Shutdown fusion SNF 2008-02-11 13:43:32: lamp rotator failure

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Feb 11 15:22:28 PST 2008


Loose power plug at J104. The 5 prong twist lock plug could not be twist locked in place due to the length and stifness of the power cord. Twisted the power plug 360 degrees counterclockwise so that when it is plugged back in, the clockwise tension will keep the twist -lock fully engaged. Tested lamps several times in diagnostics with no lamp rotator failures. Ran process "A". All OK for single wafer processing. There are still receive indexer issues. 




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