Fiji2 Temperature

Kaveh Milaninia kavehm at ece.ucsb.edu
Mon Apr 30 13:29:29 PDT 2012


Can the final user tonight leave the system at the following temperatures
when they are done?

 

Chamber (heater 12-15): 150C

Valve and precursor lines: 110C

 

Thanks!

 

Kaveh

 

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