[fiji2-pcs] Problem fiji2 SNF 2013-02-10 15:36:37: Chuck temperature does not fall to 250C

insun at stanford.edu insun at stanford.edu
Sun Feb 10 15:36:38 PST 2013

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TiN deposition recipe requires 250C but the chuck temperature does not go down from 257C. Process could not start.

Previous message: [fiji2-pcs] Comment fiji2 SNF 2013-02-09 12:14:05: Chuck temperature heater #15 out of range
Next message: [fiji2-pcs] Problem fiji2 SNF 2013-02-10 15:36:37: Chuck temperature does not fall to 250C
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