From yspark at snf.stanford.edu  Wed Dec  2 16:00:28 2009
From: yspark at snf.stanford.edu (yspark at snf.stanford.edu)
Date: Wed, 2 Dec 2009 16:00:28 -0800
Subject: Shutdown fusion SNF 2009-12-02 16:00:27: Fusion Shut Down
Message-ID: <mailman.79.1356281712.3840.fusion-pcs@snf.stanford.edu>

While running dummy wafer at the beginning, the process has been stopped and the dummy wafer is still inside.  There was funny sound at the deck while moving the metal cassette.