[fiji2-pcs] Problem fiji2 SNF 2013-02-10 15:36:37: Chuck temperature does not fall to 250C

insun at stanford.edu insun at stanford.edu
Sun Feb 10 15:36:38 PST 2013

TiN deposition recipe requires 250C but the chuck temperature does not go down from 257C. Process could not start.

More information about the fiji2-pcs mailing list