Problem fusion SNF 2007-09-27 17:21:13: wafer handler errors

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 14 10:41:44 PDT 2008


Recieve indexer handling issues. Indexer making noise when travelling up/down. Cleaed the lead screw and linear guide shaft. Lubed the lead screw and guide shaft. Exercised elevator in diagnostics. New smooth and no more noise. Cycled 135 wafers on 3/13 including 25 with program A. Cycled another 50 wafers 3/14. No wafer transfer problems at reciever. System up and ready to use.




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