From pradeep.nataraj at gmail.com Sat Feb 2 11:52:25 2013 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sat, 2 Feb 2013 11:52:25 -0800 Subject: [fiji2] Removed long reservation on Sun Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Wed Feb 6 14:17:48 2013 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Wed, 6 Feb 2013 14:17:48 -0800 Subject: [fiji2] Fixed.. Message-ID: Hello Fiji users, Jim and I fixed it. Both Fiji1 and Fiji2 up and running. Pradeep -------------- next part -------------- An HTML attachment was scrubbed... URL: From noureddine.tayebi at intel.com Fri Feb 8 14:11:59 2013 From: noureddine.tayebi at intel.com (Tayebi, Noureddine) Date: Fri, 8 Feb 2013 22:11:59 +0000 Subject: [fiji2] won't be using my time this afternoon In-Reply-To: References: Message-ID: <9C7CCBBE-71D0-4B5A-B0E1-93995BC65192@intel.com> Hi all, I won't be using my time this afternoon. I don't have access to badger from where I am to cancel. So please go ahead and use my time slot. Thanks Noureddine Sent from my iPhone On Feb 6, 2013, at 2:18 PM, "Pradeep Nataraj" wrote: > Hello Fiji users, > > Jim and I fixed it. Both Fiji1 and Fiji2 up and running. > > Pradeep > _______________________________________________ > fiji1 mailing list > fiji1 at snf.stanford.edu > http://snf.stanford.edu/mailman/listinfo/fiji1 From sipark at stanford.edu Sun Feb 10 18:03:31 2013 From: sipark at stanford.edu (S.i Park) Date: Sun, 10 Feb 2013 18:03:31 -0800 (PST) Subject: [fiji2] Released reservation at 10:00pm Message-ID: <315991075.49291048.1360548211344.JavaMail.root@stanford.edu> From mmrincon at stanford.edu Mon Feb 11 09:51:28 2013 From: mmrincon at stanford.edu (Michelle Rincon) Date: Mon, 11 Feb 2013 09:51:28 -0800 Subject: [fiji2] Precursor concerns References: <10782651.31.1360548024925.JavaMail.coral@snc-coraldb.stanford.edu> Message-ID: <882B2D95-03AA-472E-B4BC-5F981D5B1884@stanford.edu> Hello Fiji users, I would like to remind you that if you are concerned that a precursor cylinder is out, please document in Badger with the number of cycles you ran and the measurement you used to determine that the deposition did not occur. Missing precursor peaks can be one indication of an empty cylinder but the Fiji chamber size is big enough that we don't always get a clear indication of the peak on the pressure readout. Make sure to also check your film after the deposition- in most cases your film is fine. If it is not, please document in the comment section and I will take a look! Thanks, Michelle --------------------------------------------- Michelle Rincon, PhD Process Staff Engineer Stanford Nanofabrication Facility (650)-725-0307 mmrincon at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From qran at stanford.edu Mon Feb 11 11:16:06 2013 From: qran at stanford.edu (Helen Qiushi Ran) Date: Mon, 11 Feb 2013 11:16:06 -0800 Subject: [fiji2] release from 4pm to 8pm (eom) Message-ID: <2EEE5B9E-B2F9-439F-B1B1-A7E268E26AF1@stanford.edu> Helen Qiushi Ran Ph.D. Candidate Department of Electrical Engineering, Stanford, CA, 94305 -------------- next part -------------- An HTML attachment was scrubbed... URL: From zzp at stanford.edu Tue Feb 12 23:45:12 2013 From: zzp at stanford.edu (Zhiping Zhang) Date: Tue, 12 Feb 2013 23:45:12 -0800 (PST) Subject: [fiji2] Released reservation tonight In-Reply-To: <315991075.49291048.1360548211344.JavaMail.root@stanford.edu> References: <315991075.49291048.1360548211344.JavaMail.root@stanford.edu> Message-ID: Very sorry for the late notice. Thanks, Zhiping From sipark at stanford.edu Fri Feb 15 00:15:38 2013 From: sipark at stanford.edu (S.i Park) Date: Fri, 15 Feb 2013 00:15:38 -0800 (PST) Subject: [fiji2] Released reservation at 12:00pm Message-ID: <1335184543.17250852.1360916138388.JavaMail.root@stanford.edu> Sorry for the late notice. From jprovine at stanford.edu Tue Feb 19 13:42:12 2013 From: jprovine at stanford.edu (J Provine) Date: Tue, 19 Feb 2013 13:42:12 -0800 Subject: [fiji2] reservations Message-ID: dear ald community, with the fijis very busy in terms of reservation, please announce to the list and delete reservations you will not be using. thanks j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jouyang at stanford.edu Tue Feb 19 19:58:03 2013 From: jouyang at stanford.edu (Joanie Ouyang) Date: Tue, 19 Feb 2013 19:58:03 -0800 (PST) Subject: [fiji2] FIJI2 free now until midnight (eom) Message-ID: <1063404553.2070998.1361332683397.JavaMail.root@stanford.edu> -Joanie Ouyang PhD Candidate, Materials Science and Engineering, Stanford University From gmatus at snf.stanford.edu Wed Feb 20 00:17:56 2013 From: gmatus at snf.stanford.edu (Gabriel Matus) Date: Wed, 20 Feb 2013 00:17:56 -0800 Subject: [fiji2] Fiji2 free 9 to 11am Message-ID: I was able to get an earlier time slot. From artyjamo at gmail.com Wed Feb 20 10:34:35 2013 From: artyjamo at gmail.com (Aleta Jamora) Date: Wed, 20 Feb 2013 10:34:35 -0800 Subject: [fiji2] Fiji 2 reservations released 11AM-1:30PM and 4:30PM-8:30PM Message-ID: Parts are not ready, I''ve released my reservations for today 11AM-1:30PM and 4:30PM-8:30PM -------------- next part -------------- An HTML attachment was scrubbed... URL: From steelxu at stanford.edu Wed Feb 20 18:04:24 2013 From: steelxu at stanford.edu (Xiaoqing Xu) Date: Wed, 20 Feb 2013 18:04:24 -0800 (PST) Subject: [fiji2] 10:30am-2:30pm released on Thursday Message-ID: <1216315902.2961326.1361412264574.JavaMail.root@stanford.edu> From jprovine at stanford.edu Thu Feb 21 09:17:06 2013 From: jprovine at stanford.edu (J Provine) Date: Thu, 21 Feb 2013 09:17:06 -0800 Subject: [fiji2] fiji2 free until 10:30 Message-ID: done early -------------- next part -------------- An HTML attachment was scrubbed... URL: From audet at stanford.edu Thu Feb 21 13:59:52 2013 From: audet at stanford.edu (Ross Audet) Date: Thu, 21 Feb 2013 13:59:52 -0800 (PST) Subject: [fiji2] fiji2 released Friday 7:30-11:30AM Message-ID: <741693839.3655415.1361483992511.JavaMail.root@stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From steelxu at stanford.edu Thu Feb 21 14:16:17 2013 From: steelxu at stanford.edu (Xiaoqing Xu) Date: Thu, 21 Feb 2013 14:16:17 -0800 (PST) Subject: [fiji2] fiji2 released Friday 3:30pm-7:30pm Message-ID: <1891045818.3671114.1361484977028.JavaMail.root@stanford.edu> From jprovine at stanford.edu Thu Feb 21 14:18:41 2013 From: jprovine at stanford.edu (J Provine) Date: Thu, 21 Feb 2013 14:18:41 -0800 Subject: [fiji2] fiji2 released Friday 3:30pm-7:30pm In-Reply-To: <1891045818.3671114.1361484977028.JavaMail.root@stanford.edu> References: <1891045818.3671114.1361484977028.JavaMail.root@stanford.edu> Message-ID: taken. thanks, j On Thu, Feb 21, 2013 at 2:16 PM, Xiaoqing Xu wrote: > > _______________________________________________ > fiji2 mailing list > fiji2 at snf.stanford.edu > http://snf.stanford.edu/mailman/listinfo/fiji2 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jouyang at stanford.edu Thu Feb 21 17:14:54 2013 From: jouyang at stanford.edu (Joanie Ouyang) Date: Thu, 21 Feb 2013 17:14:54 -0800 (PST) Subject: [fiji2] FIJI2 released 8:30pm to tomorrow morning (eom) Message-ID: <1391606402.3812867.1361495694409.JavaMail.root@stanford.edu> -Joanie Ouyang PhD Candidate, Materials Science and Engineering, Stanford University From artyjamo at gmail.com Fri Feb 22 09:20:11 2013 From: artyjamo at gmail.com (Aleta Jamora) Date: Fri, 22 Feb 2013 09:20:11 -0800 Subject: [fiji2] 11AM reservation released Message-ID: Parts are not ready, 11AM reservation is released -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrshakya at stanford.edu Fri Feb 22 17:39:12 2013 From: jrshakya at stanford.edu (Jyotindra Shakya) Date: Fri, 22 Feb 2013 17:39:12 -0800 (PST) Subject: [fiji2] released time from 19:30 to 0:00 eom Message-ID: <1657111525.10454659.1361583552693.JavaMail.root@stanford.edu> From luckys at stanford.edu Sun Feb 24 23:14:58 2013 From: luckys at stanford.edu (Lucky Suriyasena Liyanage) Date: Sun, 24 Feb 2013 23:14:58 -0800 (PST) Subject: [fiji2] Fiji free until 12PM today Message-ID: <2062919646.5649016.1361776498840.JavaMail.root@stanford.edu> From jouyang at stanford.edu Mon Feb 25 22:13:36 2013 From: jouyang at stanford.edu (Joanie Ouyang) Date: Mon, 25 Feb 2013 22:13:36 -0800 (PST) Subject: [fiji2] fiji2 free until 8am Message-ID: <1451027550.7139876.1361859216312.JavaMail.root@stanford.edu> precursor not on. -Joanie Ouyang PhD Candidate, Materials Science and Engineering, Stanford University From luckys at stanford.edu Tue Feb 26 15:42:22 2013 From: luckys at stanford.edu (Lucky Suriyasena Liyanage) Date: Tue, 26 Feb 2013 15:42:22 -0800 (PST) Subject: [fiji2] Free till midnight! Message-ID: <1815281159.8075167.1361922142498.JavaMail.root@stanford.edu> Found time on Savannah instead! Lucky From jprovine at stanford.edu Wed Feb 27 01:20:37 2013 From: jprovine at stanford.edu (J Provine) Date: Wed, 27 Feb 2013 01:20:37 -0800 Subject: [fiji2] fiji2 free now until 11am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrshakya at stanford.edu Wed Feb 27 11:39:56 2013 From: jrshakya at stanford.edu (Jyotindra Shakya) Date: Wed, 27 Feb 2013 11:39:56 -0800 (PST) Subject: [fiji2] released until 3:00pm eom Message-ID: <506840313.16863126.1361993996235.JavaMail.root@stanford.edu> From jprovine at stanford.edu Wed Feb 27 17:13:01 2013 From: jprovine at stanford.edu (J Provine) Date: Wed, 27 Feb 2013 17:13:01 -0800 Subject: [fiji2] interesting talk for ald enthusiasts Message-ID: *Thursday, Feb 28,* *4 - 5pm* *MERL 203* *Light refreshments will be provided* **** *Thermal-ALD versus Plasma-ALD* **** Atomic Layer Deposition (ALD)is an important tool for Nanotechnology, which has created a need for atomic level deposition of high-quality thin film materials. ALD uses typically two chemicals to create alternate, saturated, chemical reactions on a surface, resulting in unique self-limiting growth with excellent features like conformality, uniformity, repeatability, and accurate thickness control. Typical growth rate is less than one molecule layer per deposition cycle. ALD produces amorphous, crystalline, or even epitaxial ultra thin pin-hole free films depending of materials, deposition temperature, and surface.**** **** In this lecture the mechanism of thermally-activated Chemical Vapor Deposition (CVD) will be used to introduce Thermal-ALD. The mechanisms of ALD will then be presented in detail along with experimental achievements. Several examples of depositions of selected materials using Thermal-ALD and Plasma-ALD will be used to illustrate advantages of the use of a high reactive precursor, such as an oxygen plasma. -------------- next part -------------- An HTML attachment was scrubbed... URL: