From mcalarrudo at rambus.com Fri Jan 11 10:37:06 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Fri, 11 Jan 2013 10:37:06 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-11 10:37:05: Message-ID: <28213247.48.1357929426137.JavaMail.coral@snc-coraldb.stanford.edu> From mcalarrudo at rambus.com Fri Jan 11 10:39:07 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Fri, 11 Jan 2013 10:39:07 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-11 10:39:07: Message-ID: <21102299.49.1357929547432.JavaMail.coral@snc-coraldb.stanford.edu> Please make sure Hafnia precursor is installed for my tool time on Monday. From jprovine at stanford.edu Fri Jan 11 12:09:41 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Fri, 11 Jan 2013 12:09:41 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2012-12-09 08:31:54: chuck temp is NC Message-ID: <30040639.51.1357934981125.JavaMail.coral@snc-coraldb.stanford.edu> this problem recurred intermittently in december but has not returned post-shutdown. please watch if this happens again and we can schedule more detailed repairs. From gmatus at snf.stanford.edu Sun Jan 13 23:44:45 2013 From: gmatus at snf.stanford.edu (gmatus at snf.stanford.edu) Date: Sun, 13 Jan 2013 23:44:45 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-13 23:44:45: precursor request Message-ID: <32953059.2.1358149485926.JavaMail.coral@snc-coraldb.stanford.edu> I would like to request Al2O3 and SiO2 for my reservation on Monday evening. From mmrincon at stanford.edu Mon Jan 14 09:40:03 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 09:40:03 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 09:40:02: precursor status Message-ID: <24862836.3.1358185203580.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- TDMA-Zr (bottle 1) 4- TDMA-Hf (bottle 3) 5- Y (bottle weight=377.43g)- BOOST DISABLED From mmrincon at stanford.edu Mon Jan 14 09:40:11 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 09:40:11 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-09 10:45:06: precursor status Message-ID: <30740434.4.1358185211609.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Mon Jan 14 09:40:21 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 09:40:21 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-11 10:37:05: Message-ID: <14866520.5.1358185221641.JavaMail.coral@snc-coraldb.stanford.edu> na From mmrincon at stanford.edu Mon Jan 14 09:40:38 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 09:40:38 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-11 10:39:07: Message-ID: <24006109.6.1358185238688.JavaMail.coral@snc-coraldb.stanford.edu> request met From dasgupta at stanford.edu Mon Jan 14 13:17:16 2013 From: dasgupta at stanford.edu (dasgupta at stanford.edu) Date: Mon, 14 Jan 2013 13:17:16 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 13:17:16: Precursor request for 1/15 Message-ID: <31231651.16.1358198236459.JavaMail.coral@snc-coraldb.stanford.edu> Ti and Pt, 1/15 4-8 pm From jouyang at stanford.edu Mon Jan 14 16:21:33 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Mon, 14 Jan 2013 16:21:33 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 16:21:32: Precursor Request 1/15/13 Message-ID: <24188025.29.1358209293372.JavaMail.coral@snc-coraldb.stanford.edu> TiN, 1/15/13 8pm-2am From mmrincon at stanford.edu Mon Jan 14 16:43:46 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 16:43:46 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 16:43:45: precursor status Message-ID: <12655349.31.1358210626015.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- TDMA-Zr (bottle 1) 4- TDMA-Hf (bottle 3) 5-Pt- (bottle 2)- BOOST DISABLED From mmrincon at stanford.edu Mon Jan 14 16:43:52 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 16:43:52 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 09:40:02: precursor status Message-ID: <9695615.32.1358210632039.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Mon Jan 14 17:05:48 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 17:05:48 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 17:05:48: precursor status Message-ID: <20317533.33.1358211948636.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (bottle Si120412) 4- TDMA-Hf (bottle 3) 5-Pt- (bottle 2)- BOOST DISABLED From mmrincon at stanford.edu Mon Jan 14 17:05:54 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 17:05:54 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 16:43:45: precursor status Message-ID: <23809882.34.1358211954663.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mmrincon at stanford.edu Mon Jan 14 17:06:10 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 14 Jan 2013 17:06:10 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-13 23:44:45: precursor request Message-ID: <1504362.35.1358211970707.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Wed Jan 16 09:13:47 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Wed, 16 Jan 2013 09:13:47 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 13:17:16: Precursor request for 1/15 Message-ID: <18333439.26.1358356427010.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Wed Jan 16 09:13:56 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Wed, 16 Jan 2013 09:13:56 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 16:21:32: Precursor Request 1/15/13 Message-ID: <19437813.27.1358356436041.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Wed Jan 16 09:14:08 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Wed, 16 Jan 2013 09:14:08 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-10 16:11:30: Precursor request(Al & TI) on Wed(16th) reservation Message-ID: <21953712.28.1358356448077.JavaMail.coral@snc-coraldb.stanford.edu> request met From sipark at stanford.edu Wed Jan 16 14:39:36 2013 From: sipark at stanford.edu (sipark at stanford.edu) Date: Wed, 16 Jan 2013 14:39:36 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-16 14:39:36: Ti precursor signal is very low Message-ID: <1934804.32.1358375976840.JavaMail.coral@snc-coraldb.stanford.edu> Sheet resistance (TiN) used to be micro range, but now i get one order higher resistance. Please check the status of Ti precursor. Thanks, From qran at stanford.edu Thu Jan 17 20:16:48 2013 From: qran at stanford.edu (qran at stanford.edu) Date: Thu, 17 Jan 2013 20:16:48 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-17 20:16:47: thermal HfO2 problem Message-ID: <14869148.10.1358482608641.JavaMail.coral@snc-coraldb.stanford.edu> Ran standard thermal HfO2 recipe for 250 cycles. The film thickness was 5A (by wollam). The height of water pulses are much lower than Hf pulse. From qran at stanford.edu Thu Jan 17 21:45:07 2013 From: qran at stanford.edu (qran at stanford.edu) Date: Thu, 17 Jan 2013 21:45:07 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-17 21:45:06: Message-ID: <23868310.13.1358487907290.JavaMail.coral@snc-coraldb.stanford.edu> please ignore my previous comment. I forgot to change the recipe. That's why the deposition failed. Sorry. From mmrincon at stanford.edu Fri Jan 18 09:17:21 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 18 Jan 2013 09:17:21 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-16 14:39:36: Ti precursor signal is very low Message-ID: <20762714.17.1358529441119.JavaMail.coral@snc-coraldb.stanford.edu> spoke with sipark- he will verify his film. precursor bottle is pretty new (opened up 10/10/12) From mmrincon at stanford.edu Fri Jan 18 09:17:28 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 18 Jan 2013 09:17:28 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-17 20:16:47: thermal HfO2 problem Message-ID: <16938738.18.1358529448146.JavaMail.coral@snc-coraldb.stanford.edu> as per user From mmrincon at stanford.edu Fri Jan 18 09:17:34 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 18 Jan 2013 09:17:34 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-17 21:45:06: Message-ID: <21904417.19.1358529454171.JavaMail.coral@snc-coraldb.stanford.edu> as per user From mmrincon at stanford.edu Fri Jan 18 10:15:31 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 18 Jan 2013 10:15:31 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-18 10:15:30: ALD valve 1 Message-ID: <1002899.21.1358532931043.JavaMail.coral@snc-coraldb.stanford.edu> In response to detailed data commented by Sung Il, the Ti precursor was checked out. ALD valve1 was sticking. Cycled multiple times with no cylinder attached and after several pulses the valve started working again. Ti precursor cylinder 101012 was re-attached and precursor pulses are now visible. From mmrincon at stanford.edu Fri Jan 18 12:15:23 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 18 Jan 2013 12:15:23 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-18 12:15:22: precursor status Message-ID: <15816624.23.1358540123245.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (bottle Si120412) 4- TDMA-Hf (bottle 120312) 5-Pt- (bottle 2)- BOOST DISABLED From mmrincon at stanford.edu Fri Jan 18 12:15:30 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 18 Jan 2013 12:15:30 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-14 17:05:48: precursor status Message-ID: <31790308.24.1358540130271.JavaMail.coral@snc-coraldb.stanford.edu> outdated From sipark at stanford.edu Sat Jan 19 23:59:51 2013 From: sipark at stanford.edu (sipark at stanford.edu) Date: Sat, 19 Jan 2013 23:59:51 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-19 23:59:51: Software suddenly didn't work. Message-ID: <19168644.37.1358668791763.JavaMail.coral@snc-coraldb.stanford.edu> I htried to restart the program, but it required password for logon. Please take a look. Thanks, From jprovine at stanford.edu Sun Jan 20 10:19:26 2013 From: jprovine at stanford.edu (J Provine) Date: Sun, 20 Jan 2013 10:19:26 -0800 Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-19 23:59:51: Software suddenly didn't work. In-Reply-To: <19168644.37.1358668791763.JavaMail.coral@snc-coraldb.stanford.edu> References: <19168644.37.1358668791763.JavaMail.coral@snc-coraldb.stanford.edu> Message-ID: all users for the system should know the password for logging to the system as part of their training. j On Sat, Jan 19, 2013 at 11:59 PM, wrote: > I htried to restart the program, but it required password for logon. > Please take a look. > Thanks, > _______________________________________________ > fiji2-pcs mailing list > fiji2-pcs at snf.stanford.edu > http://snf.stanford.edu/mailman/listinfo/fiji2-pcs > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcalarrudo at rambus.com Mon Jan 21 12:41:41 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Mon, 21 Jan 2013 12:41:41 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-01-21 12:41:40: Fiji2 Message-ID: <28986901.43.1358800901710.JavaMail.coral@snc-coraldb.stanford.edu> The chuck is reading 0 and NC although I set the chuck to 250C. I don't know what this means or how to recover from this. sent an e/mail to Michelle. Wafers on the chuck are only test wafers. From mcalarrudo at rambus.com Mon Jan 21 14:17:50 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Mon, 21 Jan 2013 14:17:50 -0800 (PST) Subject: [fiji2-pcs] Shutdown fiji2 SNF 2013-01-21 14:17:50: Fiji2 Message-ID: <23051223.44.1358806670865.JavaMail.coral@snc-coraldb.stanford.edu> Problem with heater for wafer carrier, reads 0 and NC. From jouyang at stanford.edu Tue Jan 22 00:34:46 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Tue, 22 Jan 2013 00:34:46 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-22 00:34:45: Ti Ru 1/23 Message-ID: <5589094.47.1358843686289.JavaMail.coral@snc-coraldb.stanford.edu> Could i please have Ti and Ru on Wed 1/23, Friday 1/15. thanks From mmrincon at stanford.edu Tue Jan 22 09:31:56 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 22 Jan 2013 09:31:56 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-19 23:59:51: Software suddenly didn't work. Message-ID: <4370804.51.1358875916913.JavaMail.coral@snc-coraldb.stanford.edu> resolved. From mmrincon at stanford.edu Tue Jan 22 09:41:09 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 22 Jan 2013 09:41:09 -0800 (PST) Subject: [fiji2-pcs] Shutdown fiji2 SNF 2013-01-21 14:17:50: Fiji2 Message-ID: <29594394.52.1358876469010.JavaMail.coral@snc-coraldb.stanford.edu> chuck heater now reading temperature From mmrincon at stanford.edu Tue Jan 22 09:41:22 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 22 Jan 2013 09:41:22 -0800 (PST) Subject: [fiji2-pcs] Problem fiji2 SNF 2013-01-21 12:41:40: Fiji2 Message-ID: <11315135.53.1358876482049.JavaMail.coral@snc-coraldb.stanford.edu> chuck heater now reading temperature From mmrincon at stanford.edu Tue Jan 22 09:41:39 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 22 Jan 2013 09:41:39 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-18 10:15:30: ALD valve 1 Message-ID: <4330320.54.1358876499095.JavaMail.coral@snc-coraldb.stanford.edu> logged. From mmrincon at stanford.edu Thu Jan 24 09:32:25 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 24 Jan 2013 09:32:25 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-22 00:34:45: Ti Ru 1/23 Message-ID: <31130861.4.1359048745227.JavaMail.coral@snc-coraldb.stanford.edu> Ti was available. Ru delayed. From jouyang at stanford.edu Thu Jan 24 14:36:38 2013 From: jouyang at stanford.edu (jouyang at stanford.edu) Date: Thu, 24 Jan 2013 14:36:38 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-24 14:36:37: 1/25 Ti, Ru, Hf request Message-ID: <10880742.7.1359066998302.JavaMail.coral@snc-coraldb.stanford.edu> From jprovine at stanford.edu Fri Jan 25 17:20:38 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Fri, 25 Jan 2013 17:20:38 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-24 14:36:37: 1/25 Ti, Ru, Hf request Message-ID: <14211340.12.1359163238503.JavaMail.coral@snc-coraldb.stanford.edu> request met From jprovine at stanford.edu Fri Jan 25 17:20:53 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Fri, 25 Jan 2013 17:20:53 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-18 12:15:22: precursor status Message-ID: <20271853.13.1359163253545.JavaMail.coral@snc-coraldb.stanford.edu> outdated From jprovine at stanford.edu Fri Jan 25 17:21:43 2013 From: jprovine at stanford.edu (jprovine at stanford.edu) Date: Fri, 25 Jan 2013 17:21:43 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-25 17:21:43: precursor status Message-ID: <21158020.14.1359163303656.JavaMail.coral@snc-coraldb.stanford.edu> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 101212) 2- DI 3- 3DMAS (bottle Si120412) 4- TDMA-Hf (bottle 120312) 5-Ru (bottle Ru1)- BOOST DISABLED From noureddine.tayebi at intel.com Wed Jan 30 16:08:36 2013 From: noureddine.tayebi at intel.com (noureddine.tayebi at intel.com) Date: Wed, 30 Jan 2013 16:08:36 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-30 16:08:35: Keep 3DMAS - need it for tomorrow's run Message-ID: <33017608.68.1359590916217.JavaMail.coral@snc-coraldb.stanford.edu> From mmrincon at stanford.edu Thu Jan 31 14:33:52 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 31 Jan 2013 14:33:52 -0800 (PST) Subject: [fiji2-pcs] Comment fiji2 SNF 2013-01-30 16:08:35: Keep 3DMAS - need it for tomorrow's run Message-ID: <25056201.2.1359671632210.JavaMail.coral@snc-coraldb.stanford.edu> request met