Shutdown fusion SNF 2008-03-04 10:32:40: get errror "VAC NOT ACHIEVED"
rissman at snf.stanford.edu
rissman at snf.stanford.edu
Tue Mar 4 10:45:55 PST 2008
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Shutdown fusion SNF 2008-03-04 10:32:40: get errror "VAC NOT ACHIEVED"
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Comment fusion SNF 2008-03-05 16:51:56: tool condition
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bad test wafer, ok with good one
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Shutdown fusion SNF 2008-03-04 10:32:40: get errror "VAC NOT ACHIEVED"
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Comment fusion SNF 2008-03-05 16:51:56: tool condition
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