11:33:36: Request for 3dmas SiO for Friday 1pm Message-ID: <4861638.21.1346439808272.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-30 18:52:17: The plate cannot be put into the chamber Message-ID: <31946444.22.1346439830279.JavaMail.coral@shine> the plate was not on the pins in the load lock. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-31 12:04:15: precursor status Message-ID: <6639084.23.1346439856288.JavaMail.coral@shine> 0- TMA (bottle 2) 1- Hf (bottle 2) 2- 3DMAS 3 - water From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-30 13:41:31: precursor status Message-ID: <11507884.24.1346439868295.JavaMail.coral@shine> outdated From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-31 14:42:44: TiN Precursor request Message-ID: <1822525.32.1346449364919.JavaMail.coral@shine> Dear Staff, Would it possible to get a TiN precursor for my Sunday (2nd Sep) deposition? Thanks, Wooshik From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-31 17:25:01: alumina over the weekend Message-ID: <28436445.37.1346459102661.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-31 14:42:44: TiN Precursor request Message-ID: <9879514.9.1346782589265.JavaMail.coral@shine> request made too late- not met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-31 17:25:01: alumina over the weekend Message-ID: <17464777.10.1346782598273.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-04 11:17:03: precursor status Message-ID: <18468529.11.1346782624282.JavaMail.coral@shine> 0- TMA (bottle 2) 1- Pt (bottle 1) 2- 3DMAS 3 - water From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-31 12:04:15: precursor status Message-ID: <21323784.12.1346782631290.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-08-28 14:14:58: Pt precursor request for Tu Sept 4th 2pm(nt) Message-ID: <17029010.13.1346782641298.JavaMail.coral@shine> request met From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-05 07:12:18: al2o3 for thursday evening Message-ID: <12644090.30.1346854339620.JavaMail.coral@shine> From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-09 22:05:32: TiN precursor request Message-ID: <9081817.4.1347253532862.JavaMail.coral@shine> Dear Staff, Would it be possible to get a TiN precursor for Monday(9th) 2:00pm reservation? Thanks, Wooshik From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-09 22:05:32: TiN precursor request Message-ID: <32149564.52.1347302941477.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-05 07:12:18: al2o3 for thursday evening Message-ID: <19234167.54.1347302954494.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-10 11:49:45: precursor status Message-ID: <6133769.56.1347302986511.JavaMail.coral@shine> 0- TMA (bottle 2) 1- Ti (bottle 2) 2- 3DMAS 3 - water From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-04 11:17:03: precursor status Message-ID: <12999043.57.1347302994520.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-13 15:08:03: UPGRADE SCHEDULE Message-ID: <5007367.153.1347574084483.JavaMail.coral@shine> Hello Fiji users, I have reserved Monday 9/17/12 though Wednesday 9/20/12 on Fiji2 in order to perform equipment upgrades. Cambridge Nanotech will be on site to install a 6 precursor-port manifold and the BOOST system which will allow low vapor pressure precursors to run at low temperatures. If everything goes smoothly, the tool may come up before Wednesday. If I release my reservation early, I will let you know. If you have any questions or concerns, please contact me. Best, Michelle From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-13 17:51:18: TiN precursor request Message-ID: <27929516.161.1347583878982.JavaMail.coral@shine> Dear Michelle, Would it be possible to get a Ti precursor for TiN deposition for my reservation on Saturday 6:00pm? Your help is greatly appreciated always. Thanks, Wooshik From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-13 17:51:18: TiN precursor request Message-ID: <11112467.3.1347642941837.JavaMail.coral@shine> Hi Wooshik, Yes- I will be sure to leave the Ti on for your work on Saturday. Michelle From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-18 09:55:26: Ta2O5 precursor request Message-ID: <8296408.16.1347987326767.JavaMail.coral@shine> I would like Tantalum precursor put in place for my runs on Thursday and Friday. I would want to set theprecursor temperature at 50 C on Thursday and 80 on Friday if possible Thanks Noureddine From zzp at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-18 23:41:33: TiN deposition 12am-10am Friday Message-ID: <29417857.28.1348036894044.JavaMail.coral@shine> Please keep the Ti precursor for my run starting Thursday midnight to morning Friday. Thanks a lot. From sipark at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-19 14:10:43: Precussor request for Al & Ti deposition Message-ID: <30264354.41.1348089044522.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-10 11:49:45: precursor status Message-ID: <19681551.56.1348098006901.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-19 16:41:19: precursor status Message-ID: <15105022.57.1348098079971.JavaMail.coral@shine> 0- Ta (bottle 1) 1- TMA (bottle 4) 2- DI 3 - Ti (bottle 1) 4- Pt (bottle 2) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-18 23:41:33: TiN deposition 12am-10am Friday Message-ID: <17024679.58.1348098130021.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-13 15:08:03: UPGRADE SCHEDULE Message-ID: <27348177.59.1348098150079.JavaMail.coral@shine> upgrade completed From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-08-29 12:27:31: heater 19 weak response Message-ID: <9667228.60.1348098180137.JavaMail.coral@shine> ebox will need to be repaired in order for heater to work. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-19 16:43:31: heater 19 disabled Message-ID: <9416217.61.1348098211175.JavaMail.coral@shine> heater 19 does not work. ebox repair required in order to fix. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-19 16:44:38: heater 19 doesn't work Message-ID: <24252196.62.1348098279184.JavaMail.coral@shine> ebox will need repair in order to fix. will require tool down and sending box to cambridge. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-19 16:44:38: heater 19 doesn't work Message-ID: <25699849.63.1348098345215.JavaMail.coral@shine> duplicate entry From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-19 14:10:43: Precussor request for Al & Ti deposition Message-ID: <20779449.64.1348098359223.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-18 09:55:26: Ta2O5 precursor request Message-ID: <17396800.89.1348182784081.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-19 16:41:19: precursor status Message-ID: <4029293.92.1348187761752.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-20 17:36:22: precursor status Message-ID: <33010219.93.1348187782759.JavaMail.coral@shine> 1- Ta (bottle 1) 0- TMA (bottle 4) 2- DI 3 - Ti (bottle 1) 4- Pt (bottle 2) 5- Y (bottle 1) From clee58 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-09-20 17:44:01: The chuck is stuck when pulled out. Message-ID: <21097713.94.1348188242245.JavaMail.coral@shine> Please do not click "OK" button until Michelle take care of this. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-09-20 17:44:01: The chuck is stuck when pulled out. Message-ID: <16495361.95.1348191591265.JavaMail.coral@shine> chuck returned to chamber and standby recipe running. From derickson at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-21 11:41:50: Request for 3DMAS Message-ID: <17390700.17.1348252911550.JavaMail.coral@shine> Can we please get the 3DMAS precursor installed for Monday 9/24 reservation at 2PM. Thanks! From bucklesm at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-23 20:28:43: 3DMAS Message-ID: <20976523.4.1348457324461.JavaMail.coral@shine> I would also like 3DMAS for my reservation at 8 AM Tuesday morning. Thank you! From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-20 17:36:22: precursor status Message-ID: <24087440.20.1348509820972.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-24 11:04:03: precursor status Message-ID: <46422.21.1348509844181.JavaMail.coral@shine> 1- Ta (bottle 1) 0- TMA (bottle 4) 2- DI 3 - Si (bottle 1) (3DMAS) 4- Pt (bottle 2) 5- Y (bottle 1) From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-21 11:41:50: Request for 3DMAS Message-ID: <9505840.22.1348509852269.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-23 20:28:43: 3DMAS Message-ID: <907877.23.1348509865407.JavaMail.coral@shine> request met From sipark at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-24 21:16:33: precursors request Al & Ti Message-ID: <1826265.29.1348546593837.JavaMail.coral@shine> From bucklesm at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-25 08:35:59: precursor request for 3DMAS Message-ID: <24655070.7.1348587359478.JavaMail.coral@shine> I would like to use 3DMAS for my reservation at 8 AM Friday morning. Thank you! From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-25 17:01:52: precursor request for Mon. Oct 1st Message-ID: <15543467.23.1348617713015.JavaMail.coral@shine> I want Al, Hf, Ti for next Monday session (Oct 1st 7pm). Thanks! From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-25 08:35:59: precursor request for 3DMAS Message-ID: <17422427.37.1348684413026.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-24 21:16:33: precursors request Al & Ti Message-ID: <28829665.38.1348684422125.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-26 11:34:19: precursor status Message-ID: <14429558.39.1348684460454.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ti (bottle 3) 2- DI 3 - Si (bottle 1) (3DMAS) 4- Pt (bottle 2) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-24 11:04:03: precursor status Message-ID: <8514363.40.1348684469522.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-26 15:03:58: boost enabled Message-ID: <8285955.44.1348697040146.JavaMail.coral@shine> the boost valve is currently enabled. valve 4 (Pt) is not available until boost is disabled. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-26 15:03:58: boost enabled Message-ID: <18780486.54.1348717379733.JavaMail.coral@shine> boost disabled. actuators returned to normal positions From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-09-28 09:46:22: plasma test failed Message-ID: <28963359.92.1348850783548.JavaMail.coral@shine> short test run of SiO2 plasma recipe did not have a balanced network or visible plasma strike. i found the automatic matching network turned off, which is why i tried the test. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-28 13:16:24: boost enabled Message-ID: <1650961.98.1348863385356.JavaMail.coral@shine> the boost valve is currently enabled. valve 4 (Pt) is not available until boost is disabled. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-28 13:16:24: boost enabled Message-ID: <15584276.105.1348877662425.JavaMail.coral@shine> boost disabled. line 4 (Pt) is ready to go. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-26 11:34:19: precursor status Message-ID: <2713333.3.1349109424031.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-01 09:37:29: precursor status Message-ID: <7768369.4.1349109450302.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ti (bottle 3) 2- DI 3 - Hf (bottle 2) 4- Pt (bottle 2) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-09-25 17:01:52: precursor request for Mon. Oct 1st Message-ID: <12299055.5.1349109468490.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-01 14:54:36: Plasma not working Message-ID: <29591263.14.1349128476936.JavaMail.coral@shine> We have done some additional troubleshooting as recommended by Cambridge and it looks like the problem is with the RF matching network, not the power supply. We will continue troubleshooting and keep you updated when the plasma is back. Plasma films deposited since 9/20/12 have had poor plasma. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-09-28 09:46:22: plasma test failed Message-ID: <7511876.15.1349128498157.JavaMail.coral@shine> updated entry From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-03 16:11:17: plasma not working Message-ID: <24802422.17.1349305878519.JavaMail.coral@shine> we did some additional matching network troubleshooting today and have still not been able to resolve the problem. Will continue working with Cambridge to fix the plasma issue. Thermal depositions continue to be fine. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-05 15:27:51: precursor status Message-ID: <9676162.36.1349476071469.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ti (bottle 3) 2- DI 3 - Hf (bottle 2) 4- Sr (bottle 2) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-01 09:37:29: precursor status Message-ID: <21017147.37.1349476081578.JavaMail.coral@shine> outdated From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-05 17:31:49: Chuck stuck in between the chamber and loadlock Message-ID: <10519196.39.1349483510421.JavaMail.coral@shine> Dear Michelle and J, I've accidentally got the chuck stuck in between the loadlock and the chamber... Sorry for the inconvenience Thanks, Wooshik From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-05 17:31:49: Chuck stuck in between the chamber and loadlock Message-ID: <27700409.45.1349541249287.JavaMail.coral@shine> chuck recovered and returned to chamber. everything ok. From apal at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-08 02:49:09: Cannot put the plate inside the main chamber Message-ID: <1520813.3.1349689749759.JavaMail.coral@shine> After my deposition, I was not able to slide the plate inside the main chamber. It is getting stuck at the gate valve. I am not shutting it down so that someone else may try to do this. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-08 02:49:09: Cannot put the plate inside the main chamber Message-ID: <6159454.19.1349717946751.JavaMail.coral@shine> transfer arm pins were not pushed all the way back into the plate. Please make sure to check for a gap between the plate and the pins. Plate back in chamber From kokab at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-08 14:00:11: Pt precursor needed Message-ID: <12055248.3.1349730012045.JavaMail.coral@shine> Hello, I need Pt precursor for Tuesday or Wednsday night (Oct. 9th or Oct 10th) Thanks, From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-08 16:15:49: precursor status Message-ID: <26411771.6.1349738149578.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ti (bottle 3) 2- DI 3 - Hf (bottle 2) 4- Pt (bottle 2) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-05 15:27:51: precursor status Message-ID: <2175801.7.1349738161706.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-08 14:00:11: Pt precursor needed Message-ID: <32126195.8.1349738182914.JavaMail.coral@shine> request met. Pt on the tool. Please check on plasma status before processing. From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-08 20:50:03: Ti & Hf precursors running out Message-ID: <16408207.10.1349754603835.JavaMail.coral@shine> Ti & Hf precusors have already ran out. Ran thermal HfO2, TiO2, Al2O3 tonight, only Al has pulse. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-08 20:50:03: Ti & Hf precursors running out Message-ID: <23193926.23.1349816992148.JavaMail.coral@shine> >From Yi: I ran 70 cycles of thermal TiO2 at 200c on bare Si wafer. Si wafer average native oxide thickness is 26.9A. After ALD, I measured the thickness of TiO2 to be in the range of 12-13A. I would expect I can get 30A TiO2 from my previous experience. I ran 100 cycles of thermal HfO2 at 200C on bare Si wafer. Si wafer average native oxide thickness is 26.5A. After ALD, I measured the thickness of HfO2 to be in the range of 15-16A. I would expect I can get around 100A HfO2. I used Woollam to measure the thickness of TiO2 and HfO2. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-09 14:10:46: precursor status Message-ID: <30939891.24.1349817047709.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ti (bottle 1) 2- DI 3 - Hf (bottle 1) 4- Pt (bottle 2) 5- Y (bottle 1) Empty bottle 3 of Ti and bottle 3 of Hf removed. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-08 16:15:49: precursor status Message-ID: <30806780.25.1349817054787.JavaMail.coral@shine> outdated From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-10 01:39:11: H2O running out Message-ID: <1934804.36.1349858352006.JavaMail.coral@shine> I ran 100 cycles of HfO2 tonight on bare si wafer and found out the H2O pulses decreased with cycling. I measured the HfO2 afterwards, only 10A deposited for 100 cycles at 280C. Please change the water. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-10 01:39:11: H2O running out Message-ID: <925949.64.1349911848702.JavaMail.coral@shine> DI refilled. Thank you for the detailed information! From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-10 17:51:39: USB error of computer Message-ID: <18948987.65.1349916700062.JavaMail.coral@shine> There is 'USB error' on the computer. Cannot operate the tool anymore. From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-10 18:14:23: HfO2 on fiji1 Message-ID: <14179597.67.1349918064445.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-10 17:51:39: USB error of computer Message-ID: <21611307.85.1349979323109.JavaMail.coral@shine> USB error cleared. Fiji2 back up From clee58 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-12 17:43:21: The chuck was dropped Message-ID: <21557613.127.1350089001924.JavaMail.coral@shine> The chuck was dropped when I unloaded it. From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-14 11:41:11: fixed Message-ID: <19509363.1.1350240072142.JavaMail.coral@shine> fixed the plate, it is okay to use now. From jhaydon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-12 17:43:21: The chuck was dropped Message-ID: <1288264.5.1350308718477.JavaMail.coral@shine> chuck has been fixed From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-01 14:54:36: Plasma not working Message-ID: <27702880.42.1350410409396.JavaMail.coral@shine> plasma working From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-03 16:11:17: plasma not working Message-ID: <7491434.43.1350410427585.JavaMail.coral@shine> plasma is back in business. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-14 11:41:11: fixed Message-ID: <14248604.44.1350410439692.JavaMail.coral@shine> thanks max From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-16 13:36:32: Boost enabled Message-ID: <14567500.47.1350419793211.JavaMail.coral@shine> Boost has been enabled on Fiji2 for Yttria deposition. Until boost is disabled, Pt is not available for Fiji2 From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-10-16 19:09:42: plate dropped in load lock Message-ID: <1625021.59.1350439783108.JavaMail.coral@shine> I dropped the transfer plate when i wanted to get the wafers back out of the chamber. there is a wafer box with my name on it right next to Fiji2 for the wafers on the plate. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-10-16 19:09:42: plate dropped in load lock Message-ID: <2765109.5.1350492300124.JavaMail.coral@shine> plate recovered From fpurkl at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-18 11:33:46: Pt request for today Message-ID: <15520376.27.1350585227011.JavaMail.coral@shine> If possible, please activate the Pt precursor for my reservation today 10/18 4pm. Thanks! From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-16 13:36:32: Boost enabled Message-ID: <33088349.36.1350600895127.JavaMail.coral@shine> boost disabled From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-10 18:14:23: HfO2 on fiji1 Message-ID: <12274424.37.1350600908134.JavaMail.coral@shine> when? From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-18 11:33:46: Pt request for today Message-ID: <15863962.38.1350600917143.JavaMail.coral@shine> request met From sipark at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-18 15:56:06: Pulse signal for Ti precursor is so weak. It needs to be replaced. Message-ID: <7681216.39.1350600967163.JavaMail.coral@shine> From zzp at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-19 10:48:18: HfO2 and TiN deposition this weekend Message-ID: <18853864.59.1350668899227.JavaMail.coral@shine> Can we replace the precursor for TiN in case it runs out? Thank you very much! From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-18 15:56:06: Pulse signal for Ti precursor is so weak. It needs to be replaced. Message-ID: <32095061.60.1350670335454.JavaMail.coral@shine> Pulse size is not the only indicator of Ti content. Please describe process conditions (# cycles, Temp, recipe) and quantify output (thickness) details to request precursor change due to empty bottle. From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-19 16:22:24: plugs for Yttria deposition Message-ID: <28779213.70.1350688945540.JavaMail.coral@shine> I'd like to start a yttria deposition on Monday (Oct 22) at 2pm. Could you please switch the plugs for the boost. Thank you From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-19 16:22:24: plugs for Yttria deposition Message-ID: <31849342.21.1350933244201.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-22 12:14:34: boost enabled Message-ID: <1239506.22.1350933274212.JavaMail.coral@shine> Boost has been enabled for Y. Pt will not be available until the boost is disabled. From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-23 00:43:23: TiN precursor request Message-ID: <21225288.32.1350978203995.JavaMail.coral@shine> Hi MIchelle, I'm planning to do a TiN dep on Tuesday midnight. Would it be possible to get the Ti precursor installed? Thanks, Wooshik Jung (alsune) From englisht at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: englisht at snf.stanford.edu (englisht at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-23 10:16:52: Pt & Al2O3 precursor Message-ID: <10113820.38.1351012613249.JavaMail.coral@shine> planning to use currently installed Pt and Al2O3 precursor (10/25 and 10/26) From calarrudo at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-23 20:04:48: Message-ID: <1438282.57.1351047888615.JavaMail.coral@shine> The plate dropped as I was pulling the the arm out. the plate is stuck between the gate valve. Cannot unload my wafers Max t or Michelle will unload in the morning. From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-23 20:39:12: retrieved plate Message-ID: <17348357.58.1351049952878.JavaMail.coral@shine> put plate back on arm. plate scrapes against side when you pull the arm all the way out of the chamber as far as it can possibly go. From jhaydon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-23 20:04:48: Message-ID: <7305838.68.1351093339865.JavaMail.coral@shine> plate has been retrieved From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-23 20:39:12: retrieved plate Message-ID: <28534660.71.1351099332646.JavaMail.coral@shine> thank you max!! From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-19 10:48:18: HfO2 and TiN deposition this weekend Message-ID: <26944356.72.1351099525707.JavaMail.coral@shine> logged From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-23 00:43:23: TiN precursor request Message-ID: <28674073.73.1351099559725.JavaMail.coral@shine> logged. From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-24 23:57:13: plate keeps dropping Message-ID: <33471959.82.1351148234108.JavaMail.coral@shine> almost (maybe actually) impossible to remove plate from inside machine. now, can't even get plate to start coming out of machine into load lock... will need to be seen to. From luckys at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-25 07:53:30: Ni/NiO precursor Message-ID: <16093219.84.1351176811205.JavaMail.coral@shine> Hi, I would really appreciate if the Ni precursor is installed on this machine soon. Thank you very much. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-10-24 23:57:13: plate keeps dropping Message-ID: <20920809.89.1351187095445.JavaMail.coral@shine> plate height recalibrated. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-22 12:14:34: boost enabled Message-ID: <8460967.92.1351187861515.JavaMail.coral@shine> boost disabled. Pt is now available From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-25 10:58:16: precursor status Message-ID: <17838508.93.1351187896523.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ti (bottle 1) 2- DI 3 - Hf (bottle 1) 4- Pt (bottle 100912) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-09 14:10:46: precursor status Message-ID: <24704724.94.1351187905541.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-23 10:16:52: Pt & Al2O3 precursor Message-ID: <17652062.95.1351187913549.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-26 13:48:12: boost enabled Message-ID: <30431315.142.1351284492163.JavaMail.coral@shine> boost has been enabled to allow y processing. Pt is not available until the boost is disabled. From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-26 15:22:16: boost Message-ID: <10727392.154.1351290136543.JavaMail.coral@shine> Hello, could you enable the boost for Yttria on Monday (29. Oct) for my reservation on 2pm. And maybe weigh the precursor beforehand. Thank you From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-26 18:45:24: SiO2 precursor request Message-ID: <11139547.155.1351302325221.JavaMail.coral@shine> Could you please put on SiO2 precursor 3DMAS for my session next Thursday night and Friday afternoon? Thank you! From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-25 10:58:16: precursor status Message-ID: <32011950.21.1351541000885.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-29 13:03:38: precursor status Message-ID: <15962065.22.1351541018893.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Zr (bottle 2) 2- DI 3 - Hf (bottle 1) 4- Pt (bottle 100912) 5- Y (bottle 1) From su1 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: su1 at snf.stanford.edu (su1 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-29 14:48:15: Message-ID: <1254042.26.1351547295498.JavaMail.coral@shine> From kokab at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-29 16:06:55: boost disabling for Pt Message-ID: <14987127.29.1351552015990.JavaMail.coral@shine> Hello, I want t deposit ALD Pt Tuesday afternoon and I found that boost is still enabled. Thanks, From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-26 15:22:16: boost Message-ID: <11318265.45.1351615138775.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-26 13:48:12: boost enabled Message-ID: <29387161.46.1351615160805.JavaMail.coral@shine> boost disabled. pt precursor available now. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-29 14:48:15: Message-ID: <1906462.47.1351615185824.JavaMail.coral@shine> no information. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-29 16:06:55: boost disabling for Pt Message-ID: <27657868.48.1351615194831.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 11:27:09: precursor status Message-ID: <23464216.59.1351621630054.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ta (bottle 1) 2- DI 3 - Hf (bottle 1) 4- Pt (bottle 100912) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-29 13:03:38: precursor status Message-ID: <9014317.60.1351621639061.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 13:25:30: precursor status Message-ID: <21480158.69.1351628731068.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Sr (bottle 1) 2- DI 3 - Hf (bottle 1) 4- Pt (bottle 100912) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 11:27:09: precursor status Message-ID: <31593994.70.1351628739076.JavaMail.coral@shine> outdated From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 15:08:27: TiN precursor for Thursday (1st Nov) Message-ID: <18321245.76.1351634907663.JavaMail.coral@shine> Dear Michelle, Would it be possible to get Ti Precursor for the TiN run on this coming Thursday? I've made my reservation from 2pm to 7pm. Thanks, Wooshik From zzp at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 17:24:29: precursor request for TiN too Message-ID: <27788173.87.1351643070012.JavaMail.coral@shine> my runs are planned on Friday and Sunday. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-31 11:06:38: precursor status Message-ID: <12427203.116.1351706799019.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Sr (bottle 1) 2- DI 3 - Ta (bottle 1) 4- Pt (bottle 100912) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 13:25:30: precursor status Message-ID: <13775933.117.1351706811026.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 10:22:26: precursor status Message-ID: <2039649.145.1351790547260.JavaMail.coral@shine> 0- 3DMAS 1- Sr (bottle 1) 2- DI 3 - Ti (bottle 101212) 4- Pt (bottle 100912) 5- Y (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-31 11:06:38: precursor status Message-ID: <24379646.146.1351790556272.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 15:08:27: TiN precursor for Thursday (1st Nov) Message-ID: <16800288.147.1351790567279.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-26 18:45:24: SiO2 precursor request Message-ID: <7407445.148.1351790574287.JavaMail.coral@shine> request met From su1 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: su1 at snf.stanford.edu (su1 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 10:40:06: precursor request - SiO2 Message-ID: <26082464.150.1351791606827.JavaMail.coral@shine> Could you please leave the 3DMAS on for my run on Monday? From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 13:40:32: precursor status Message-ID: <28254951.154.1351802434161.JavaMail.coral@shine> 0- 3DMAS 1- Y (bottle 1) 2- DI 3 - Ti (bottle 101212) 4- Pt (bottle 100912) 5- Sr (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 10:22:26: precursor status Message-ID: <14073477.155.1351802443169.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 13:41:11: BOOST enabled Message-ID: <13032225.156.1351802472187.JavaMail.coral@shine> Boost is enabled. Pt is not available until BOOST is disabled. From jrshakya at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 15:34:48: Hafnia precursor Message-ID: <30702927.159.1351809289072.JavaMail.coral@shine> Hi, Can you please install HfO2 precursors for my run on Nov 7? Thx -Jyotindra From clee58 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-02 15:40:01: Al2O3 precursor request TMA!!!! Message-ID: <20219419.207.1351896001843.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-02 15:40:01: Al2O3 precursor request TMA!!!! Message-ID: <8319124.221.1351911872460.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-02 20:05:22: precursor status Message-ID: <18067934.222.1351911923499.JavaMail.coral@shine> 0- 3DMAS 1- TMA 2- DI 3 - Ti (bottle 101212) 4- Pt (bottle 100912) 5- Sr (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 13:40:32: precursor status Message-ID: <23045865.223.1351911934599.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-30 17:24:29: precursor request for TiN too Message-ID: <10444901.224.1351911971619.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-10-25 07:53:30: Ni/NiO precursor Message-ID: <20685200.225.1351911980626.JavaMail.coral@shine> request met From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-03 15:11:23: SrO boost mode request Message-ID: <30993090.229.1351980684194.JavaMail.coral@shine> Dear J, Would it be possible for you to configure the SrO precursor into boost mode after your deposition around midnight (4th Nov)? Best, Wooshik Jung From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-04 10:56:56: Precursor/Boost request Message-ID: <33275.4.1352055417121.JavaMail.coral@shine> Hello, I'd like to make a yttria depositiion on Monday and Tuesday. Could you change the precursor and enable the boost. (Only if the new yttria precursor is ready) Thank you Jochen From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-03 15:11:23: SrO boost mode request Message-ID: <30626061.11.1352099900896.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 10:40:06: precursor request - SiO2 Message-ID: <16827269.18.1352136608190.JavaMail.coral@shine> no reservation for monday From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-05 13:22:57: update Precursor/Boost request Message-ID: <18490399.27.1352150578754.JavaMail.coral@shine> Hello, could you please install in addition to the yttria precursor (and boost) the zirconia precursor as well I'd like to make the depositon in the night from monday (11/5) to tuesday (11/6) Thank you very much Jochen From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-05 20:49:03: Keep the precursor 3DMAS Message-ID: <26936480.43.1352177344215.JavaMail.coral@shine> Hi, I want to keep the precursor of 3DMAS for my upcoming Wed. deposition. Thank you very much! From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-05 13:22:57: update Precursor/Boost request Message-ID: <7019110.45.1352188625440.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-04 10:56:56: Precursor/Boost request Message-ID: <14475381.46.1352188633450.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-02 20:05:22: precursor status Message-ID: <30228033.47.1352188667588.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-05 23:58:25: precursor status Message-ID: <32666551.48.1352188706767.JavaMail.coral@shine> 0- 3DMAS 1- TMA 2- DI 3 - Zr (bottle 2) 4- Pt (bottle 100912) 5- Y (bottle 110512) From kokab at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-06 07:48:29: boost disabling for Pt Message-ID: <17893531.1.1352216909653.JavaMail.coral@shine> Hello, I want to deposit Ti and Pt today at 2pm and I need Ti and Pt precursor. Thanks, From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-06 12:43:01: precursor status Message-ID: <20233788.23.1352234581861.JavaMail.coral@shine> 0- 3DMAS 1- TDMA-Hf (bottle 3) 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) 5- Y (bottle 110512) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 13:41:11: BOOST enabled Message-ID: <27344819.24.1352234595891.JavaMail.coral@shine> boost disabled. Pt available for use From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-01 15:34:48: Hafnia precursor Message-ID: <17306037.25.1352234605928.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-05 20:49:03: Keep the precursor 3DMAS Message-ID: <29567874.26.1352234616953.JavaMail.coral@shine> request met. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-05 23:58:25: precursor status Message-ID: <23001706.27.1352234623962.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-06 07:48:29: boost disabling for Pt Message-ID: <27631239.28.1352234631985.JavaMail.coral@shine> request met From su1 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: su1 at snf.stanford.edu (su1 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-06 13:27:08: precursor request Message-ID: <5029090.29.1352237228359.JavaMail.coral@shine> Can you please leave the 3DMAS on for my run on Saturday (11/10)? From calarrudo at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 13:56:48: HfO2 precursor Message-ID: <5276870.3.1352325408830.JavaMail.coral@shine> Jay, i have The Fiji2 tool time reserved for Friday at 10:00am, I need your help to install the HfOx precursor. From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 17:08:52: yttria precursor Message-ID: <11401964.15.1352336934109.JavaMail.coral@shine> Hello, could you please enable the boost for yttria for my deposition on thursday (11/6) afternoon (if that isn't already the case, I can't check by myself before tomorrow, maybe you could add the boost information to the precursor status) and keep the yttria precursor installed. Thank you very much From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 18:02:20: Gap between plate and transfer arm pins Message-ID: <22602435.20.1352340141135.JavaMail.coral@shine> The plate and transfer arm not 100% engaged. There is a about 0.5inch gap between transfer arm pins and plate. If I use wipes to push the plate fully into the pins, I go the warning of 'transfer arm extended' light and therefor couldn't tansfer my wafers into the main chamber (plate couldn't go further back and hit the stopper sensor because plate edge reaches the load-lock limit). I can still get plate in/out with the small gap though. From yiwu at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 22:54:17: 3DMAS running low Message-ID: <8115450.22.1352357657977.JavaMail.coral@shine> I ran 430 cycles of SiO2 plasma ALD on bare si wafers, I got approximately 20-30A deposition. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 22:54:17: 3DMAS running low Message-ID: <12338150.23.1352362403135.JavaMail.coral@shine> 3dmas is empty.. i'll check the bunker for another cylinder tomorrow morning. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 18:02:20: Gap between plate and transfer arm pins Message-ID: <30420208.24.1352362467315.JavaMail.coral@shine> sensor was pushed nearly an inch beyond where it should be (flush with the end of the transfer rod). problem does not exist when you keep the sensor in the proper place. please do not push or force or throw the transfer arm back at the end stop/sensor. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 00:14:42: 3dmas status Message-ID: <7137930.25.1352362483382.JavaMail.coral@shine> 3dmas is empty.. i'll check the bunker for another cylinder tomorrow morning. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 17:08:52: yttria precursor Message-ID: <12780044.29.1352396550013.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 09:43:20: boost enabled Message-ID: <31783343.30.1352396601032.JavaMail.coral@shine> Boost is enabled. Pt precursor unavailable until boost is disabled. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 00:14:42: 3dmas status Message-ID: <19569529.32.1352398343512.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 10:13:49: 3dmas precursor to be installed 11/8/2012 Message-ID: <30806866.34.1352398430710.JavaMail.coral@shine> i found more 3dmas in the bunker and will install it today. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 10:13:49: 3dmas precursor to be installed 11/8/2012 Message-ID: <18265176.37.1352403455102.JavaMail.coral@shine> installed From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 12:42:33: Sr precursor request with boost Message-ID: <6154579.41.1352407354457.JavaMail.coral@shine> Dear J, I'm planning to do a SrO deposition over the weekend and would like to request Sr precursor with boost if possible starting on Saturday From clee58 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 14:01:28: Precursor request Al2O3 Message-ID: <23243768.44.1352412089627.JavaMail.coral@shine> Hi, I want to deposit Al2O3 today at 9pm and tomorrow at 5pm, if available. Thanks! From clee58 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 14:24:09: Al2O3 request during the weekend as well Message-ID: <12267103.46.1352413449615.JavaMail.coral@shine> From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-07 13:56:48: HfO2 precursor Message-ID: <19833309.1.1352482629424.JavaMail.coral@shine> request withdrawn From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 14:01:28: Precursor request Al2O3 Message-ID: <3277721.2.1352482655573.JavaMail.coral@shine> available for 5pm 11/9/2012 From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 14:24:09: Al2O3 request during the weekend as well Message-ID: <9167305.3.1352485054434.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 12:42:33: Sr precursor request with boost Message-ID: <13167574.4.1352485062463.JavaMail.coral@shine> request met and boost enabled From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-06 13:27:08: precursor request Message-ID: <6454108.5.1352485070501.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-06 12:43:01: precursor status Message-ID: <27104945.6.1352485091579.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-09 10:18:47: precursor status Message-ID: <25003881.7.1352485127739.JavaMail.coral@shine> 0- 3DMAS 1- TMA 2 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) (disabled boost on) 5- Sr (boost on) From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-09 11:14:15: yttria deposition Message-ID: <26712630.11.1352488455751.JavaMail.coral@shine> Hello, could you please install the Y precursor and enable the boost for deposition on Monday (11/12) at noon. thank you From su1 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: su1 at snf.stanford.edu (su1 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-10 14:03:29: Password to run program Message-ID: <5910885.42.1352585010007.JavaMail.coral@shine> I accidentally shut down the control program. It needs a password to restart. From maxms at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-11-10 18:31:10: chuck heater needs resetting Message-ID: <3328477.45.1352601071043.JavaMail.coral@shine> From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-10 14:03:29: Password to run program Message-ID: <10386544.20.1352742078202.JavaMail.coral@shine> users should know the operator password From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-11-10 18:31:10: chuck heater needs resetting Message-ID: <7611421.21.1352742149253.JavaMail.coral@shine> chuck heater working fine. machine fixed itself as everything was fine when i arrived this morning. no connection issues or software bugs could be found nor the problem replicated. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-09 11:14:15: yttria deposition Message-ID: <27819903.22.1352742285404.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-09 10:18:47: precursor status Message-ID: <7580950.23.1352742299442.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-12 09:45:13: precursor status Message-ID: <19180746.24.1352742313450.JavaMail.coral@shine> 0- 3DMAS 1- TMA 2 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) (disabled boost on) 5- Y (boost on) From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-08 09:43:20: boost enabled Message-ID: <7143557.3.1352765519961.JavaMail.coral@shine> boost disabled From englisht at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: englisht at snf.stanford.edu (englisht at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-13 09:16:29: Cone temperature displaying 0/NC Message-ID: <17482403.3.1352826989421.JavaMail.coral@shine> From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-13 10:03:41: chuck temperature controller not reading Message-ID: <30675222.10.1352829821974.JavaMail.coral@shine> following up on tim english's problem report, it is the chuck heater not the cone heater that is reading no connection to the thermocouple. without this connection the heaters will not engage for the chuck for safety reasons. all the other heaters are working ok. since the chuck is well isolated thermally and the other heaters are working, you can get the chuck to reach nearly the temp of the other heaters through radiative heating if you wait long enough. how long is a good question, i'd say at least an hour if you are raising the temp and 25C (once the other heaters get to the set point). no connection problems were found or issues with the cabling. i cannot check the chamber end without opening the chamber. i'll contact cambridge nanotech for a solution. i'm not shutting down the tool because if you have non-temperature critical work, you are welcome to process. just be clear you will not have a readout of your chuck temperature. From asamarao at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-13 22:08:33: Alumina for my run on Wed, Nov 14 - 2 to 5 30 PM Message-ID: <649329.39.1352873313380.JavaMail.coral@shine> please load the TMA precursor for alumina before 2 pm on nov 14. thanks ashwin. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-13 22:08:33: Alumina for my run on Wed, Nov 14 - 2 to 5 30 PM Message-ID: <11460021.50.1352921269675.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-13 09:16:29: Cone temperature displaying 0/NC Message-ID: <2374221.54.1352922088452.JavaMail.coral@shine> reiterated problem From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-13 10:03:41: chuck temperature controller not reading Message-ID: <2163711.55.1352922113571.JavaMail.coral@shine> chuck temperature sensor is working now. be careful to watch for this error going forward. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-14 11:42:11: boost enabled Message-ID: <11353443.56.1352922132608.JavaMail.coral@shine> boost is enabled. no Pt processing until boost is disabled. From asamarao at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-16 07:52:43: Pt and Alumina Message-ID: <29966183.109.1353081164815.JavaMail.coral@shine> I would like to run Pt and Alumina deposition today or over the weekend if I can manage time. Could you please enable Pt deposition? Thanks, Ashwin. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-14 11:42:11: boost enabled Message-ID: <31573010.115.1353087703688.JavaMail.coral@shine> boost disabled From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-16 07:52:43: Pt and Alumina Message-ID: <14201525.116.1353087717746.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-16 12:25:36: boost enabled Message-ID: <6058603.125.1353097537723.JavaMail.coral@shine> no Pt deposition possible until boost is disabled From englisht at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: englisht at snf.stanford.edu (englisht at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-18 18:27:38: Pt request/boost disabled Message-ID: <1435137.1.1353292059360.JavaMail.coral@shine> Planning to deposit Pt during overnight reservation from Mon evening to Tues morning. From zzp at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-11-19 00:25:51: computer blue screen Message-ID: <18119050.5.1353313551736.JavaMail.coral@shine> it seemed like a problem of the hard disk. From haiwei at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 10:34:28: Need Al2O3 at 6pm on Nov 19 Message-ID: <12304886.1.1353350068614.JavaMail.coral@shine> Can you please help me put TMA for my Al2O3 deposition? I understand the tool is shut down currently. If it comes back today, can you help me with the precursors? thanks From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-11-19 00:25:51: computer blue screen Message-ID: <30649454.2.1353352027698.JavaMail.coral@shine> back online. after first computer reboot, had usb communication error. cycled ebox, then re-start, usb error was gone but heater 15 (chuck heater) showing NC. Wiggled heater 15 connections to ebox, power cycled ebox again, and now everything seems to be communicating and heating. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-18 18:27:38: Pt request/boost disabled Message-ID: <8782613.3.1353352214364.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-16 12:25:36: boost enabled Message-ID: <8084664.4.1353352225402.JavaMail.coral@shine> boost disabled. Pt available. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 10:34:28: Need Al2O3 at 6pm on Nov 19 Message-ID: <9942961.5.1353352583285.JavaMail.coral@shine> request met. From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 16:23:48: I'd like to use Ti and Ta precursors-eom Message-ID: <17850162.5.1353371029414.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 16:23:48: I'd like to use Ti and Ta precursors-eom Message-ID: <28560534.6.1353373536232.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 17:06:46: precursor status Message-ID: <24030449.7.1353373606914.JavaMail.coral@shine> 0- Ta (bottle 1) 1- Hf (bottle 1) 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) 5- Y (boost off) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-12 09:45:13: precursor status Message-ID: <10431743.8.1353373617021.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 17:22:03: precursor status Message-ID: <2526485.10.1353374523592.JavaMail.coral@shine> 0- Ta (bottle 1) (heater jacket 1 is on Ta bottle. on fiji2 display it shows as on hf bottle- heater is actually temp of ta precursor) 1- Hf (bottle 1) (heater jacket removed- precursor will not work till heater jacket moved back) 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) 5- Y (boost off) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 17:06:46: precursor status Message-ID: <20217328.11.1353374530651.JavaMail.coral@shine> outdated From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-20 14:11:33: Request for Sr Precursor Message-ID: <27649674.0.1353449494162.JavaMail.coral@shine> Dear Michelle, Would it be possible to get Sr Precursor on this coming Sunday 25th Nov? Also, please enable the boost feature. Thanks, Wooshik From clee58 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-20 17:36:35: Requeset TMA for Al2O3 on Thur and Fri reservations, thanks! Message-ID: <8132032.6.1353461796171.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-20 20:07:02: precursor status Message-ID: <16126503.7.1353470822692.JavaMail.coral@shine> 0- Ta (bottle 1) 1- TMA (bottle 2) 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) 5- Y (boost off) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-19 17:22:03: precursor status Message-ID: <32096837.8.1353470835831.JavaMail.coral@shine> outdated From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-21 09:07:47: I'd like to keep Ta and Ti precursors during the long weekend - eom Message-ID: <26824966.12.1353517668328.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-21 15:56:04: precursor status Message-ID: <21569784.8.1353542164472.JavaMail.coral@shine> 0- Ta (bottle 1)- heater jacket on Ta is displayed as on TMA bottle on Fiji screen. heater is actually on Ta. 1- TMA (bottle 2) 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912)- DISABLED due to boost 5- Sr(boost ON) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-20 20:07:02: precursor status Message-ID: <33179775.9.1353542172560.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-21 09:07:47: I'd like to keep Ta and Ti precursors during the long weekend - eom Message-ID: <9171253.10.1353542180648.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-20 14:11:33: Request for Sr Precursor Message-ID: <24408272.11.1353542274450.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-20 17:36:35: Requeset TMA for Al2O3 on Thur and Fri reservations, thanks! Message-ID: <21876653.12.1353542290613.JavaMail.coral@shine> request met From apal at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-22 03:05:34: Cannot put the plate back in the load lock Message-ID: <12635517.21.1353582335166.JavaMail.coral@shine> Not shutting it down so that if possible, some user can fix it. From jrshakya at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-22 15:31:22: precursor request Message-ID: <4188490.1.1353627083061.JavaMail.coral@shine> Hi I need to deposit Hafnia. Can you plz load hafnia precursor. I am also going to need Ta, can you plz leave that on as well. Thnx -Joe From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 07:17:57: Chuck temperature not rising Message-ID: <10651669.4.1353683877943.JavaMail.coral@shine> Not sure what last user (apal) did but the chuck temperature is not rising. I found it set to 0 C and everytime I enter a value it goes back to 0 as if I have no control. Also sample holder was left in the load lock and was almost completely off the forks falling at the bottom. I fixed it and loaded back into the chamber. Did not want shut it down but I don't think the system is usable. Noureddine From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 07:37:38: Also sample holder peeling off Message-ID: <18427645.5.1353685059039.JavaMail.coral@shine> Forgot to also mention that sample holder is peeling off big time thereby leaving particulates on the sample. From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 07:40:10: Would like keep Ta and Hf precursors for my Monday and Tuesday runs Message-ID: <26406437.6.1353685210520.JavaMail.coral@shine> Since I was not able to do my deposition today, I would like to have Ta and Hf precursors on the system for my Monday and Tuesday runs. I'd appreciate if that could be accomodated. Thanks Noureddine From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 09:55:56: chuck heater Message-ID: <17387626.9.1353693357567.JavaMail.coral@shine> Hello Fiji2 users, it appears that our chuck heater problem is songoing. It seemed to resolve itself earlier in the week but we are back to the state where the heater is reading no connection to the thermocouple (as it was for a period of time last week). I believe we do have a fix to try from Cambridge which we can try next week. Until then, we can go back to the work-around J established last week: "without this connection the heaters will not engage for the chuck for safety reasons. all the other heaters are working ok. since the chuck is well isolated thermally and the other heaters are working, you can get the chuck to reach nearly the temp of the other heaters through radiative heating if you wait long enough. how long is a good question, i'd say at least an hour if you are raising the temp and 25C (once the other heaters get to the set point). no connection problems were found or issues with the cabling. i cannot check the chamber end without opening the chamber. i'll contact cambridge nanotech for a solution. i'm not shutting down the tool because if you have non-temperature critical work, you are welcome to process. just be clear you will not have a readout of your chuck temperature." From jrshakya at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-25 10:20:37: chuck heater Message-ID: <25346777.1.1353867637730.JavaMail.coral@shine> When I was running TiN deposition, the chuck heater readout suddenly started appearing. From jrshakya at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-25 10:23:08: Precursor Request Message-ID: <403211.2.1353867788668.JavaMail.coral@shine> Hi I need Hf and Ta precurcors and would also like to have Ti left in if possible. I would appreciate if Hf can be installed. -Joe From qran at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-25 19:02:57: plate stuck in the middle Message-ID: <16419067.3.1353898978105.JavaMail.coral@shine> when took the plate out, it stuck in the middle. I didn't shutdown the system, in case some users can reset and take the plate out. A useful wafer is inside. I left a wafer holder labeled QRan on the fiji table. Please put my wafer into the holder. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 07:17:57: Chuck temperature not rising Message-ID: <23259207.16.1353953494767.JavaMail.coral@shine> thermocouple will be adjusted From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 07:37:38: Also sample holder peeling off Message-ID: <7141756.17.1353953529096.JavaMail.coral@shine> sample holder wiped down. please feel free to wipe sample holder gently with cleanroom wipes when this occurs. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-22 03:05:34: Cannot put the plate back in the load lock Message-ID: <5063855.18.1353953562404.JavaMail.coral@shine> plate was not seated properly on pins. resolved by another user. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-11-25 19:02:57: plate stuck in the middle Message-ID: <7878745.19.1353953588663.JavaMail.coral@shine> plate recovered From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-25 10:23:08: Precursor Request Message-ID: <27317520.24.1353956404311.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-25 10:20:37: chuck heater Message-ID: <14213340.25.1353956461866.JavaMail.coral@shine> thanks for reporting this. chuck heater was still working when i checked this morning. rtd swapped with overtemp rtd (location 25) to attempt to fix the problem permanently. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 09:55:56: chuck heater Message-ID: <13674930.26.1353956467934.JavaMail.coral@shine> rtd swapped with overtemp rtd (location 25) to attempt to fix the problem permanently. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-23 07:40:10: Would like keep Ta and Hf precursors for my Monday and Tuesday runs Message-ID: <18314597.27.1353956593173.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-22 15:31:22: precursor request Message-ID: <12823963.28.1353956608321.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-26 11:05:41: precursor status Message-ID: <22717928.29.1353956741582.JavaMail.coral@shine> 0- Ta (bottle 1)- heater jacket on Ta is displayed as on TMA bottle on Fiji screen. heater is actually on Ta. 1- TMA (bottle 2) 2- DI 3 - TDMA-Ti (bottle 101012) 4- TDMA-Hf (bottle 1) enabled. 5- Sr(boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-21 15:56:04: precursor status Message-ID: <13836328.30.1353956749670.JavaMail.coral@shine> outdated From jochenstehle at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-26 13:06:16: Precursor request yttria Message-ID: <29689591.38.1353963977202.JavaMail.coral@shine> Could you please install the yttria precursor and enable the boost for tomorrow (Nov 27) 2pm and weigh the precursor beforehand (if this hasn't been done already; with cap on) Thank you From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-26 15:51:36: RTD probe switched back Message-ID: <24280788.50.1353973897399.JavaMail.coral@shine> RTD probe switched back to 15. Chuck temperature was reading 220C for over 1 hour with no duty cycle (chamber was in process of cooling to 200C). RTD 15 showed chuck was at 191C. From hongyuc at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 10:21:56: precursor request Message-ID: <16382237.0.1354040517074.JavaMail.coral@shine> HfO2 deposition. Thanks From zzp at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 11:00:48: request for Si and Ti precursors Message-ID: <12090673.1.1354042848136.JavaMail.coral@shine> for SiO2 and TiN deposition respectively. From fpurkl at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 11:08:39: Pt and TMA precursor request Message-ID: <33486858.4.1354043320669.JavaMail.coral@shine> Pt and TMA precursor requested for Thur 11/29. Thanks, Fabian From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 14:35:14: precursor status Message-ID: <26675601.5.1354055715857.JavaMail.coral@shine> 0- 3DMAS (bottle 110712) 1- Hf (bottle 1) 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) disabled. 5- Y(boost ON) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 14:35:44: BOOST enabled Message-ID: <24916054.6.1354055745156.JavaMail.coral@shine> BOOST is enabled to allow Y processing. Pt is unavailable until BOOST is disabled. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-26 11:05:41: precursor status Message-ID: <1823783.7.1354055755264.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-26 13:06:16: Precursor request yttria Message-ID: <3432461.8.1354055762342.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 10:21:56: precursor request Message-ID: <18253834.9.1354055776492.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 11:00:48: request for Si and Ti precursors Message-ID: <22649035.10.1354055783569.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 16:58:50: chuck heater Message-ID: <22465939.14.1354064331780.JavaMail.coral@shine> Hello Fiji users, J and I will not be in town for the next few days so if the chuck heater thermocouple goes down again I am re-posting our previous work around for easy reference. The thermocouple is working at the moment but does seem to go off and on intermittently without provocation. Until we can fix it permanently, we can go back to the work-around J established last week: "without this connection the heaters will not engage for the chuck for safety reasons. all the other heaters are working ok. since the chuck is well isolated thermally and the other heaters are working, you can get the chuck to reach nearly the temp of the other heaters through radiative heating if you wait long enough. how long is a good question, i'd say at least an hour if you are raising the temp and 25C (once the other heaters get to the set point). no connection problems were found or issues with the cabling. i cannot check the chamber end without opening the chamber. i'm not shutting down the tool because if you have non-temperature critical work, you are welcome to process. just be clear you will not have a readout of your chuck temperature." From fpurkl at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 11:20:23: Pt and TMA request Message-ID: <10730286.13.1354130424273.JavaMail.coral@shine> Pt and TMA precursor requested for Wed 12/05. Thanks, Fabian From jrshakya at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 15:33:07: Precursor request Message-ID: <21323983.0.1354145587679.JavaMail.coral@shine> Hi I am plannig to do Ta depostion on Thus 11/29/12 at 2pm. Can you plz install Ta for my run. Also I am going to need Ti and Hf and would appreciate if you can leave them on. -Joe From qran at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 17:43:09: TMA request Message-ID: <15240740.4.1354153390241.JavaMail.coral@shine> Hi, I have a reservation at 4pm Monday (12/3). I would like to use TMA. Thanks. From qran at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 18:04:20: al2O3 problem Message-ID: <22268359.5.1354154660447.JavaMail.coral@shine> Standard thermal Al2O3 recipe was used to run 50 cycles on 11/25. The thickness measured by Wollam is 28A. During the run, I could bearly see the TMA pulse. From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 11:08:39: Pt and TMA precursor request Message-ID: <13045554.10.1354485420772.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 15:33:07: Precursor request Message-ID: <8630671.11.1354485463191.JavaMail.coral@shine> outdated request From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 18:04:20: al2O3 problem Message-ID: <23659532.13.1354563808395.JavaMail.coral@shine> There is no TMA loaded on the tool- not sure which precursor this run used. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-03 12:38:28: precursor status Message-ID: <23649229.14.1354567108789.JavaMail.coral@shine> 0- 3DMAS (bottle 110712) 1- Ta (bottle 1) 2- DI 3 - TDMA-Ti (bottle 101012) 4- Pt (bottle 100912) disabled. 5- Y(boost ON) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 14:35:14: precursor status Message-ID: <17794055.15.1354567120908.JavaMail.coral@shine> outdated From jrshakya at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-03 16:14:01: precursor request Message-ID: <4225289.33.1354580041947.JavaMail.coral@shine> Hi I am going to do another run using Ta precursor on wed 12/5 8pm. Please leave Ta on. Thnx -Joe From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 17:43:09: TMA request Message-ID: <6019448.2.1354645894075.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-03 12:38:28: precursor status Message-ID: <31494382.3.1354645907212.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-04 10:32:14: precursor status Message-ID: <13137441.4.1354645935492.JavaMail.coral@shine> 0- 3DMAS (bottle 110712) 1- TMA (bottle 4) 2- DI 3 - TDMA-Zr (bottle 2) 4- Pt (bottle 100912) disabled. 5- Y(boost ON) From alsune at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-04 16:03:47: Sr Precursor request Message-ID: <15312213.18.1354665827357.JavaMail.coral@shine> Dear Michelle, Would it be possible to get Sr precursor installed with the boost enabled for my thursday (Dec 6th) run? Thanks, Wooshik From jrshakya at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-04 18:09:57: Precursor request Message-ID: <15993608.33.1354673398143.JavaMail.coral@shine> Hi Michelle Can you plz install Ta precursor for my run tomorrow? Also I would like to request Ti precursor back. I am comparing TiN vs TaN. Thnx -Joe From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 09:25:26: precursor status Message-ID: <3413279.0.1354728326671.JavaMail.coral@shine> 0- TMT 1- TMA (bottle 4) 2- DI 3 - TDMA-Zr (bottle 2) 4- Pt (bottle 100912) 5- Y(boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-04 10:32:14: precursor status Message-ID: <21943671.1.1354728333775.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-27 14:35:44: BOOST enabled Message-ID: <10626673.2.1354728346913.JavaMail.coral@shine> Boost disabled. Pt available. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-11-28 11:20:23: Pt and TMA request Message-ID: <21364283.3.1354728355001.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 10:10:23: precursor status Message-ID: <28280066.7.1354731023715.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- TMA (bottle 4) 2- DI 3 - TDMA-Zr (bottle 2) 4- Pt (bottle 100912) 5- Sr(boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 09:25:26: precursor status Message-ID: <11893489.9.1354731033831.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-04 23:27:31: Precursor request Message-ID: <14676202.10.1354731043928.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 14:54:50: precursor status Message-ID: <9644178.38.1354748091287.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- W (bottle 120412) 2- DI 3 - Ta (bottle 1) 4- Pt (bottle 100912)- Disabled due to BOOST on 5- Sr(boost ON) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 10:10:23: precursor status Message-ID: <15673315.39.1354748101365.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-04 18:09:57: Precursor request Message-ID: <18894106.40.1354748108432.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-04 16:03:47: Sr Precursor request Message-ID: <15596437.41.1354748115510.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-03 16:14:01: precursor request Message-ID: <1296828.42.1354748132667.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 14:56:03: BOOST ON Message-ID: <22012409.43.1354748163976.JavaMail.coral@shine> Boost is enabled for the Sr precursor. Pt is disabled until Boost is OFF. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 14:56:03: BOOST ON Message-ID: <6740769.44.1354748538603.JavaMail.coral@shine> Boost disabled From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 15:02:46: precursor status Message-ID: <15946725.45.1354748566882.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- W (bottle 120412) 2- DI 3 - Ta (bottle 1) 4- Pt (bottle 100912) 5- Sr(boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 14:54:50: precursor status Message-ID: <12797108.46.1354748578999.JavaMail.coral@shine> outdated From zzp at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-06 10:15:51: Ti precursor for my Saturday run Message-ID: <7720611.25.1354817752637.JavaMail.coral@shine> Thanks for the help! From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-06 10:45:33: BOOST ON Message-ID: <20566889.27.1354819533675.JavaMail.coral@shine> Boost is enabled on the Sr precursor. Pt is unavailable until boost is disabled. From anuarun at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: anuarun at snf.stanford.edu (anuarun at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-06 16:34:18: Alumina, Platinum and HfO2 precursor Message-ID: <13287471.9.1354840458810.JavaMail.coral@shine> Alumina, Platinum and HfO2 precursor for Friday (7th December) 12:30 reservation From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-06 10:45:33: BOOST ON Message-ID: <32434103.13.1354920987758.JavaMail.coral@shine> boost disabled From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-07 14:58:38: precursor status Message-ID: <13823581.14.1354921119059.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- W (bottle 120412) 2- TMA (bottle 2) 3 - Ta (bottle 1) 4- Pt (bottle 100912) 5- Sr(boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-06 16:34:18: Alumina, Platinum and HfO2 precursor Message-ID: <15205143.15.1354921126131.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-05 15:02:46: precursor status Message-ID: <18979724.16.1354921133210.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-07 17:23:19: precursor status Message-ID: <27608734.19.1354929800119.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- W (bottle 120412) 2- TMA (bottle 2) 3 - Ti (bottle 1) 4- Pt (bottle 100912) 5- Sr(boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-07 14:58:38: precursor status Message-ID: <8264502.20.1354929808207.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-06 10:15:51: Ti precursor for my Saturday run Message-ID: <10077597.21.1354929815275.JavaMail.coral@shine> request met From gmatus at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: gmatus at snf.stanford.edu (gmatus at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-12-09 08:31:54: chuck temp is NC Message-ID: <1079807.0.1355070715474.JavaMail.coral@shine> The chuck shows NC instead of a temperature. The thermocouple must be disconnected or something. I just did a long deposition and got OK film thicknesses. (I had to tweek the recipe to not wait for a chuck temperature stabilization.) You'll get something on your wafer, but user beware. From ntayebi at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-09 09:28:48: I would like Ti and Zr precursors for Tuesday run Message-ID: <16655704.0.1355074129658.JavaMail.coral@shine> From svolkman at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-10 06:43:10: HfO2 and ZrO2 thermal precursor request Message-ID: <4628849.6.1355150590912.JavaMail.coral@shine> I'd like to request HfO2 and ZrO2 thermal precursors for Dec 11th and 12th (Tue and Wed). Thank you. Steve From gmatus at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: gmatus at snf.stanford.edu (gmatus at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-10 14:34:18: 3DMAS request Message-ID: <23484941.8.1355178858816.JavaMail.coral@shine> I would like to request 3DMAS for SiO2 for my reservation on 12/11 in the afternoon From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-07 17:23:19: precursor status Message-ID: <15699591.24.1355188308430.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-10 17:12:51: precursor status Message-ID: <2752560.25.1355188372030.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- Hf (bottle 3) 2- TMA (bottle 2) 3 - Ti (bottle 1) 4- Zr (bottle 1) 5- Sr(boost OFF) From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-09 09:28:48: I would like Ti and Zr precursors for Tuesday run Message-ID: <15780465.26.1355188380118.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-10 06:43:10: HfO2 and ZrO2 thermal precursor request Message-ID: <8893128.27.1355188387196.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-10 14:34:18: 3DMAS request Message-ID: <19455142.28.1355188394275.JavaMail.coral@shine> request met From svolkman at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-12-11 06:59:49: Transfer Plate stuck between chamber and antechamber Message-ID: <6614808.40.1355237989852.JavaMail.coral@shine> Figi2 is not usable. While attempting to transfer sample, I engaged the transfer plate at the neutral position but was unable to push the transfer rod in as far as I am used to with the figi1. I noticed a red line drawn in pen on the transfer arm, indicating to "stop here" at the line. I then lifted the sample 1/4 turn up, and while transfering the plate to the anti chamber it fell of the pins of the transfer arm. I made one attempt to reaquire the plate but it is clear that the transfer plate now sits too low to be aquired by the transfer arm. The plate now sits between the chamber and antichamber. I have NOT pressed OK on the message window indicating to do so when the transfer is complete, as it is not and I fear the gate valve would come down on the plate. From svolkman at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-12-11 07:01:47: See Previous comment Message-ID: <2345702.41.1355238108024.JavaMail.coral@shine> Realized I should issue this as a shutdown. See myprevious comment. From zzp at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 09:47:51: Ti precursor IN for my Thursday run Message-ID: <6233000.2.1355248072935.JavaMail.coral@shine> thanks a lot From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Shutdown fiji2 SNF 2012-12-11 07:01:47: See Previous comment Message-ID: <9904841.4.1355248251667.JavaMail.coral@shine> plate recovered From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Problem fiji2 SNF 2012-12-11 06:59:49: Transfer Plate stuck between chamber and antechamber Message-ID: <21142769.5.1355248262775.JavaMail.coral@shine> plate recovered From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 10:04:15: precursor status Message-ID: <14205934.6.1355249056410.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- Hf (bottle 3) 2- DI 3 - Ti (bottle 1) 4- Zr (bottle 1) 5- Sr(boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 11:07:42: precursor status Message-ID: <8041484.0.1355252863493.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- Hf (bottle 3) 2- DI 3 - Ti (bottle 1) 4- Zr (bottle 1) 5- Hf (bottle 120312 (boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 10:04:15: precursor status Message-ID: <21905626.1.1355252870607.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-10 17:12:51: precursor status Message-ID: <20783574.2.1355252878685.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 12:01:58: precursor status Message-ID: <5313520.1.1355256118990.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- Hf (bottle 3) 2- DI 3 - Ti (bottle 1) 4- Zr (bottle 1) 5- Ta (bottle 1) (boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 11:07:42: precursor status Message-ID: <7126735.2.1355256127078.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 12:01:58: precursor status Message-ID: <3430385.15.1355274928255.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 17:15:43: precursor status Message-ID: <23855839.16.1355274943405.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- Hf (bottle 3) 2- DI 3 - Ti (bottle 1) 4- Zr (bottle 1) 5- In (bottle 1) (boost OFF) From anuarun at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: anuarun at snf.stanford.edu (anuarun at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-12 12:39:55: Fiji2 13 December Precursor Message-ID: <12279942.1.1355344796507.JavaMail.coral@shine> Hi Michelle Could you please load precursors to deposit Al2O3/Pt/HfO2 Thanks From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-12 14:03:42: precursor status Message-ID: <20929071.6.1355349823363.JavaMail.coral@shine> 0- 3DMAS (bottle 120512) 1- Hf (bottle 3) 2- TMA (bottle 2) 3 - Pt 4- Zr (bottle 1) 5- In (bottle 1) (boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 17:15:43: precursor status Message-ID: <33443136.7.1355349831421.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-12 12:39:55: Fiji2 13 December Precursor Message-ID: <23470672.8.1355349838489.JavaMail.coral@shine> request met From svolkman at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-13 04:18:32: Base pressure ~180 mtorr Message-ID: <18222692.13.1355401112892.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-13 04:18:32: Base pressure ~180 mtorr Message-ID: <25392643.24.1355424587969.JavaMail.coral@shine> noted From ludwig at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-13 10:54:46: request Al2O3/ZrO2 Message-ID: <22908657.25.1355424887143.JavaMail.coral@shine> Hi, can you please install Al2O3/ZrO2 for tonight's run Many thanks, Ludwig From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-13 17:27:57: precursor status Message-ID: <24458678.0.1355448477570.JavaMail.coral@shine> 0- DI 1- Hf (bottle 3) 2- TMA (bottle 2) 3 - Pt 4- Zr (bottle 1) 5- In (bottle 1) (boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-12 14:03:42: precursor status Message-ID: <20891480.1.1355448483645.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-13 10:54:46: request Al2O3/ZrO2 Message-ID: <12990926.2.1355448491713.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-11 09:47:51: Ti precursor IN for my Thursday run Message-ID: <19318181.3.1355448497760.JavaMail.coral@shine> NA From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-13 17:27:57: precursor status Message-ID: <27341624.0.1355662796543.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-16 05:00:17: precursor status Message-ID: <5884890.1.1355662818663.JavaMail.coral@shine> 0- DI 1- Sn (bottle 2) 2- TMA (bottle 2) 3 - Pt 4- Zr (bottle 1) 5- In (bottle 1) (boost OFF) From jasonlin at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-16 17:36:10: Ti request Message-ID: <7828053.17.1355708171417.JavaMail.coral@shine> I'd like to request Ti and DI water for monday evening deposition. Thanks. From anuarun at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: anuarun at snf.stanford.edu (anuarun at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-17 10:19:19: 12-18 reservation Precursor Message-ID: <1666978.25.1355768359684.JavaMail.coral@shine> Al2O3/Pt Thanks Michelle Anu From svolkman at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-17 13:10:41: Request Hafnium Precursor Message-ID: <7382664.36.1355778642535.JavaMail.coral@shine> For Tuesday and Wednesday From jasonlin at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-17 15:35:41: Ti request (update) Message-ID: <17192336.49.1355787342610.JavaMail.coral@shine> If we cannot get Ti onto the tool for this evening, I have a reservation for Tuesday evening which would work also. Thanks in advance. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-17 15:39:11: precursor status Message-ID: <24332759.50.1355787552495.JavaMail.coral@shine> 0- DI 1- TMA (bottle 2) 2- 3DMAS (bottle 120412) 3 - Pt 4- Hf (bottle 3) 5- Ti (bottle 101212) (boost OFF) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-16 05:00:17: precursor status Message-ID: <14759142.51.1355787560523.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-16 17:36:10: Ti request Message-ID: <3446822.52.1355787571571.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-17 10:19:19: 12-18 reservation Precursor Message-ID: <4009649.53.1355787585630.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-17 13:10:41: Request Hafnium Precursor Message-ID: <25065719.54.1355787598677.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-17 15:35:41: Ti request (update) Message-ID: <14027521.55.1355787617807.JavaMail.coral@shine> request met for Tuesday From trejo10 at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-18 22:26:35: Wafer holder in middle of gate valve Message-ID: <16044131.21.1355898395910.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:57 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:57 -0000 Subject: Comment fiji2 SNF 2012-12-18 22:26:35: Wafer holder in middle of gate valve Message-ID: <27060894.24.1355938378627.JavaMail.coral@shine> plate recovered