From jprovine at snf.stanford.edu Mon Jul 2 12:07:06 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 2 Jul 2012 12:07:06 -0700 Subject: Comment fiji2 SNF 2012-06-27 14:15:50: precursor status Message-ID: logged From jprovine at snf.stanford.edu Mon Jul 2 12:07:21 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 2 Jul 2012 12:07:21 -0700 Subject: Comment fiji2 SNF 2012-07-02 12:07:21: precursor status Message-ID: water tma tdma-Hf tdma-Zr From ross at snf.stanford.edu Mon Jul 2 20:20:41 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Mon, 2 Jul 2012 20:20:41 -0700 Subject: Shutdown fiji2 SNF 2012-07-02 20:20:41: Dropped the transfer plate Message-ID: Gate can't close until the tool is vented and plate is put back on pins From jprovine at snf.stanford.edu Tue Jul 3 07:04:14 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 3 Jul 2012 07:04:14 -0700 Subject: Shutdown fiji2 SNF 2012-07-02 20:20:41: Dropped the transfer plate Message-ID: transfer plate recovered. system back in standby mode and ready for use. From ross at snf.stanford.edu Fri Jul 6 12:22:10 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Fri, 6 Jul 2012 12:22:10 -0700 Subject: Shutdown fiji2 SNF 2012-07-06 12:22:09: Arm is too low to put plate in Message-ID: Plate keeps hitting heater, even on arm's highest position From mmrincon at snf.stanford.edu Fri Jul 6 13:31:34 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 6 Jul 2012 13:31:34 -0700 Subject: Shutdown fiji2 SNF 2012-07-06 12:22:09: Arm is too low to put plate in Message-ID: adjusted arm, plate transfer is working now. From clee58 at snf.stanford.edu Fri Jul 6 14:40:16 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Fri, 6 Jul 2012 14:40:16 -0700 Subject: Problem fiji2 SNF 2012-07-06 14:40:16: The chuck can't be loaded into the chamber. Message-ID: Something is stuck when I try to push into the chamber. It seems that the main gate is closed. I don't know how my previous users used this. From mmrincon at snf.stanford.edu Fri Jul 6 15:12:01 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 6 Jul 2012 15:12:01 -0700 Subject: Problem fiji2 SNF 2012-07-06 14:40:16: The chuck can't be loaded into the chamber. Message-ID: adjusted arm back up again- had slipped in the last hour or so. tried to put a little extra muscle in tightening the screws this time. From jprovine at snf.stanford.edu Sat Jul 7 08:45:59 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 7 Jul 2012 08:45:59 -0700 Subject: Comment fiji2 SNF 2012-07-02 12:07:21: precursor status Message-ID: logged From jprovine at snf.stanford.edu Sat Jul 7 08:46:17 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 7 Jul 2012 08:46:17 -0700 Subject: Comment fiji2 SNF 2012-07-07 08:46:17: precursor status Message-ID: water tma tdma-hf 3dmas (sio2) From wmtang at snf.stanford.edu Sat Jul 7 15:00:26 2012 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Sat, 7 Jul 2012 15:00:26 -0700 Subject: Problem fiji2 SNF 2012-07-07 15:00:25: The transfer arm is out of order. Message-ID: From ross at snf.stanford.edu Mon Jul 9 09:53:52 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Mon, 9 Jul 2012 09:53:52 -0700 Subject: Comment fiji2 SNF 2012-07-09 09:53:52: Transfer arm is fixed! Message-ID: From jhaydon at snf.stanford.edu Tue Jul 10 07:01:40 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:01:40 -0700 Subject: Problem fiji2 SNF 2012-07-07 15:00:25: The transfer arm is out of order. Message-ID: transfer arm is fixed From jprovine at snf.stanford.edu Wed Jul 11 07:09:05 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:09:05 -0700 Subject: Comment fiji2 SNF 2012-07-09 09:53:52: Transfer arm is fixed! Message-ID: noted...thank you From jprovine at snf.stanford.edu Wed Jul 11 07:09:12 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:09:12 -0700 Subject: Comment fiji2 SNF 2012-07-07 08:46:17: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Wed Jul 11 07:09:26 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:09:26 -0700 Subject: Comment fiji2 SNF 2012-07-11 07:09:26: precursor status Message-ID: water tma tdma-hf tdma-zr From jprovine at snf.stanford.edu Thu Jul 12 16:58:15 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 12 Jul 2012 16:58:15 -0700 Subject: Comment fiji2 SNF 2012-07-11 07:09:26: precursor status Message-ID: changed From jprovine at snf.stanford.edu Thu Jul 12 16:58:45 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 12 Jul 2012 16:58:45 -0700 Subject: Comment fiji2 SNF 2012-07-12 16:58:45: precursor status Message-ID: water tma tdma-hf (CpCH3)3-Y From alsune at snf.stanford.edu Thu Jul 12 21:48:40 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 12 Jul 2012 21:48:40 -0700 Subject: Comment fiji2 SNF 2012-07-12 21:48:39: TiN request Message-ID: Would it possible to get TiN precursor on Friday so I can work with it during the weekends? Otherwise Monday or anytime fastest would be great. Thanks From haiwei at snf.stanford.edu Fri Jul 13 19:55:46 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Fri, 13 Jul 2012 19:55:46 -0700 Subject: Shutdown fiji2 SNF 2012-07-13 19:55:46: Can't get the plate into the chamber Message-ID: Rolling up doesnt get the plate across the barrier. From jprovine at snf.stanford.edu Sat Jul 14 12:43:20 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 14 Jul 2012 12:43:20 -0700 Subject: Comment fiji2 SNF 2012-07-12 21:48:39: TiN request Message-ID: TDMA-Ti will be installed sunday night at the end of jprovine's reservation. From jprovine at snf.stanford.edu Sat Jul 14 12:44:21 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 14 Jul 2012 12:44:21 -0700 Subject: Shutdown fiji2 SNF 2012-07-13 19:55:46: Can't get the plate into the chamber Message-ID: nothing was wrong with the system. please always check that the transfer arm pins are fully inserted into the substrate holder sockets. if not, the plate leans at a downward angle and is more difficult to introduce to the chamber. From jprovine at snf.stanford.edu Sun Jul 15 01:15:13 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 15 Jul 2012 01:15:13 -0700 Subject: Comment fiji2 SNF 2012-07-12 16:58:45: precursor status Message-ID: changed From jprovine at snf.stanford.edu Sun Jul 15 01:15:28 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 15 Jul 2012 01:15:28 -0700 Subject: Comment fiji2 SNF 2012-07-15 01:15:27: precursor status Message-ID: water tma tdma-hf Pt From mmrincon at snf.stanford.edu Mon Jul 16 12:07:21 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 16 Jul 2012 12:07:21 -0700 Subject: Comment fiji2 SNF 2012-07-15 01:15:27: precursor status Message-ID: changed From mmrincon at snf.stanford.edu Mon Jul 16 12:09:01 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 16 Jul 2012 12:09:01 -0700 Subject: Comment fiji2 SNF 2012-07-16 12:09:01: precursor status Message-ID: water tma tdma-ti tdma-zr From fpurkl at snf.stanford.edu Mon Jul 16 17:46:06 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Mon, 16 Jul 2012 17:46:06 -0700 Subject: Problem fiji2 SNF 2012-07-16 17:46:06: PEALD Pt deposition problem Message-ID: I ran a direct comparison of a 250 cyc deposition of PEALD Pt at 270C in Fiji 1 and Fiji2 with a new precursor installed on Fiji 2. Strong pulses visible for Fiji1 vs. almost no pulses visible for Fiji2. The plate of Fiji1 changed color to a shiny metal color after the deposition, whereas Fiji2 did not show a color change. A fused silica wafer coated in Fiji1 was completely opaque and reflective after deposition. The fused silica wafer out of Fiji2 was still transparent with a very non-uniform slight cloudiness visible. From mmrincon at snf.stanford.edu Wed Jul 18 10:18:13 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 18 Jul 2012 10:18:13 -0700 Subject: Comment fiji2 SNF 2012-07-16 12:09:01: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Wed Jul 18 10:19:10 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 18 Jul 2012 10:19:10 -0700 Subject: Comment fiji2 SNF 2012-07-18 10:19:10: precursor status Message-ID: water tma tdma-ti 3DMAS (Si) From maxms at snf.stanford.edu Wed Jul 18 17:50:16 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 18 Jul 2012 17:50:16 -0700 Subject: Problem fiji2 SNF 2012-07-18 17:50:15: arm won't go in Message-ID: i pushed the holder onto the fingers more to make sure, but it still won't go in! From jprovine at snf.stanford.edu Thu Jul 19 04:06:18 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 19 Jul 2012 04:06:18 -0700 Subject: Problem fiji2 SNF 2012-07-18 17:50:15: arm won't go in Message-ID: other users have operated without trouble since report From mmrincon at snf.stanford.edu Thu Jul 19 16:47:09 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 19 Jul 2012 16:47:09 -0700 Subject: Comment fiji2 SNF 2012-07-19 16:47:09: precursor change Message-ID: tma pulses ~0.05 Torr. Exchanged for new TMA bottle- TMA1 installed on port 0. Pulses now approx. 0.4 Torr. From mmrincon at snf.stanford.edu Fri Jul 20 15:14:52 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 20 Jul 2012 15:14:52 -0700 Subject: Comment fiji2 SNF 2012-07-18 10:19:10: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Fri Jul 20 15:15:03 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 20 Jul 2012 15:15:03 -0700 Subject: Comment fiji2 SNF 2012-07-19 16:47:09: precursor change Message-ID: documented From mmrincon at snf.stanford.edu Fri Jul 20 15:16:18 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 20 Jul 2012 15:16:18 -0700 Subject: Comment fiji2 SNF 2012-07-20 15:16:17: precursor status Message-ID: tma1(0) TMT(1) 3DMAS (Si) (2) water (3) From jprovine at snf.stanford.edu Mon Jul 23 09:21:17 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 23 Jul 2012 09:21:17 -0700 Subject: Comment fiji2 SNF 2012-07-20 15:16:17: precursor status Message-ID: changed From jprovine at snf.stanford.edu Mon Jul 23 09:21:35 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 23 Jul 2012 09:21:35 -0700 Subject: Comment fiji2 SNF 2012-07-23 09:21:35: precursor status Message-ID: water tdma-zr tma 3dmas From jprovine at snf.stanford.edu Mon Jul 23 10:54:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 23 Jul 2012 10:54:57 -0700 Subject: Comment fiji2 SNF 2012-07-23 10:54:56: new transfer arm installed Message-ID: a new transfer arm was installed on fiji2 this morning. the action is wonderfully smooth and even. the end effector height has been reset so that the substrate holder enters and exits the chamber easily. please be careful not to push off axis on the transfer arm in any way. do not move it quickly or slam it into the heaters, walls, or end plate with extension sensor. in short, we have a lovely new arm and be nice to your toys or you won't get to play with them. From sipark at snf.stanford.edu Mon Jul 23 16:06:48 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Mon, 23 Jul 2012 16:06:48 -0700 Subject: Problem fiji2 SNF 2012-07-23 16:06:48: transfer amr problem Message-ID: While moving a transfer arm, I dropped the holder. It seems that the arm has a misalignment issue. Previous user had a similar issue. It never occured to me. From mmrincon at snf.stanford.edu Mon Jul 23 16:52:42 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Mon, 23 Jul 2012 16:52:42 -0700 Subject: Problem fiji2 SNF 2012-07-23 16:06:48: transfer amr problem Message-ID: plate put back on arm. no adjustments necessary. this new arm requires that you keep the pins in the up position as you withdraw the plate. if you let the arm go back to neutral too early, the plate catches the edge of the heater and ends up falling off of the pins. From jprovine at snf.stanford.edu Mon Jul 23 18:08:43 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 23 Jul 2012 18:08:43 -0700 Subject: Comment fiji2 SNF 2012-07-23 09:21:35: precursor status Message-ID: changed From jprovine at snf.stanford.edu Mon Jul 23 18:08:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 23 Jul 2012 18:08:57 -0700 Subject: Comment fiji2 SNF 2012-07-23 18:08:56: precursor status Message-ID: water tdma-hf tma 3dmas From haiwei at snf.stanford.edu Mon Jul 23 19:50:34 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Mon, 23 Jul 2012 19:50:34 -0700 Subject: Shutdown fiji2 SNF 2012-07-23 19:50:33: The sample plat is dropped Message-ID: I think this is the same issue with the previous user. The tool can't be operated without taking the sample holder out. From mmrincon at snf.stanford.edu Tue Jul 24 09:30:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 24 Jul 2012 09:30:39 -0700 Subject: Shutdown fiji2 SNF 2012-07-23 19:50:33: The sample plat is dropped Message-ID: No adjustment required. Please remember to keep plate up until you can see it in the load lock window, then let arm return to neutral. The plate will catch on the heater if you let the arm go to neutral before the plate is all the way back. From mmrincon at snf.stanford.edu Tue Jul 24 09:38:36 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 24 Jul 2012 09:38:36 -0700 Subject: Comment fiji2 SNF 2012-07-23 18:08:56: precursor status Message-ID: outdated. hf1 removed. From mmrincon at snf.stanford.edu Tue Jul 24 09:39:17 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 24 Jul 2012 09:39:17 -0700 Subject: Comment fiji2 SNF 2012-07-24 09:39:17: precursor status Message-ID: (0) tma1 (1) zr1 (2) 3dmas (3) h2o From mmrincon at snf.stanford.edu Tue Jul 24 09:39:32 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 24 Jul 2012 09:39:32 -0700 Subject: Comment fiji2 SNF 2012-04-09 12:19:59: loading arm stiff Message-ID: new arm installed From efriend at snf.stanford.edu Tue Jul 24 12:35:07 2012 From: efriend at snf.stanford.edu (efriend at snf.stanford.edu) Date: Tue, 24 Jul 2012 12:35:07 -0700 Subject: Problem fiji2 SNF 2012-07-24 12:35:06: Stage won't load Message-ID: New transfer arm needs re-adjustment. There is currently no "window" of stage elevation that will allow stage to push into the chamber through the gate valve. From jprovine at snf.stanford.edu Tue Jul 24 13:03:35 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 24 Jul 2012 13:03:35 -0700 Subject: Problem fiji2 SNF 2012-07-24 12:35:06: Stage won't load Message-ID: arm adjusted. From mmrincon at snf.stanford.edu Tue Jul 24 14:01:58 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 24 Jul 2012 14:01:58 -0700 Subject: Comment fiji2 SNF 2012-07-24 09:39:17: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Tue Jul 24 14:02:15 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 24 Jul 2012 14:02:15 -0700 Subject: Comment fiji2 SNF 2012-07-24 14:02:14: precursor status Message-ID: (0) tmt (1) zr1 (2) 3dmas (3) h2o From haiwei at snf.stanford.edu Tue Jul 24 16:55:13 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Tue, 24 Jul 2012 16:55:13 -0700 Subject: Comment fiji2 SNF 2012-07-24 16:55:12: Need the Hf precursor Message-ID: I am planning to do HfO2 tonight. Could you please help me put on the Hf precursor? Thanks a lot! From jprovine at snf.stanford.edu Tue Jul 24 19:14:33 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 24 Jul 2012 19:14:33 -0700 Subject: Comment fiji2 SNF 2012-07-24 16:55:12: Need the Hf precursor Message-ID: request met From jprovine at snf.stanford.edu Tue Jul 24 19:14:44 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 24 Jul 2012 19:14:44 -0700 Subject: Comment fiji2 SNF 2012-07-24 14:02:14: precursor status Message-ID: changed From jprovine at snf.stanford.edu Tue Jul 24 19:15:20 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 24 Jul 2012 19:15:20 -0700 Subject: Comment fiji2 SNF 2012-07-24 19:15:19: precursor status Message-ID: water tmt 3dmas tdma-hf 1 From haiwei at snf.stanford.edu Tue Jul 24 23:30:34 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Tue, 24 Jul 2012 23:30:34 -0700 Subject: Problem fiji2 SNF 2012-07-24 23:30:33: Bad plat and arm Message-ID: I feel I got cursed on the machine. Right after Emily finished, Emily and I were trying to put the plat back to the chamber, the normal loading process. However, it doesn't work at all. Nothing I can do about the tool. Good luck with the next user.... From mmrincon at snf.stanford.edu Wed Jul 25 09:48:22 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 25 Jul 2012 09:48:22 -0700 Subject: Problem fiji2 SNF 2012-07-24 23:30:33: Bad plat and arm Message-ID: plate was touching load lock floor. needed adjustment. screws were very loose. it is working now. From mmrincon at snf.stanford.edu Wed Jul 25 09:49:16 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 25 Jul 2012 09:49:16 -0700 Subject: Comment fiji2 SNF 2012-07-25 09:49:15: precursor status Message-ID: (0) tmt (1) zr1 (2) tma1 (3) h2o From ross at snf.stanford.edu Wed Jul 25 11:07:19 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:07:19 -0700 Subject: Comment fiji2 SNF 2012-07-25 11:07:18: precursor request Message-ID: 3DMAS for today or tomorrow please From mmrincon at snf.stanford.edu Wed Jul 25 11:18:05 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:18:05 -0700 Subject: Comment fiji2 SNF 2012-07-24 19:15:19: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Wed Jul 25 11:18:29 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:18:29 -0700 Subject: Comment fiji2 SNF 2012-07-25 09:49:15: precursor status Message-ID: incorrect From mmrincon at snf.stanford.edu Wed Jul 25 11:19:23 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:19:23 -0700 Subject: Comment fiji2 SNF 2012-07-25 11:19:22: precursor status Message-ID: (0) tmt (1) tdma-hf (bottle 1) (2) tma (bottle 1) (3) h2o From maxms at snf.stanford.edu Thu Jul 26 02:10:41 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 26 Jul 2012 02:10:41 -0700 Subject: Problem fiji2 SNF 2012-07-26 02:10:40: tray stuck on gate valve Message-ID: the tray was very difficult to get inside, but a few tries and pushing the tray on the arm I got it to go in. Taking out did not work, and the tray fell off the arm and is stuck on the gate valve mid-transfer, so I left it in the transfer state with the gate valve closed. From jprovine at snf.stanford.edu Thu Jul 26 10:08:20 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:08:20 -0700 Subject: Problem fiji2 SNF 2012-07-26 02:10:40: tray stuck on gate valve Message-ID: plate back on transfer arm. when taking the plate out of the chamber, remember to keep the plate raised until it clears the heater then lower it before you get to the end of travel. this avoids catching the plate on the heater and thus dropping it over the gate valve and by lowering it in time avoids hitting the plate agagainst the loadlock walls. From sipark at snf.stanford.edu Thu Jul 26 10:39:52 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:39:52 -0700 Subject: Comment fiji2 SNF 2012-07-26 10:39:52: Request precursors Message-ID: Aluminium & Titanium precursors From sipark at snf.stanford.edu Thu Jul 26 10:40:30 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:40:30 -0700 Subject: Comment fiji2 SNF 2012-07-26 10:40:30: Request precursors for Al and Ti Message-ID: From sipark at snf.stanford.edu Thu Jul 26 10:40:51 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:40:51 -0700 Subject: Comment fiji2 SNF 2012-07-26 10:40:51: Message-ID: From mmrincon at snf.stanford.edu Thu Jul 26 12:59:56 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 26 Jul 2012 12:59:56 -0700 Subject: Comment fiji2 SNF 2012-07-26 12:59:55: precursor status Message-ID: (0) tmt (1) tdma-hf (bottle 1) (2) tdma-pt (bottle 1) (3) h2o From mmrincon at snf.stanford.edu Thu Jul 26 13:00:04 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 26 Jul 2012 13:00:04 -0700 Subject: Comment fiji2 SNF 2012-07-25 11:19:22: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Thu Jul 26 13:08:29 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 26 Jul 2012 13:08:29 -0700 Subject: Comment fiji2 SNF 2012-07-26 10:40:51: Message-ID: From mmrincon at snf.stanford.edu Thu Jul 26 13:09:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 26 Jul 2012 13:09:07 -0700 Subject: Comment fiji2 SNF 2012-07-26 10:39:52: Request precursors Message-ID: housekeeping- only keeping one request in the queue! From ross at snf.stanford.edu Thu Jul 26 23:03:31 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Thu, 26 Jul 2012 23:03:31 -0700 Subject: Comment fiji2 SNF 2012-07-26 23:03:31: precursor request Message-ID: TMT for: 7/27 11am - 12am 7/31 2pm - 12am 8/1 10am - 2pm 8/2 5:30pm - 12am Thanks! From mmrincon at snf.stanford.edu Fri Jul 27 12:35:32 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 27 Jul 2012 12:35:32 -0700 Subject: Comment fiji2 SNF 2012-07-25 11:07:18: precursor request Message-ID: 3dmas installed From mmrincon at snf.stanford.edu Fri Jul 27 12:36:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 27 Jul 2012 12:36:07 -0700 Subject: Comment fiji2 SNF 2012-07-27 12:36:06: precursor status Message-ID: (0) tmt (1) 3dmas (2) pt (bottle 1) (3) h2o From mmrincon at snf.stanford.edu Fri Jul 27 12:36:15 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 27 Jul 2012 12:36:15 -0700 Subject: Comment fiji2 SNF 2012-07-26 12:59:55: precursor status Message-ID: outdated From ross at snf.stanford.edu Fri Jul 27 13:09:10 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Fri, 27 Jul 2012 13:09:10 -0700 Subject: Problem fiji2 SNF 2012-07-27 13:09:09: plate won't go into chamber Message-ID: plate is too low to go into chamber with a wafer on it From mmrincon at snf.stanford.edu Fri Jul 27 18:10:58 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 27 Jul 2012 18:10:58 -0700 Subject: Problem fiji2 SNF 2012-07-27 13:09:09: plate won't go into chamber Message-ID: adjusted plate, now will go in with 2 wafers From jprovine at snf.stanford.edu Sat Jul 28 13:37:20 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 13:37:20 -0700 Subject: Comment fiji2 SNF 2012-07-27 12:36:06: precursor status Message-ID: changed From jprovine at snf.stanford.edu Sat Jul 28 13:38:13 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 13:38:13 -0700 Subject: Comment fiji2 SNF 2012-07-28 13:38:13: precursor status Message-ID: 0 empty 1 TDMA-Ti (bottle 1) 2 3DMAS 3 H20 From jprovine at snf.stanford.edu Sat Jul 28 13:42:12 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 13:42:12 -0700 Subject: Problem fiji2 SNF 2012-07-28 13:42:11: heater 19 no response Message-ID: heater 19, the jacket heater for precursor 2 has no response. i've switched heater jackets but 3 different ones all showed no response. same jacket son heater 18 line shown fine response. most likely issue is blown fuse for that control line in ebox. will have to be addressed later. currently precursor for line 2 requires no heat so everything is fine. From kokab at snf.stanford.edu Sat Jul 28 17:46:42 2012 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sat, 28 Jul 2012 17:46:42 -0700 Subject: Comment fiji2 SNF 2012-07-28 17:46:41: precursor request Message-ID: TMA for these following times: Sun Jul 29th: 4am-10:30am Mon Jul30th: 12am-6am Wed Aug1st: 3am-6:30am thanks, From jprovine at snf.stanford.edu Sat Jul 28 20:23:02 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 20:23:02 -0700 Subject: Comment fiji2 SNF 2012-07-26 10:40:30: Request precursors for Al and Ti Message-ID: request met. From jprovine at snf.stanford.edu Sat Jul 28 20:23:43 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 20:23:43 -0700 Subject: Comment fiji2 SNF 2012-07-28 13:38:13: precursor status Message-ID: changed From jprovine at snf.stanford.edu Sat Jul 28 20:23:56 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 20:23:56 -0700 Subject: Comment fiji2 SNF 2012-07-28 20:23:56: precursor status Message-ID: water tma tdma-ti 3dmas From kokab at snf.stanford.edu Sat Jul 28 22:13:07 2012 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sat, 28 Jul 2012 22:13:07 -0700 Subject: Shutdown fiji2 SNF 2012-07-28 22:13:06: plate is stuck inside Message-ID: From jprovine at snf.stanford.edu Sat Jul 28 23:53:44 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 28 Jul 2012 23:53:44 -0700 Subject: Shutdown fiji2 SNF 2012-07-28 22:13:06: plate is stuck inside Message-ID: release use From sipark at snf.stanford.edu Sun Jul 29 00:37:15 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Sun, 29 Jul 2012 00:37:15 -0700 Subject: Comment fiji2 SNF 2012-07-29 00:37:15: The sample holder is still stuck at the gate valve. Message-ID: I tried to sove the problem, but couldn't because the load lock venting failed. From jprovine at snf.stanford.edu Sun Jul 29 13:10:04 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 29 Jul 2012 13:10:04 -0700 Subject: Comment fiji2 SNF 2012-07-28 20:23:56: precursor status Message-ID: changed From jprovine at snf.stanford.edu Sun Jul 29 13:10:36 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 29 Jul 2012 13:10:36 -0700 Subject: Comment fiji2 SNF 2012-07-29 13:10:36: precursor status Message-ID: water tma (2) tmt (Sn) TDMA-Ti (1) From jprovine at snf.stanford.edu Sun Jul 29 13:12:11 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 29 Jul 2012 13:12:11 -0700 Subject: Comment fiji2 SNF 2012-07-29 00:37:15: The sample holder is still stuck at the gate valve. Message-ID: retrieved and reset. never shut the gate valve with the plate (or anything else) in the way. this is very dangerous for two reasons: 1) the chamber is not sufficiently sealed from the loadlock and thus the rest of the world and 2) it could mechanically and permanently damage the gate valve. From efriend at snf.stanford.edu Mon Jul 30 09:11:59 2012 From: efriend at snf.stanford.edu (efriend at snf.stanford.edu) Date: Mon, 30 Jul 2012 09:11:59 -0700 Subject: Comment fiji2 SNF 2012-07-30 09:11:58: precursor request 7/30 Message-ID: Hi - please keep Al precursor on Fiji2 for my time slot today. Thanks! From fpurkl at snf.stanford.edu Mon Jul 30 10:45:43 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Mon, 30 Jul 2012 10:45:43 -0700 Subject: Comment fiji2 SNF 2012-07-30 10:45:42: Pt precursor request Message-ID: please install a Pt and an Al2O3 precursor for my reservations on 08/01, 08/02, 08/03 mornings. Thanks! From jprovine at snf.stanford.edu Mon Jul 30 11:09:34 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 30 Jul 2012 11:09:34 -0700 Subject: Comment fiji2 SNF 2012-07-29 13:10:36: precursor status Message-ID: changed From jprovine at snf.stanford.edu Mon Jul 30 11:09:53 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 30 Jul 2012 11:09:53 -0700 Subject: Comment fiji2 SNF 2012-07-30 11:09:52: precursor status Message-ID: water tma tmSn tdma-zr (2) From ross at snf.stanford.edu Mon Jul 30 14:14:34 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Mon, 30 Jul 2012 14:14:34 -0700 Subject: Comment fiji2 SNF 2012-07-30 14:14:33: precursor request Message-ID: For 7/31: 3DMAS 2-6pm TMT 6pm-12am Thanks! :) From yiwu at snf.stanford.edu Tue Jul 31 09:23:11 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Tue, 31 Jul 2012 09:23:11 -0700 Subject: Shutdown fiji2 SNF 2012-07-31 09:23:11: plate dropped Message-ID: When I use fiji2 this morning, plate dropped in the middle of main chamber and load lock. I am really sorry for my mistake. I will contact maintenance staff immediately. From mmrincon at snf.stanford.edu Tue Jul 31 10:02:10 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Tue, 31 Jul 2012 10:02:10 -0700 Subject: Shutdown fiji2 SNF 2012-07-31 09:23:11: plate dropped Message-ID: recovered. required adjustment of plate height as well. From yiwu at snf.stanford.edu Tue Jul 31 11:53:04 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Tue, 31 Jul 2012 11:53:04 -0700 Subject: Comment fiji2 SNF 2012-07-31 11:53:04: extract arm with caution Message-ID: When I extract the arm, I noticed the pins to hold plate were detaching the plate at main gate. Try to insert and extract again. From jprovine at stanford.edu Tue Jul 31 11:56:40 2012 From: jprovine at stanford.edu (J Provine) Date: Tue, 31 Jul 2012 11:56:40 -0700 Subject: Comment fiji2 SNF 2012-07-31 11:53:04: extract arm with caution In-Reply-To: <20120731185304.BC1182E93A@smtp-unencrypted.stanford.edu> References: <20120731185304.BC1182E93A@smtp-unencrypted.stanford.edu> Message-ID: This means you need to lift the plate higher as you extract it. Once it is out, you can gently push the plate back to fully engage the pins. Use clean wipes to keep the plate clean and your fingers unburned. J On Tuesday, July 31, 2012, wrote: > When I extract the arm, I noticed the pins to hold plate were detaching > the plate at main gate. Try to insert and extract again. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From paik at snf.stanford.edu Tue Jul 31 13:13:57 2012 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Tue, 31 Jul 2012 13:13:57 -0700 Subject: Comment fiji2 SNF 2012-07-31 13:13:56: Pt precursor request Message-ID: Please install the Pt precursor for my reservation on Aug 7th 1pm From jprovine at snf.stanford.edu Tue Jul 31 13:55:54 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 31 Jul 2012 13:55:54 -0700 Subject: Comment fiji2 SNF 2012-07-30 14:14:33: precursor request Message-ID: challenge met! From jprovine at snf.stanford.edu Tue Jul 31 13:56:21 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 31 Jul 2012 13:56:21 -0700 Subject: Comment fiji2 SNF 2012-07-30 09:11:58: precursor request 7/30 Message-ID: challenge met From jprovine at snf.stanford.edu Tue Jul 31 13:56:38 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 31 Jul 2012 13:56:38 -0700 Subject: Comment fiji2 SNF 2012-07-28 17:46:41: precursor request Message-ID: challenge met From jprovine at snf.stanford.edu Tue Jul 31 13:57:38 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 31 Jul 2012 13:57:38 -0700 Subject: Problem fiji2 SNF 2012-07-16 17:46:06: PEALD Pt deposition problem Message-ID: PEALD Pt deposition successful with heater jacket at slightly higher temperature. recommend 80C for Pt precursor jacket heater temp on fiji2. will be done by staff. From jprovine at snf.stanford.edu Tue Jul 31 13:58:02 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 31 Jul 2012 13:58:02 -0700 Subject: Comment fiji2 SNF 2012-07-30 11:09:52: precursor status Message-ID: changed From jprovine at snf.stanford.edu Tue Jul 31 13:58:16 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 31 Jul 2012 13:58:16 -0700 Subject: Comment fiji2 SNF 2012-07-31 13:58:16: precursor status Message-ID: water tma tmt 3dmas