Shutdown fusion SNF 2008-07-29 15:33:43: Setup lost

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 6 11:59:18 PDT 2008


Redefined the send and recieve pickup and deliver positions. The "RF detector tripped" error was caused by an open interlock. There is a small button on the top of the RF detector. When the irradiator lift mechanism is all the way down, this switch is depressed and RF error is created. Slightly lifted the cradle up off of the switch. Re-started the tool- All powered up OK. Tested operation- All OK. Created 3 programs for PEB. THe programs are as follows: Program M- 90 deg. C, 60 seconds, Program N: 90 Deg. C, 90 seconds, Program O: 90 Deg. C, 120 seconds. Tested wafer transfer with 75 wafers- All tested OK. Will verify the interlock switch operation. It almost seems that it should interlock the tool when the lift mechanism and irradiator are up and the interlock closed when the irradiator is down in a safe position.  The system is ready for PEB testing.




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