From rissman at snf.stanford.edu  Tue Mar  4 10:32:41 2008
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 4 Mar 2008 10:32:41 -0800
Subject: Shutdown fusion SNF 2008-03-04 10:32:40: get errror "VAC NOT ACHIEVED"
Message-ID: <mailman.56.1356281712.3840.fusion-pcs@snf.stanford.edu>




From rissman at snf.stanford.edu  Tue Mar  4 10:45:55 2008
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 4 Mar 2008 10:45:55 -0800
Subject: Shutdown fusion SNF 2008-03-04 10:32:40: get errror "VAC NOT ACHIEVED"
Message-ID: <mailman.57.1356281712.3840.fusion-pcs@snf.stanford.edu>

bad test wafer, ok with good one



From rissman at snf.stanford.edu  Wed Mar  5 16:51:57 2008
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Wed, 5 Mar 2008 16:51:57 -0800
Subject: Comment fusion SNF 2008-03-05 16:51:56: tool condition
Message-ID: <mailman.58.1356281712.3840.fusion-pcs@snf.stanford.edu>

The last user did not shutdown the tool properly.  Please be nice to this tool.



From rissman at snf.stanford.edu  Tue Mar 11 10:39:18 2008
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 11 Mar 2008 10:39:18 -0700
Subject: Comment fusion SNF 2008-03-11 10:39:17: PEB program
Message-ID: <mailman.59.1356281712.3840.fusion-pcs@snf.stanford.edu>

created program M which is a 60 second bake and 110 Centigrade, no UV exposure.



From rissman at snf.stanford.edu  Tue Mar 11 10:39:44 2008
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 11 Mar 2008 10:39:44 -0700
Subject: Comment fusion SNF 2008-03-05 16:51:56: tool condition
Message-ID: <mailman.60.1356281712.3840.fusion-pcs@snf.stanford.edu>

please be nice to this tool



From gsosa at snf.stanford.edu  Fri Mar 14 10:41:28 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 14 Mar 2008 10:41:28 -0700
Subject: Problem fusion SNF 2007-07-24 09:11:57: OK for one wafer at a time
Message-ID: <mailman.61.1356281712.3840.fusion-pcs@snf.stanford.edu>

Recieve indexer handling issues. Indexer making noise when travelling up/down. Cleaed the lead screw and linear guide shaft. Lubed the lead screw and guide shaft. Exercised elevator in diagnostics. New smooth and no more noise. Cycled 135 wafers on 3/13 including 25 with program A. Cycled another 50 wafers 3/14. No wafer transfer problems at reciever. System up and ready to use.



From gsosa at snf.stanford.edu  Fri Mar 14 10:41:44 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 14 Mar 2008 10:41:44 -0700
Subject: Problem fusion SNF 2007-09-27 17:21:13: wafer handler errors
Message-ID: <mailman.62.1356281712.3840.fusion-pcs@snf.stanford.edu>

Recieve indexer handling issues. Indexer making noise when travelling up/down. Cleaed the lead screw and linear guide shaft. Lubed the lead screw and guide shaft. Exercised elevator in diagnostics. New smooth and no more noise. Cycled 135 wafers on 3/13 including 25 with program A. Cycled another 50 wafers 3/14. No wafer transfer problems at reciever. System up and ready to use.