Problem fiji2 SNF 2012-03-06 20:05:37: qual out of spec - return to service

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Tue Mar 6 20:05:38 PST 2012


fiji2 is clear for use.
hafnia qual showed etch rate that is too high too pass.  this will be checked further immediately, but i'm releasing the tool to users who should be aware that hafnia thermal and plasma demonstrate high uniformity with a dep rate of ~1.3A/cycle.  




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