From mtang at snf.stanford.edu Mon Mar 19 09:25:37 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 19 Mar 2007 09:25:37 -0700 Subject: Problem fusion SNF 2006-09-26 08:46:47: Under process qual Message-ID: Process qualified. Demonstrated dramatically improved resist selectivity for stsetch. Contact process staff for training.