[fiji2-pcs] Comment fiji2 SNF 2013-01-16 14:39:36: Ti precursor signal is very low

sipark at stanford.edu sipark at stanford.edu
Wed Jan 16 14:39:36 PST 2013


Sheet resistance (TiN) used to be micro range, but now i get one order higher resistance. Please check the status of Ti precursor.
Thanks,


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