From jprovine at snf.stanford.edu Fri Jun 1 10:57:27 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 1 Jun 2012 10:57:27 -0700 Subject: Shutdown fiji2 SNF 2012-05-29 16:49:27: Problem with transfer arm Message-ID: plate returned to arm. deflectors needed adjustment again. be careful with the transfer arm. no sudden movements. From apal at snf.stanford.edu Tue Jun 5 02:31:35 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Tue, 5 Jun 2012 02:31:35 -0700 Subject: Problem fiji2 SNF 2012-06-05 02:31:35: HfO2 precursor Message-ID: Hf pulses came out small and the thickness was smaller than expected. From joem at snf.stanford.edu Tue Jun 5 15:54:12 2012 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Tue, 5 Jun 2012 15:54:12 -0700 Subject: Comment fiji2 SNF 2012-06-05 15:54:12: Ti precursor req'd Friday Message-ID: I need the Ti precursor for a Friday 1 PM tool time. Thanks, Joe From ntayebi at snf.stanford.edu Wed Jun 6 10:36:27 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Wed, 6 Jun 2012 10:36:27 -0700 Subject: Comment fiji2 SNF 2012-06-06 10:36:26: Keep Si precursor until Friday evening Message-ID: I would like to do another SiO2 deposition run on Friday morning and I'm requesting keep Si precursor in place. Thanks Noureddine From jprovine at snf.stanford.edu Thu Jun 7 15:54:41 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:54:41 -0700 Subject: Comment fiji2 SNF 2012-06-05 15:54:12: Ti precursor req'd Friday Message-ID: retracted From jprovine at snf.stanford.edu Thu Jun 7 15:54:51 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:54:51 -0700 Subject: Comment fiji2 SNF 2012-06-06 10:36:26: Keep Si precursor until Friday evening Message-ID: confirmed From jprovine at snf.stanford.edu Thu Jun 7 18:14:38 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 7 Jun 2012 18:14:38 -0700 Subject: Problem fiji2 SNF 2012-06-05 02:31:35: HfO2 precursor Message-ID: qual ran for 100 cycles yields 112A over 2 wafers with3A nonuniformity. hafnia in spec. From jprovine at snf.stanford.edu Sat Jun 9 01:45:54 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 9 Jun 2012 01:45:54 -0700 Subject: Comment fiji2 SNF 2012-05-26 15:04:21: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Sat Jun 9 01:46:13 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 9 Jun 2012 01:46:13 -0700 Subject: Comment fiji2 SNF 2012-06-09 01:46:11: precursor status Message-ID: water tdma-hf tdma-Ti tma From maxms at snf.stanford.edu Sat Jun 9 12:07:39 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sat, 9 Jun 2012 12:07:39 -0700 Subject: Comment fiji2 SNF 2012-06-09 12:07:39: running standby Message-ID: I've noticed this now a couple times - i think it is probably more useful to run the stand-by recipe rather than just loading it... From maxms at snf.stanford.edu Sat Jun 9 19:37:18 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sat, 9 Jun 2012 19:37:18 -0700 Subject: Comment fiji2 SNF 2012-06-09 19:37:18: possibly release times tomorrow Message-ID: Hey guys, Unfortunately, a good friend of mine, Asm L., has gotten very sick today. I'm going to try to use the rest of my time this weekend, but if she stays ill, then I probably won't be able to be in fab at all this weekend. If I don't hear back from her doctors by tomorrow morning (she's a mute), then I'll email the list and someone else can grab my time. Regards, Max From jprovine at snf.stanford.edu Sun Jun 10 07:36:40 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 10 Jun 2012 07:36:40 -0700 Subject: Comment fiji2 SNF 2012-06-09 01:46:11: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Sun Jun 10 07:36:56 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 10 Jun 2012 07:36:56 -0700 Subject: Comment fiji2 SNF 2012-06-10 07:36:56: precursor status Message-ID: water tdma-ti tdma-hf tma From jprovine at snf.stanford.edu Mon Jun 11 16:30:21 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 11 Jun 2012 16:30:21 -0700 Subject: Comment fiji2 SNF 2012-06-10 07:36:56: precursor status Message-ID: in error From jprovine at snf.stanford.edu Mon Jun 11 16:30:52 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 11 Jun 2012 16:30:52 -0700 Subject: Comment fiji2 SNF 2012-06-11 16:30:51: precursor status Message-ID: water tdma-hf 3dma-Si tma From jprovine at snf.stanford.edu Tue Jun 12 17:09:12 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 12 Jun 2012 17:09:12 -0700 Subject: Comment fiji2 SNF 2012-06-11 16:30:51: precursor status Message-ID: logged From jprovine at snf.stanford.edu Tue Jun 12 17:09:31 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 12 Jun 2012 17:09:31 -0700 Subject: Comment fiji2 SNF 2012-06-12 17:09:31: precursor status Message-ID: tma tdma-hf water Pt From jprovine at snf.stanford.edu Thu Jun 14 09:52:55 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 14 Jun 2012 09:52:55 -0700 Subject: Comment fiji2 SNF 2012-06-12 17:09:31: precursor status Message-ID: water tma tdma-hf 3dmas (sio2) NOTE: a Pt precursor is using heater 19 to stay hot since the precursor does not need the heater From jprovine at snf.stanford.edu Thu Jun 14 09:53:20 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 14 Jun 2012 09:53:20 -0700 Subject: Comment fiji2 SNF 2012-06-09 19:37:18: possibly release times tomorrow Message-ID: outs From jprovine at snf.stanford.edu Thu Jun 14 09:54:11 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 14 Jun 2012 09:54:11 -0700 Subject: Comment fiji2 SNF 2012-06-14 09:54:11: precursor status Message-ID: water tdma-hf tma 3dmas (SiO2) note: heater 19 is keeping a Pt precursor hot since 3dmas does not need a heater. From kavehm at snf.stanford.edu Thu Jun 14 16:25:09 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Thu, 14 Jun 2012 16:25:09 -0700 Subject: Problem fiji2 SNF 2012-06-14 16:25:08: 3DMAS empty Message-ID: Got 20 cycles, now it's empty. From jprovine at snf.stanford.edu Fri Jun 15 17:48:41 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Jun 2012 17:48:41 -0700 Subject: Comment fiji2 SNF 2012-06-14 09:54:11: precursor status Message-ID: done From jprovine at snf.stanford.edu Fri Jun 15 17:49:00 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Jun 2012 17:49:00 -0700 Subject: Comment fiji2 SNF 2012-06-09 12:07:39: running standby Message-ID: noted From jprovine at snf.stanford.edu Fri Jun 15 17:49:23 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Jun 2012 17:49:23 -0700 Subject: Comment fiji2 SNF 2012-06-15 17:49:22: precursor status Message-ID: water tma tdma-hf tdma-zr From apal at snf.stanford.edu Sat Jun 16 14:37:33 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sat, 16 Jun 2012 14:37:33 -0700 Subject: Problem fiji2 SNF 2012-06-16 14:37:33: Could not load sample Message-ID: Seems like the main gate is still blocking the arm. could not load sample or put the plate back in the chamber From jprovine at snf.stanford.edu Mon Jun 18 00:18:59 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 18 Jun 2012 00:18:59 -0700 Subject: Problem fiji2 SNF 2012-06-16 14:37:33: Could not load sample Message-ID: repositioned loading arm end effector. load is same as before...tray is picked up at neutral level and delivered at high point. From jprovine at snf.stanford.edu Mon Jun 18 00:19:19 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 18 Jun 2012 00:19:19 -0700 Subject: Problem fiji2 SNF 2012-06-14 16:25:08: 3DMAS empty Message-ID: refilled. From jprovine at snf.stanford.edu Mon Jun 18 09:45:57 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 18 Jun 2012 09:45:57 -0700 Subject: Comment fiji2 SNF 2012-06-15 17:49:22: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Mon Jun 18 09:46:12 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 18 Jun 2012 09:46:12 -0700 Subject: Comment fiji2 SNF 2012-06-18 09:46:12: precursor status Message-ID: water tma tdma-zr Pt From jprovine at snf.stanford.edu Tue Jun 19 10:01:54 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 19 Jun 2012 10:01:54 -0700 Subject: Comment fiji2 SNF 2012-06-18 09:46:12: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Tue Jun 19 10:02:13 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 19 Jun 2012 10:02:13 -0700 Subject: Comment fiji2 SNF 2012-06-19 10:02:12: precursor status Message-ID: water tma 3dmas tdma-ti From jprovine at snf.stanford.edu Thu Jun 21 00:38:33 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 00:38:33 -0700 Subject: Comment fiji2 SNF 2012-06-19 10:02:12: precursor status Message-ID: logged From jprovine at snf.stanford.edu Thu Jun 21 00:38:49 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 00:38:49 -0700 Subject: Comment fiji2 SNF 2012-06-21 00:38:49: precursor status Message-ID: water tdma-Ti Pt tma From jprovine at snf.stanford.edu Thu Jun 21 16:59:37 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 16:59:37 -0700 Subject: Comment fiji2 SNF 2012-06-21 00:38:49: precursor status Message-ID: logged From jprovine at snf.stanford.edu Thu Jun 21 16:59:58 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 16:59:58 -0700 Subject: Comment fiji2 SNF 2012-06-21 16:59:58: precursor status Message-ID: water 3dmas tdma-ti tma From jprovine at snf.stanford.edu Thu Jun 21 19:29:34 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 19:29:34 -0700 Subject: Comment fiji2 SNF 2012-06-21 16:59:58: precursor status Message-ID: logged From jprovine at snf.stanford.edu Thu Jun 21 19:30:08 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 21 Jun 2012 19:30:08 -0700 Subject: Comment fiji2 SNF 2012-06-21 19:30:07: precursor status Message-ID: water tdma-hf 3dmas (Si) tma From jprovine at snf.stanford.edu Sat Jun 23 07:03:04 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 23 Jun 2012 07:03:04 -0700 Subject: Shutdown fiji2 SNF 2012-06-23 07:03:03: transfer arm bearrings unaligned Message-ID: during normal usage yesterday, the bearrings on the transfer arm seem to have "skipped" on the extension arm. this is causing frequent rotation of the arm and plate making loading impossible. the arm will have to be taken apart and reset. discussion for transfer arm repair/improvement in the future are on going. From zzp at snf.stanford.edu Mon Jun 25 15:40:46 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Mon, 25 Jun 2012 15:40:46 -0700 Subject: Comment fiji2 SNF 2012-06-25 15:40:46: precursor request for TiN deposition Message-ID: my reservation for that is on Wed. night. Thanks a lot! From jprovine at snf.stanford.edu Mon Jun 25 16:22:45 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 25 Jun 2012 16:22:45 -0700 Subject: Shutdown fiji2 SNF 2012-06-23 07:03:03: transfer arm bearrings unaligned Message-ID: michelle, j, and john shott disassembled and reassembled the transfer arm to rid the system of unnecessary rotations. in the process the height adjustments were made. a new substrate holder was also inserted. the old holder had peeling films and is being sent out for cleaning. currently the system loads similarly to before, but please be careful. longer term strategies for transfer arm improvement are being discussed with cambridge nanotech this week. From jprovine at snf.stanford.edu Mon Jun 25 16:23:23 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 25 Jun 2012 16:23:23 -0700 Subject: Comment fiji2 SNF 2012-06-21 19:30:07: precursor status Message-ID: logged From jprovine at snf.stanford.edu Mon Jun 25 16:23:53 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 25 Jun 2012 16:23:53 -0700 Subject: Comment fiji2 SNF 2012-06-25 16:23:53: precursor status Message-ID: water tma tdma-hf tmt (tetramethyl-tin) From wmtang at snf.stanford.edu Mon Jun 25 21:01:32 2012 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Mon, 25 Jun 2012 21:01:32 -0700 Subject: Problem fiji2 SNF 2012-06-25 21:01:32: Samples cannot be loaded as the plate cannot be taken out Message-ID: From jprovine at snf.stanford.edu Tue Jun 26 12:10:25 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jun 2012 12:10:25 -0700 Subject: Problem fiji2 SNF 2012-06-25 21:01:32: Samples cannot be loaded as the plate cannot be taken out Message-ID: substrate loaded and loaded without incident. next reservation please arrange for j or michelle to be around to assist as needed. From jprovine at snf.stanford.edu Tue Jun 26 12:10:44 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jun 2012 12:10:44 -0700 Subject: Comment fiji2 SNF 2012-06-25 16:23:53: precursor status Message-ID: logged From jprovine at snf.stanford.edu Tue Jun 26 12:10:59 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jun 2012 12:10:59 -0700 Subject: Comment fiji2 SNF 2012-06-26 12:10:58: precursor status Message-ID: water tma tdma-hf tdma-ti From mmrincon at snf.stanford.edu Wed Jun 27 14:15:06 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 27 Jun 2012 14:15:06 -0700 Subject: Comment fiji2 SNF 2012-06-25 15:40:46: precursor request for TiN deposition Message-ID: request met From mmrincon at snf.stanford.edu Wed Jun 27 14:15:17 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 27 Jun 2012 14:15:17 -0700 Subject: Comment fiji2 SNF 2012-06-26 12:10:58: precursor status Message-ID: outdated From mmrincon at snf.stanford.edu Wed Jun 27 14:15:51 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Wed, 27 Jun 2012 14:15:51 -0700 Subject: Comment fiji2 SNF 2012-06-27 14:15:50: precursor status Message-ID: h2o tdma-hf tma pt From ross at snf.stanford.edu Wed Jun 27 23:05:09 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Wed, 27 Jun 2012 23:05:09 -0700 Subject: Problem fiji2 SNF 2012-06-27 23:05:09: Cannot get plate back into chamber Message-ID: Plate seems to be hitting heater, even on the transfer arm's highest position. Was not a problem for the prior two runs. Wiped down plate before the last attempted run because of visible particles. Was careful not to apply too much pressure so as to not push the plate down, but may not have been careful enough. From mmrincon at snf.stanford.edu Thu Jun 28 11:21:28 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Thu, 28 Jun 2012 11:21:28 -0700 Subject: Problem fiji2 SNF 2012-06-27 23:05:09: Cannot get plate back into chamber Message-ID: arm adjusted. From ross at snf.stanford.edu Fri Jun 29 10:50:48 2012 From: ross at snf.stanford.edu (ross at snf.stanford.edu) Date: Fri, 29 Jun 2012 10:50:48 -0700 Subject: Shutdown fiji2 SNF 2012-06-29 10:50:47: Plate is wobbly, arm and plate keep getting stuck Message-ID: Likely to happen again if used From mmrincon at snf.stanford.edu Fri Jun 29 15:33:29 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Fri, 29 Jun 2012 15:33:29 -0700 Subject: Shutdown fiji2 SNF 2012-06-29 10:50:47: Plate is wobbly, arm and plate keep getting stuck Message-ID: checked it out, will let it back up for users