Shutdown fiji2 SNF 2012-05-18 02:16:14: wafer broke

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Fri May 18 12:26:33 PDT 2012


wafer pulverized to powder.
vacuumed loadlock and transfer area.
substrate holder/transfer arm pushed way out of spec.  could not load substrate holder...reset magnetic positioner and successfully loaded/unloaded substrate.
be very careful with substrate loading and unloading.




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