Comment fiji2 SNF 2012-05-22 10:58:45: TMA looks empty

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Tue May 22 10:58:45 PDT 2012


I didn't see any pulses for a PEALD Al2O3 recipe and ellipsometry didn't show a deposited film after 100cyc.




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