[fiji2-pcs] Comment fiji2 SNF 2013-01-18 10:15:30: ALD valve 1

mmrincon at stanford.edu mmrincon at stanford.edu
Fri Jan 18 10:15:31 PST 2013


In response to detailed data commented by Sung Il, the Ti precursor was checked out.  ALD valve1 was sticking.  Cycled multiple times with no cylinder attached and after several pulses the valve started working again.  Ti precursor cylinder 101012 was re-attached and precursor pulses are now visible.


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