Problem fiji2 SNF 2012-06-05 02:31:35: HfO2 precursor

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Thu Jun 7 18:14:38 PDT 2012


qual ran for 100 cycles yields 112A over 2 wafers with3A nonuniformity.  hafnia in spec.




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