From jprovine at snf.stanford.edu Thu Mar 1 09:36:40 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 1 Mar 2012 09:36:40 -0800 Subject: Comment fiji2 SNF 2012-03-01 09:36:40: fiji2 return status update Message-ID: all parts are returned...currently troubleshooting system. pumps ok. power issues SOLVED to be done: base pressure check heater check ald line check baseline process qual check From jprovine at snf.stanford.edu Thu Mar 1 16:19:09 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 1 Mar 2012 16:19:09 -0800 Subject: Comment fiji2 SNF 2012-03-01 16:19:09: fiji2 return status update Message-ID: reinstalling manifold 3.2.2012 post repairs. followed by base pressure check ald line check process qual check. From jprovine at snf.stanford.edu Sat Mar 3 14:51:06 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 3 Mar 2012 14:51:06 -0800 Subject: Comment fiji2 SNF 2012-03-03 14:51:06: fiji2 return status update Message-ID: reinstalling manifold 3.2.2012 post repairs COMPLETED base pressure check COMPLETED currently in baking out chamber ald line check monday process qual check monday From jprovine at snf.stanford.edu Tue Mar 6 09:44:45 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 09:44:45 -0800 Subject: Comment fiji2 SNF 2012-03-06 09:44:44: fiji2 return status update Message-ID: reinstalling manifold 3.2.2012 post repairs COMPLETED base pressure check COMPLETED currently in baking out chamber COMPLETED ald line check COMPLETED process qual check ONGOING - thermal hafnia - plasma hafnia if either recipe passes qual the machine will be returned to users today (tuesday the 6th) From jprovine at snf.stanford.edu Tue Mar 6 09:45:06 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 09:45:06 -0800 Subject: Shutdown fiji2 SNF 2011-12-12 17:35:08: shutdown for holiday rennovation Message-ID: returned from renovation and all systems ok. process qual check in progress From jhaydon at snf.stanford.edu Tue Mar 6 12:09:13 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:09:13 -0800 Subject: Problem fiji2 SNF 2011-12-12 15:31:42: no NH3 Message-ID: NH3 back on line From jprovine at snf.stanford.edu Tue Mar 6 20:02:54 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:02:54 -0800 Subject: Problem fiji2 SNF 2011-11-01 06:02:50: line 3 offline until VCR coupling can be replaced Message-ID: line 3 fixed over shutdown. currently running with H2O on that line. From jprovine at snf.stanford.edu Tue Mar 6 20:03:08 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:03:08 -0800 Subject: Comment fiji2 SNF 2011-12-09 11:50:58: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Tue Mar 6 20:03:15 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:03:15 -0800 Subject: Comment fiji2 SNF 2012-02-29 17:01:50: coming back from shutdown Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:03:20 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:03:20 -0800 Subject: Comment fiji2 SNF 2012-03-01 09:36:40: fiji2 return status update Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:03:26 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:03:26 -0800 Subject: Comment fiji2 SNF 2012-03-01 16:19:09: fiji2 return status update Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:03:33 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:03:33 -0800 Subject: Comment fiji2 SNF 2012-03-03 14:51:06: fiji2 return status update Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:03:40 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:03:40 -0800 Subject: Comment fiji2 SNF 2012-03-06 09:44:44: fiji2 return status update Message-ID: logged From jprovine at snf.stanford.edu Tue Mar 6 20:05:38 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:05:38 -0800 Subject: Problem fiji2 SNF 2012-03-06 20:05:37: qual out of spec - return to service Message-ID: fiji2 is clear for use. hafnia qual showed etch rate that is too high too pass. this will be checked further immediately, but i'm releasing the tool to users who should be aware that hafnia thermal and plasma demonstrate high uniformity with a dep rate of ~1.3A/cycle. From jprovine at snf.stanford.edu Tue Mar 6 20:05:59 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 Mar 2012 20:05:59 -0800 Subject: Comment fiji2 SNF 2012-03-06 20:05:59: precursor status Message-ID: water tma tdma-hf From maxms at snf.stanford.edu Wed Mar 7 00:05:53 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 7 Mar 2012 00:05:53 -0800 Subject: Shutdown fiji2 SNF 2012-03-07 00:05:52: pressure Message-ID: pressure at 410torr.. 2 poor. scared, stranded wafers are inside. if you find them, please return them to the two wafer cassettes they call home besides the ALD. they are very sensitive, so please be very nice with them, smile, etc., and please DO NOT mention anything about their sister and brother... From jprovine at snf.stanford.edu Wed Mar 7 10:42:16 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 7 Mar 2012 10:42:16 -0800 Subject: Shutdown fiji2 SNF 2012-03-07 00:05:52: pressure Message-ID: pump was powered off. not clear why this happened so i'll be watching for pump issues over the next several runs. retrieved users orphaned wafers and put them in their home. currently rerunning thermal hafnia qual to check accelerated deposition rate. machine available to use when i finish qual (wednesday afternoon). From jprovine at snf.stanford.edu Wed Mar 7 17:26:04 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 7 Mar 2012 17:26:04 -0800 Subject: Problem fiji2 SNF 2012-03-06 20:05:37: qual out of spec - return to service Message-ID: qual in spec on retest From jprovine at snf.stanford.edu Mon Mar 12 15:29:26 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 12 Mar 2012 15:29:26 -0700 Subject: Comment fiji2 SNF 2012-03-06 20:05:59: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Mon Mar 12 15:29:49 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 12 Mar 2012 15:29:49 -0700 Subject: Comment fiji2 SNF 2012-03-12 15:29:48: precursor status Message-ID: water tdma-Hf TMA Ru From jprovine at snf.stanford.edu Tue Mar 13 09:58:59 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Mar 2012 09:58:59 -0700 Subject: Comment fiji2 SNF 2012-03-12 15:29:48: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Tue Mar 13 09:59:52 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Mar 2012 09:59:52 -0700 Subject: Comment fiji2 SNF 2012-03-13 09:59:51: precursor status Message-ID: water tma tdma-Hf 3dma-Si (SiO2) no changes anticipated through thursday From kavehm at snf.stanford.edu Wed Mar 14 07:22:42 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Wed, 14 Mar 2012 07:22:42 -0700 Subject: Comment fiji2 SNF 2012-03-14 07:22:42: sio2 precursor out Message-ID: Ran out of SiO2 precursor 3/4 way through run From jprovine at snf.stanford.edu Wed Mar 14 10:31:55 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Mar 2012 10:31:55 -0700 Subject: Comment fiji2 SNF 2012-03-14 10:31:54: precursor status Message-ID: water tma tdma-Hf tdma-Zr From jprovine at snf.stanford.edu Wed Mar 14 10:32:07 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Mar 2012 10:32:07 -0700 Subject: Comment fiji2 SNF 2012-03-14 07:22:42: sio2 precursor out Message-ID: new precursor ordered and on the way From jprovine at snf.stanford.edu Wed Mar 14 10:32:18 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Mar 2012 10:32:18 -0700 Subject: Comment fiji2 SNF 2012-03-13 09:59:51: precursor status Message-ID: outdated From hazeghi at snf.stanford.edu Sat Mar 24 04:51:11 2012 From: hazeghi at snf.stanford.edu (hazeghi at snf.stanford.edu) Date: Sat, 24 Mar 2012 04:51:11 -0700 Subject: Comment fiji2 SNF 2012-03-24 04:51:11: Increased Hf precursor T Message-ID: Hf precursor was not pulsing at 75C, increased T to 77C to run process and returned to 75C. From apal at snf.stanford.edu Sun Mar 25 16:21:27 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sun, 25 Mar 2012 16:21:27 -0700 Subject: Comment fiji2 SNF 2012-03-25 16:21:26: Dust particle on plate Message-ID: There was some colored particles on the plate. May be peeling from the plate.... From hazeghi at snf.stanford.edu Tue Mar 27 01:15:15 2012 From: hazeghi at snf.stanford.edu (hazeghi at snf.stanford.edu) Date: Tue, 27 Mar 2012 01:15:15 -0700 Subject: Problem fiji2 SNF 2012-03-27 01:15:15: Control consule problem Message-ID: The control software had issued a message (screen shot is on the desktop) and was not in Ready mode. Attempted to restart the software but the operator mode requires password, so the consule software is not running at the moment. From jprovine at snf.stanford.edu Tue Mar 27 09:23:52 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 27 Mar 2012 09:23:52 -0700 Subject: Problem fiji2 SNF 2012-03-27 01:15:15: Control consule problem Message-ID: users should know the operator password. system restarted and currently heating up. From jprovine at snf.stanford.edu Tue Mar 27 09:24:32 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 27 Mar 2012 09:24:32 -0700 Subject: Comment fiji2 SNF 2012-03-25 16:21:26: Dust particle on plate Message-ID: noted. no dust particles seen when investigated. you can wipe up dust particles with clean wipe. be careful as the plate is hot. From jprovine at snf.stanford.edu Wed Mar 28 10:25:05 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 28 Mar 2012 10:25:05 -0700 Subject: Comment fiji2 SNF 2012-03-28 10:25:05: Hf precursor temperature increased Message-ID: increasing Hf precursor temperature to 78C because of continued issues with low pulses. From jprovine at snf.stanford.edu Thu Mar 29 17:25:55 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 29 Mar 2012 17:25:55 -0700 Subject: Shutdown fiji2 SNF 2012-03-29 17:25:54: control software issue Message-ID: cannot connect to ebox with control software. system found powered off twice in 2 days and now it will not establish connection. cambridge nanotech has been informed. From jprovine at snf.stanford.edu Fri Mar 30 10:48:31 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 30 Mar 2012 10:48:31 -0700 Subject: Shutdown fiji2 SNF 2012-03-29 17:25:54: control software issue Message-ID: connection issue solved. all users, refrain from jostling and moving the labtop needlessly. From jprovine at snf.stanford.edu Fri Mar 30 14:09:34 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 30 Mar 2012 14:09:34 -0700 Subject: Comment fiji2 SNF 2012-03-14 10:31:54: precursor status Message-ID: logged From jprovine at snf.stanford.edu Fri Mar 30 14:10:15 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 30 Mar 2012 14:10:15 -0700 Subject: Comment fiji2 SNF 2012-03-30 14:10:14: precursor status Message-ID: water, tma, tdma-hf, (3Me)MeCp-Pt