[fiji2-pcs] Comment fiji2 SNF 2013-01-17 20:16:47: thermal HfO2 problem

qran at stanford.edu qran at stanford.edu
Thu Jan 17 20:16:48 PST 2013


Ran standard thermal  HfO2 recipe for 250 cycles. The film thickness was 5A (by wollam).
The height of water pulses are much lower than Hf pulse. 


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