From jprovine at stanford.edu Fri Feb 1 04:36:45 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Fri, 1 Feb 2013 04:36:45 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-25 17:21:43: precursor status Message-ID: <12246624.5.1359722205928.JavaMail.coral@snc-coraldb.stanford.edu> outdated From jprovine at stanford.edu Fri Feb 1 04:37:07 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Fri, 1 Feb 2013 04:37:07 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-01 04:37:07: precursor status Message-ID: <11708956.6.1359722227984.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (bottle Si120412) 4- TDMA-Hf (bottle 120312) 5-Pt (bottle pt2)- BOOST DISABLED From mmrincon at stanford.edu Fri Feb 1 16:55:13 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 1 Feb 2013 16:55:13 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-01 04:37:07: precursor status Message-ID: <15232650.19.1359766513201.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Fri Feb 1 16:55:42 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 1 Feb 2013 16:55:42 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-01 16:55:41: precursor status Message-ID: <28399546.20.1359766542270.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (bottle Si120412) 4- TDMA-Hf (bottle 120312) 5-Ru- BOOST DISABLED From anupama2 at stanford.edu Mon Feb 4 14:21:16 2013 From: anupama2 at stanford.edu (anupama2 at stanford.edu) Date: Mon, 4 Feb 2013 14:21:16 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-04 14:21:15: 2/6 source Pt Message-ID: <28012015.41.1360016476504.JavaMail.coral@snc-coraldb.stanford.edu> Reservation on 2/6 Source Pt From bucklesm at stanford.edu Tue Feb 5 09:15:28 2013 From: bucklesm at stanford.edu (bucklesm at stanford.edu) Date: Tue, 5 Feb 2013 09:15:28 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-05 09:15:28: unloading problem Message-ID: <8547281.53.1360084528548.JavaMail.coral@snc-coraldb.stanford.edu> I tried to unload the previous users sample, but as the plate was coming out something happened, and it did not come out (perhaps it dropped?) Now the loading fork does not move up and down as you rotate. From jhaydon at stanford.edu Tue Feb 5 13:04:24 2013 From: jhaydon at stanford.edu (jhaydon at stanford.edu) Date: Tue, 5 Feb 2013 13:04:24 -0800 (PST) Subject: [fiji2-pcs] Shutdown fiji2 SNF 2013-02-05 13:04:24: load arm jammed Message-ID: <28618205.59.1360098264851.JavaMail.coral@snc-coraldb.stanford.edu> From jhaydon at stanford.edu Wed Feb 6 14:14:53 2013 From: jhaydon at stanford.edu (jhaydon at stanford.edu) Date: Wed, 6 Feb 2013 14:14:53 -0800 (PST) Subject: [fiji2-pcs] Shutdown fiji2 SNF 2013-02-05 13:04:24: load arm jammed Message-ID: <5273976.86.1360188893699.JavaMail.coral@snc-coraldb.stanford.edu> load arm fixed From jhaydon at stanford.edu Wed Feb 6 14:15:17 2013 From: jhaydon at stanford.edu (jhaydon at stanford.edu) Date: Wed, 6 Feb 2013 14:15:17 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-05 09:15:28: unloading problem Message-ID: <31808566.87.1360188917759.JavaMail.coral@snc-coraldb.stanford.edu> load arm fixed From noureddine.tayebi at intel.com Wed Feb 6 17:02:00 2013 From: noureddine.tayebi at intel.com (noureddine.tayebi at intel.com) Date: Wed, 6 Feb 2013 17:02:00 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-06 17:02:00: If you could keep the Si precursor for my run tomorrow it would be great! thanks Message-ID: <17799985.89.1360198920570.JavaMail.coral@snc-coraldb.stanford.edu> From jouyang at stanford.edu Wed Feb 6 18:08:32 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Wed, 6 Feb 2013 18:08:32 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-06 18:08:32: Feb 7, 9, Ru, Ti Message-ID: <29908324.90.1360202912467.JavaMail.coral@snc-coraldb.stanford.edu> thanks From mmrincon at stanford.edu Fri Feb 8 13:25:38 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 8 Feb 2013 13:25:38 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-04 14:21:15: 2/6 source Pt Message-ID: <22053779.11.1360358738953.JavaMail.coral@snc-coraldb.stanford.edu> request shifted to later date From mmrincon at stanford.edu Fri Feb 8 13:25:50 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 8 Feb 2013 13:25:50 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-06 17:02:00: If you could keep the Si precursor for my run tomorrow it would be great! thanks Message-ID: <16357758.12.1360358750991.JavaMail.coral@snc-coraldb.stanford.edu> request met From alsune at stanford.edu Fri Feb 8 13:42:26 2013 From: alsune at stanford.edu (alsune at stanford.edu) Date: Fri, 8 Feb 2013 13:42:26 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-08 13:42:26: Request for SrO precursor Message-ID: <32415766.14.1360359746980.JavaMail.coral@snc-coraldb.stanford.edu> Dear Michelle, Would it be possible to get the SrO precursor with the boost on for Feb 14th? Best, Wooshik From insun at stanford.edu Fri Feb 8 14:25:53 2013 From: insun at stanford.edu (insun at stanford.edu) Date: Fri, 8 Feb 2013 14:25:53 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-08 14:25:52: Request for TiN precursor on Feb 10 Message-ID: <25425762.16.1360362353148.JavaMail.coral@snc-coraldb.stanford.edu> TiN precursor on Feb 10 From mmrincon at stanford.edu Fri Feb 8 15:14:47 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 8 Feb 2013 15:14:47 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-08 15:14:47: precursor status Message-ID: <7695628.19.1360365287984.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- Pt (bottle 2) 4- TDMA-Hf (bottle 120312) 5-Ru- BOOST DISABLED From mmrincon at stanford.edu Fri Feb 8 15:14:54 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 8 Feb 2013 15:14:54 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-01 16:55:41: precursor status Message-ID: <16501709.20.1360365294010.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Fri Feb 8 15:15:02 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 8 Feb 2013 15:15:02 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-06 18:08:32: Feb 7, 9, Ru, Ti Message-ID: <18782452.21.1360365302039.JavaMail.coral@snc-coraldb.stanford.edu> request met From anupama2 at stanford.edu Sat Feb 9 12:14:05 2013 From: anupama2 at stanford.edu (anupama2 at stanford.edu) Date: Sat, 9 Feb 2013 12:14:05 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-09 12:14:05: Chuck temperature heater #15 out of range Message-ID: <8818851.27.1360440845352.JavaMail.coral@snc-coraldb.stanford.edu> From insun at stanford.edu Sun Feb 10 15:36:38 2013 From: insun at stanford.edu (insun at stanford.edu) Date: Sun, 10 Feb 2013 15:36:38 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-10 15:36:37: Chuck temperature does not fall to 250C Message-ID: <3240140.30.1360539398868.JavaMail.coral@snc-coraldb.stanford.edu> TiN deposition recipe requires 250C but the chuck temperature does not go down from 257C. Process could not start. From sipark at stanford.edu Sun Feb 10 18:00:24 2013 From: sipark at stanford.edu (sipark at stanford.edu) Date: Sun, 10 Feb 2013 18:00:24 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-10 18:00:24: Pulse for Ti didn't come out. Message-ID: <10782651.31.1360548024925.JavaMail.coral@snc-coraldb.stanford.edu> Please take a look.. Thanks, From mmrincon at stanford.edu Mon Feb 11 09:52:48 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 09:52:48 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-10 18:00:24: Pulse for Ti didn't come out. Message-ID: <7491345.45.1360605168276.JavaMail.coral@snc-coraldb.stanford.edu> Ti cylinder is not very old. Need more data to verify empty cylinder. From mmrincon at stanford.edu Mon Feb 11 09:53:18 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 09:53:18 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-10 15:36:37: Chuck temperature does not fall to 250C Message-ID: <13267044.46.1360605198349.JavaMail.coral@snc-coraldb.stanford.edu> problem is RTD issue From gmatus at snf.stanford.edu Mon Feb 11 11:48:03 2013 From: gmatus at snf.stanford.edu (gmatus at snf.stanford.edu) Date: Mon, 11 Feb 2013 11:48:03 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 11:48:02: Request for SiO2 Message-ID: <9216536.52.1360612083110.JavaMail.coral@snc-coraldb.stanford.edu> I would like to request SiO2 from 3DMAS for my reservation on Tuesday morning From jouyang at stanford.edu Mon Feb 11 14:44:24 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Mon, 11 Feb 2013 14:44:24 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 14:44:24: 2/11, 12, 13, Ti, Ru, Pt Message-ID: <17397168.64.1360622664213.JavaMail.coral@snc-coraldb.stanford.edu> thanks From mmrincon at stanford.edu Mon Feb 11 16:15:43 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 16:15:43 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-09 12:14:05: Chuck temperature heater #15 out of range Message-ID: <14034978.74.1360628143214.JavaMail.coral@snc-coraldb.stanford.edu> heater RTD ongoing issue From mmrincon at stanford.edu Mon Feb 11 16:15:58 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 16:15:58 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-08 14:25:52: Request for TiN precursor on Feb 10 Message-ID: <26290525.75.1360628158257.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Mon Feb 11 16:27:17 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 16:27:17 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 16:27:16: precursor status Message-ID: <1546175.76.1360628837613.JavaMail.coral@snc-coraldb.stanford.edu> 0- 3DMAS (SiOx precursor) (bottle 120412) 1- TDMA-Ti (bottle 101212) 2- DI 3- Pt (bottle 2) 4- TDMA-Hf (bottle 120312)- DISABLED DUE TO BOOST 5-Ru- BOOST ENABLED From mmrincon at stanford.edu Mon Feb 11 16:27:26 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 16:27:26 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 11:48:02: Request for SiO2 Message-ID: <9295627.77.1360628846644.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Mon Feb 11 16:27:35 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 16:27:35 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-08 15:14:47: precursor status Message-ID: <27941919.78.1360628855676.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Mon Feb 11 17:14:52 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 17:14:52 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 17:14:52: precursor status Message-ID: <22486317.79.1360631692297.JavaMail.coral@snc-coraldb.stanford.edu> 0- 3DMAS (SiOx precursor) (bottle 120412) 1- TDMA-Ti (bottle 101212) 2- DI 3- Pt (bottle 2) 4- TDMA-Hf (bottle 120312) 5-TMA (bottle 4) BOOST DISABLED From mmrincon at stanford.edu Mon Feb 11 17:14:59 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 11 Feb 2013 17:14:59 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 16:27:16: precursor status Message-ID: <16168765.80.1360631699325.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Tue Feb 12 15:00:44 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 12 Feb 2013 15:00:44 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-12 15:00:44: precursor status Message-ID: <19464533.61.1360710044851.JavaMail.coral@snc-coraldb.stanford.edu> 0- 3DMAS (SiOx precursor) (bottle 120412) 1- TDMA-Ti (bottle 101212) 2- DI 3- Pt (bottle 2) 4- TDMA-Hf (bottle 120312)- DISABLED DUE TO BOOST 5- Ru (bottle 1) BOOST ENABLED From mmrincon at stanford.edu Tue Feb 12 15:00:52 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 12 Feb 2013 15:00:52 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 17:14:52: precursor status Message-ID: <30678013.62.1360710052880.JavaMail.coral@snc-coraldb.stanford.edu> outdated From sipark at stanford.edu Wed Feb 13 09:36:07 2013 From: sipark at stanford.edu (sipark at stanford.edu) Date: Wed, 13 Feb 2013 09:36:07 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-13 09:36:07: Request for Al2O3 & TiN precursors on Feb. 14th Message-ID: <5589744.66.1360776967789.JavaMail.coral@snc-coraldb.stanford.edu> Thanks. From jprovine at stanford.edu Thu Feb 14 07:12:19 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Thu, 14 Feb 2013 07:12:19 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-11 14:44:24: 2/11, 12, 13, Ti, Ru, Pt Message-ID: <23051223.81.1360854739902.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Thu Feb 14 14:00:30 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Feb 2013 14:00:30 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-13 09:36:07: Request for Al2O3 & TiN precursors on Feb. 14th Message-ID: <11287962.95.1360879230457.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Thu Feb 14 14:00:38 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Feb 2013 14:00:38 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-08 13:42:26: Request for SrO precursor Message-ID: <20141820.96.1360879238485.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Thu Feb 14 14:01:33 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Feb 2013 14:01:33 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-14 14:01:33: precursor status Message-ID: <23551488.97.1360879293607.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA 1- TDMA-Ti (bottle 101212) 2- DI 3- Pt (bottle 2) 4- TDMA-Hf (bottle 120312)- DISABLED DUE TO BOOST ENABLED 5- Sr (bottle 1) BOOST ENABLED From mmrincon at stanford.edu Thu Feb 14 14:01:43 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Feb 2013 14:01:43 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-12 15:00:44: precursor status Message-ID: <26182165.98.1360879303639.JavaMail.coral@snc-coraldb.stanford.edu> outdated From sipark at stanford.edu Fri Feb 15 00:20:54 2013 From: sipark at stanford.edu (sipark at stanford.edu) Date: Fri, 15 Feb 2013 00:20:54 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 00:20:53: Please do not take TMA & TDMA-Ti precursors out until this week..end Message-ID: <24495392.105.1360916454673.JavaMail.coral@snc-coraldb.stanford.edu> From mmrincon at stanford.edu Fri Feb 15 10:13:16 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 15 Feb 2013 10:13:16 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 10:13:16: precursor status Message-ID: <14061041.109.1360951996450.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA 1- TDMA-Ti (bottle 101212) 2- DI 3- Pt (bottle 2) 4- TDMA-Hf (bottle 120312) 5- Sr (bottle 1) BOOST DISABLED From mmrincon at stanford.edu Fri Feb 15 10:13:22 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 15 Feb 2013 10:13:22 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-14 14:01:33: precursor status Message-ID: <4265127.110.1360952002475.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mcalarrudo at rambus.com Fri Feb 15 12:38:28 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Fri, 15 Feb 2013 12:38:28 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 12:38:28: I will need Hafnia for my reservation Message-ID: <18519494.114.1360960708669.JavaMail.coral@snc-coraldb.stanford.edu> From mcalarrudo at rambus.com Fri Feb 15 12:39:06 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Fri, 15 Feb 2013 12:39:06 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 12:39:06: I will need hafnia for my Thursday Reservation Message-ID: <30656718.115.1360960746794.JavaMail.coral@snc-coraldb.stanford.edu> From gmatus at snf.stanford.edu Fri Feb 15 14:36:44 2013 From: gmatus at snf.stanford.edu (gmatus at snf.stanford.edu) Date: Fri, 15 Feb 2013 14:36:44 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 14:36:44: SiO2 request Message-ID: <23813616.123.1360967804765.JavaMail.coral@snc-coraldb.stanford.edu> I would like to request 3DMS for SiO2 for my reservation this Saturday. Thanks. From mmrincon at stanford.edu Fri Feb 15 14:57:03 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 15 Feb 2013 14:57:03 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 00:20:53: Please do not take TMA & TDMA-Ti precursors out until this week..end Message-ID: <30675250.126.1360969023199.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Fri Feb 15 14:57:13 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 15 Feb 2013 14:57:13 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 14:36:44: SiO2 request Message-ID: <13842994.127.1360969033232.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Fri Feb 15 14:57:55 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 15 Feb 2013 14:57:55 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 14:57:54: precursor status Message-ID: <1430853.128.1360969075326.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (SiOx precursor) (bottle 110712) 4- TDMA-Hf (bottle 120312) 5- Ru (bottle 1) BOOST DISABLED From mmrincon at stanford.edu Fri Feb 15 14:58:02 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 15 Feb 2013 14:58:02 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 10:13:16: precursor status Message-ID: <16916897.129.1360969082353.JavaMail.coral@snc-coraldb.stanford.edu> outdated From jouyang at stanford.edu Fri Feb 15 23:45:33 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Fri, 15 Feb 2013 23:45:33 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-15 23:45:32: gate got stuck Message-ID: <3102483.136.1361000733592.JavaMail.coral@snc-coraldb.stanford.edu> the message "transfer arm extended" is there and just won't disappear not matter what i do.... now the program is not responding... left my sample inside the loadlock. From anupama2 at stanford.edu Sun Feb 17 13:53:09 2013 From: anupama2 at stanford.edu (anupama2 at stanford.edu) Date: Sun, 17 Feb 2013 13:53:09 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-17 13:53:08: Source Message-ID: <29042692.142.1361137989295.JavaMail.coral@snc-coraldb.stanford.edu> 2/24 Reservation Al2O3 and Pt From jprovine at stanford.edu Mon Feb 18 14:15:42 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Mon, 18 Feb 2013 14:15:42 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-15 23:45:32: gate got stuck Message-ID: <22473703.146.1361225742902.JavaMail.coral@snc-coraldb.stanford.edu> system found in ok situation. evidently fixed by other user. From jprovine at stanford.edu Tue Feb 19 09:53:16 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Tue, 19 Feb 2013 09:53:16 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 12:38:28: I will need Hafnia for my reservation Message-ID: <14580869.159.1361296396155.JavaMail.coral@snc-coraldb.stanford.edu> message unclear From jouyang at stanford.edu Tue Feb 19 13:48:24 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Tue, 19 Feb 2013 13:48:24 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-19 13:48:23: 2/20, 21, 22 Ru, Ti Message-ID: <23434854.172.1361310504271.JavaMail.coral@snc-coraldb.stanford.edu> From gmatus at snf.stanford.edu Tue Feb 19 14:46:53 2013 From: gmatus at snf.stanford.edu (gmatus at snf.stanford.edu) Date: Tue, 19 Feb 2013 14:46:53 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-19 14:46:53: Si Message-ID: <7985928.174.1361314013226.JavaMail.coral@snc-coraldb.stanford.edu> I would like to request 3DMAS for Si deposition for 2/20 From mmrincon at stanford.edu Wed Feb 20 10:30:29 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Wed, 20 Feb 2013 10:30:29 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-19 14:46:53: Si Message-ID: <20055805.26.1361385029508.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Wed Feb 20 17:00:20 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Wed, 20 Feb 2013 17:00:20 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-20 17:00:20: precursor status Message-ID: <1789183.35.1361408420569.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (SiOx precursor) (bottle 110712) 4- TDMA-Hf (bottle 120312)- DISABLED DUE TO BOOST 5- Ru (bottle 1) BOOST ENABLED From mmrincon at stanford.edu Wed Feb 20 17:00:34 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Wed, 20 Feb 2013 17:00:34 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 14:57:54: precursor status Message-ID: <23210513.36.1361408434608.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Thu Feb 21 11:11:55 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 21 Feb 2013 11:11:55 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-15 12:39:06: I will need hafnia for my Thursday Reservation Message-ID: <14556342.22.1361473915394.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Thu Feb 21 11:12:30 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 21 Feb 2013 11:12:30 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-21 11:12:30: precursor status Message-ID: <3767530.23.1361473950476.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (SiOx precursor) (bottle 110712) 4- TDMA-Hf (bottle 120312) 5- Ru (bottle 1) BOOST DISABLED From mmrincon at stanford.edu Thu Feb 21 11:12:38 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 21 Feb 2013 11:12:38 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-20 17:00:20: precursor status Message-ID: <20942098.24.1361473958504.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Fri Feb 22 11:38:54 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 22 Feb 2013 11:38:54 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-19 13:48:23: 2/20, 21, 22 Ru, Ti Message-ID: <10217824.48.1361561934373.JavaMail.coral@snc-coraldb.stanford.edu> request met From jprovine at stanford.edu Sun Feb 24 11:58:40 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Sun, 24 Feb 2013 11:58:40 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-17 13:53:08: Source Message-ID: <10661571.76.1361735920797.JavaMail.coral@snc-coraldb.stanford.edu> request met From jprovine at stanford.edu Sun Feb 24 11:58:57 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Sun, 24 Feb 2013 11:58:57 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-21 11:12:30: precursor status Message-ID: <26075305.77.1361735937843.JavaMail.coral@snc-coraldb.stanford.edu> outdated From jprovine at stanford.edu Sun Feb 24 11:59:21 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Sun, 24 Feb 2013 11:59:21 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-24 11:59:21: precursor status Message-ID: <26780448.78.1361735961902.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (SiOx precursor) (bottle 110712) 4- TDMA-Hf (bottle 120312) 5- Pt (bottle PT2) BOOST DISABLED From anupama2 at stanford.edu Sun Feb 24 16:01:27 2013 From: anupama2 at stanford.edu (anupama2 at stanford.edu) Date: Sun, 24 Feb 2013 16:01:27 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-24 16:01:26: MFC valve 5 not working Message-ID: <26798970.81.1361750487451.JavaMail.coral@snc-coraldb.stanford.edu> Could not deposit Platinum. No peaks during pulse step. From jprovine at stanford.edu Mon Feb 25 10:09:58 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Mon, 25 Feb 2013 10:09:58 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-02-24 16:01:26: MFC valve 5 not working Message-ID: <10329821.2.1361815798609.JavaMail.coral@snc-coraldb.stanford.edu> there is no MFC valve 5 on fiji2. ALD valve 5 was tested and is performing without error. please provide recipe specification and measuremetns for your failed run and we can try to find out what might be the issue. j From jouyang at stanford.edu Mon Feb 25 10:19:46 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Mon, 25 Feb 2013 10:19:46 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-25 10:19:46: 2/25, 27, Ti, Ru (w boost) Message-ID: <19424378.4.1361816386788.JavaMail.coral@snc-coraldb.stanford.edu> From anupama2 at stanford.edu Mon Feb 25 16:03:17 2013 From: anupama2 at stanford.edu (anupama2 at stanford.edu) Date: Mon, 25 Feb 2013 16:03:17 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-25 16:03:17: Precursor 2/28 reservation Message-ID: <31896064.30.1361836997892.JavaMail.coral@snc-coraldb.stanford.edu> Al2O3/Pt Please do not plug in Pt on valve #5. It was not working on Sunday (2/24). I looked at the valve during deposition on the back side of the equipment. When it pulsed we saw a red light. From jprovine at stanford.edu Wed Feb 27 18:17:19 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Wed, 27 Feb 2013 18:17:19 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-24 11:59:21: precursor status Message-ID: <14833678.2.1362017839306.JavaMail.coral@snc-coraldb.stanford.edu> outdated From jprovine at stanford.edu Wed Feb 27 18:18:06 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Wed, 27 Feb 2013 18:18:06 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-27 18:18:05: precursor status Message-ID: <19016590.3.1362017886410.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (SiOx precursor) (bottle 110712) 4- TDMA-Hf (bottle 120312) (not available until boost disabled) 5- Ru (bottle PT2) BOOST ENABLED From jprovine at stanford.edu Wed Feb 27 18:18:15 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Wed, 27 Feb 2013 18:18:15 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-25 10:19:46: 2/25, 27, Ti, Ru (w boost) Message-ID: <28710248.4.1362017895440.JavaMail.coral@snc-coraldb.stanford.edu> request met From chieh at slac.stanford.edu Wed Feb 27 21:27:39 2013 From: chieh at slac.stanford.edu (chieh at slac.stanford.edu) Date: Wed, 27 Feb 2013 21:27:39 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-02-27 21:27:38: Pt precursor needed on 3/1 reservation Message-ID: <9628550.0.1362029259877.JavaMail.coral@snc-coraldb.stanford.edu>