Shutdown fiji2 SNF 2012-03-07 00:05:52: pressure

maxms at maxms at
Wed Mar 7 00:05:53 PST 2012

pressure at 410torr.. 2 poor. scared, stranded wafers are inside.  if you find them, please return them to the two wafer cassettes they call home besides the ALD.  they are very sensitive, so please be  very nice with them, smile, etc., and please DO NOT mention anything about their sister and brother...

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