From gsosa at snf.stanford.edu Tue Jul 29 15:33:44 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Jul 2008 15:33:44 -0700 Subject: Shutdown fusion SNF 2008-07-29 15:33:43: Setup lost Message-ID: tried to exercise the tool. When powered up , system reported "Initial setup lost". Did the wafer handling setup. Now have a "RF detector tripped" error. Need to troubleshoot further.