From gsosa at snf.stanford.edu Mon Feb 11 11:30:24 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Feb 2008 11:30:24 -0800 Subject: Shutdown fusion SNF 2007-12-23 09:36:10: CDA leak in flexible tubing .... Message-ID: Replaced the tubing with 3/8" teflon. Turned on system pressure- OK no, leaks. Powered system up- Initialized OK. System needs testing. From rissman at snf.stanford.edu Mon Feb 11 13:42:51 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Mon, 11 Feb 2008 13:42:51 -0800 Subject: Shutdown fusion SNF 2008-02-11 13:42:51: Message-ID: From rissman at snf.stanford.edu Mon Feb 11 13:43:33 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Mon, 11 Feb 2008 13:43:33 -0800 Subject: Shutdown fusion SNF 2008-02-11 13:43:32: lamp rotator failure Message-ID: System will not start lamp. Error message lamp rotator failure. From rissman at snf.stanford.edu Mon Feb 11 13:44:02 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Mon, 11 Feb 2008 13:44:02 -0800 Subject: Shutdown fusion SNF 2008-02-11 13:42:51: Message-ID: see next entry From gsosa at snf.stanford.edu Mon Feb 11 15:22:28 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Feb 2008 15:22:28 -0800 Subject: Shutdown fusion SNF 2008-02-11 13:43:32: lamp rotator failure Message-ID: Loose power plug at J104. The 5 prong twist lock plug could not be twist locked in place due to the length and stifness of the power cord. Twisted the power plug 360 degrees counterclockwise so that when it is plugged back in, the clockwise tension will keep the twist -lock fully engaged. Tested lamps several times in diagnostics with no lamp rotator failures. Ran process "A". All OK for single wafer processing. There are still receive indexer issues.