From cbaxter at snf.stanford.edu Fri Jul 6 08:45:26 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Jul 2007 08:45:26 -0700 Subject: Shutdown fusion SNF 2007-06-21 14:38:30: Lamp rotator failure Message-ID: secured main ac plug on power supply. From cbaxter at snf.stanford.edu Fri Jul 6 08:45:48 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Jul 2007 08:45:48 -0700 Subject: Problem fusion SNF 2007-06-01 15:54:04: wafer handler reset Message-ID: Reset wafer handling. From rissman at snf.stanford.edu Fri Jul 6 14:51:28 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 6 Jul 2007 14:51:28 -0700 Subject: Problem fusion SNF 2007-07-06 14:51:25: send robot Message-ID: The send robot still shakes. From rissman at snf.stanford.edu Fri Jul 6 14:52:47 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 6 Jul 2007 14:52:47 -0700 Subject: Shutdown fusion SNF 2007-07-06 14:52:47: system crash Message-ID: get "send trans pos err" after it runs one wafer. From cbaxter at snf.stanford.edu Thu Jul 12 14:37:47 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Jul 2007 14:37:47 -0700 Subject: Comment fusion SNF 2007-07-12 14:37:47: Sender problem Message-ID: Secured sender rotation/extension arm position wafer and that help the vibration problem on arm when extented. Now working on receiver side, problem during unload. From cbaxter at snf.stanford.edu Thu Jul 12 14:40:31 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Jul 2007 14:40:31 -0700 Subject: Comment fusion SNF 2007-07-12 14:40:30: Send robot error. Message-ID: Secured rotation/extension position arm motor and that help cut down on arm vibration when arm is extented. Now working on receiver side, problem with wafer unloading. From latta at snf.stanford.edu Thu Jul 19 09:06:11 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:06:11 -0700 Subject: Shutdown fusion SNF 2007-07-06 14:52:47: system crash Message-ID: Cesar fixed (?) From latta at snf.stanford.edu Thu Jul 19 09:06:59 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:06:59 -0700 Subject: Comment fusion SNF 2007-06-07 11:44:24: handler Message-ID: will only take 2 wafers before indexer failure. For now just do two wafers at a time... From latta at snf.stanford.edu Thu Jul 19 09:07:36 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:07:36 -0700 Subject: Comment fusion SNF 2007-06-07 11:44:51: processes Message-ID: default process ok. From latta at snf.stanford.edu Thu Jul 19 09:08:08 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:08:08 -0700 Subject: Problem fusion SNF 2007-07-06 14:51:25: send robot Message-ID: use only two wafers at a time for now. From latta at snf.stanford.edu Thu Jul 19 09:08:34 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:08:34 -0700 Subject: Comment fusion SNF 2007-07-12 14:37:47: Sender problem Message-ID: ok From latta at snf.stanford.edu Thu Jul 19 09:08:46 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:08:46 -0700 Subject: Comment fusion SNF 2007-07-12 14:40:30: Send robot error. Message-ID: ok From latta at snf.stanford.edu Thu Jul 19 09:09:46 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:09:46 -0700 Subject: Problem fusion SNF 2007-07-19 09:09:46: Cassette to cassette not ok Message-ID: For now use only 2 wafers at a time to avoid error. From rissman at snf.stanford.edu Thu Jul 19 09:55:38 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:55:38 -0700 Subject: Shutdown fusion SNF 2007-07-19 09:55:38: not ready Message-ID: won't run wafers. Automatic deck clearing gets error "recv wafer lost". makes gronking noise when the cassette goes up and down. I am turning off power until Cesar can look at it. From mtang at snf.stanford.edu Tue Jul 24 09:11:13 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 24 Jul 2007 09:11:13 -0700 Subject: Shutdown fusion SNF 2007-07-19 09:55:38: not ready Message-ID: One wafer at a time can be run. From mtang at snf.stanford.edu Tue Jul 24 09:11:58 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 24 Jul 2007 09:11:58 -0700 Subject: Problem fusion SNF 2007-07-24 09:11:57: OK for one wafer at a time Message-ID: Can only receive one wafer at a time.